A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.

A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A microscope system may comprise a plurality of microscope modules, a cassette for holding a plurality of slides, a slide loader configured to move the plurality of slides between the cassette and the plurality of microscope modules, and a processor coupled to the slide loader. The processor may be configured with instructions which, when executed, cause the slide loader to move a slide into or from a selected microscope module among the plurality of microscope modules. Various other methods, systems, and computer-readable media are also disclosed.

A microscope system may comprise a plurality of microscope modules, a cassette for holding a plurality of slides, a slide loader configured to move the plurality of slides between the cassette and the plurality of microscope modules, and a processor coupled to the slide loader. The processor may be configured with instructions which, when executed, cause the slide loader to move a slide into or from a selected microscope module among the plurality of microscope modules. Various other methods, systems, and computer-readable media are also disclosed.

In an image acquisition device, when capturing an optical image of a sample S through lane scanning, the number of tile images T included in a tile image row R acquired in one lane is counted, and a determination is made as to whether or not the number of images reaches a planned acquisition count that is set in advance. In a case where it is determined that the number of images does not reach the planned acquisition count, lane scanning with respect to the lane is re-executed. Accordingly, even when a loss of the tile images T occurs due to an environment load, the tile images T are complemented by re-execution of the lane scanning, and thus it is possible to prevent the loss of the tile images T in an observation image.

In an image acquisition device, when capturing an optical image of a sample S through lane scanning, the number of tile images T included in a tile image row R acquired in one lane is counted, and a determination is made as to whether or not the number of images reaches a planned acquisition count that is set in advance. In a case where it is determined that the number of images does not reach the planned acquisition count, lane scanning with respect to the lane is re-executed. Accordingly, even when a loss of the tile images T occurs due to an environment load, the tile images T are complemented by re-execution of the lane scanning, and thus it is possible to prevent the loss of the tile images T in an observation image.

A method is provided comprising: positioning a slide that includes a concave region that is formed in a top surface of the slide and that can contain an object, such that a focal point of an objective lens of a fluorescence lifetime imaging microscopy (FLIM) device is within an area of the concave region between a bottom surface of the concave region and the top surface of the slide; and using the FLIM device to capture a sequence of wide field images of a portion of the object within a field of view of the objective lens.

A method is provided comprising: positioning a slide that includes a concave region that is formed in a top surface of the slide and that can contain an object, such that a focal point of an objective lens of a fluorescence lifetime imaging microscopy (FLIM) device is within an area of the concave region between a bottom surface of the concave region and the top surface of the slide; and using the FLIM device to capture a sequence of wide field images of a portion of the object within a field of view of the objective lens.