A MEMS shutter including: a substrate of semiconductor material traversed by a main aperture, and a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures; a plurality of actuators; and a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter, pairs of adjacent shielding structures at least partially overlap one another.

A MEMS shutter including: a substrate of semiconductor material traversed by a main aperture, and a first semiconductor layer and a second semiconductor layer, which form a supporting structure fixed to the substrate; a plurality of deformable structures; a plurality of actuators; and a plurality of shielding structures, each of which is formed by a corresponding portion of at least one between the first semiconductor layer and the second semiconductor layer, the shielding structures being arranged angularly around the underlying main aperture so as to provide shielding of the main aperture, each shielding structure being further coupled to the supporting structure via a corresponding deformable structure. Each actuator may be controlled so as to cause a rotation of a corresponding shielding structure between a respective first position and a respective second position, thus varying shielding of the main aperture. The first and second positions of the shielding structures are such that, in at least one operating condition of the MEMS shutter, pairs of adjacent shielding structures at least partially overlap one another.

The invention relates to a modulatable infrared emitter comprising an aperture structure, a structured micro-heating element, and an actuator, wherein the aperture structure and the structured micro-heating element are movable relative to each other in parallel planes by means of the actuator to modulate the intensity of emitted infrared radiation. The invention further relates to methods of manufacturing the infrared emitter, a method of modulating emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

The invention relates to a modulatable infrared emitter comprising an aperture structure, a structured micro-heating element, and an actuator, wherein the aperture structure and the structured micro-heating element are movable relative to each other in parallel planes by means of the actuator to modulate the intensity of emitted infrared radiation. The invention further relates to methods of manufacturing the infrared emitter, a method of modulating emission of infrared radiation using the infrared emitter, and preferred uses of the infrared emitter. In further aspects the invention relates to a system comprising the infrared emitter and a control device for regulating the actuator.

An electrowetting display device includes a first support plate and a second support plate. A first fluid and a second fluid that is immiscible with the first fluid are between the first support plate and the second support plate. A plurality of pixel walls having concave side surfaces are formed on the first support plate to define a plurality of electrowetting pixels. A pixel electrode is disposed on the first support plate for applying a voltage within each electrowetting pixel to cause relative displacement of the first fluid and the second fluid.

An electrowetting display device includes a first support plate and a second support plate. A first fluid and a second fluid that is immiscible with the first fluid are between the first support plate and the second support plate. A plurality of pixel walls having concave side surfaces are formed on the first support plate to define a plurality of electrowetting pixels. A pixel electrode is disposed on the first support plate for applying a voltage within each electrowetting pixel to cause relative displacement of the first fluid and the second fluid.

A shutter assembly includes a first shutter blade having a first toothed arm extending therefrom and a first light transmitting aperture therein, and a second shutter blade positioned adjacent and parallel to the first shutter blade. The second shutter blade has a second toothed arm extending therefrom and a second light transmitting aperture therein. The first and second shutter blades are supported to allow parallel linear motion. A motor gear is disposed between, and meshed with, the first and second toothed arms such that rotation of the gear causes the first and second shutter blades to move linearly in opposite directions between an open position in which the first and second light transmitting apertures are in an overlapping relationship with respect to one another, and a closed position in which the first and second light transmitting apertures are in a non-overlapping relationship with respect to one another.

A shutter assembly includes a first shutter blade having a first toothed arm extending therefrom and a first light transmitting aperture therein, and a second shutter blade positioned adjacent and parallel to the first shutter blade. The second shutter blade has a second toothed arm extending therefrom and a second light transmitting aperture therein. The first and second shutter blades are supported to allow parallel linear motion. A motor gear is disposed between, and meshed with, the first and second toothed arms such that rotation of the gear causes the first and second shutter blades to move linearly in opposite directions between an open position in which the first and second light transmitting apertures are in an overlapping relationship with respect to one another, and a closed position in which the first and second light transmitting apertures are in a non-overlapping relationship with respect to one another.

A flash lamp 32 excites a laser rod 31. A Q switch 35 which changes the loss of the optical resonator according to the voltage applied is inserted on the optical path of a pair of mirrors 33 and 34 forming the optical resonator. An optical path shutter 39 is provided on the optical path of laser emission light. In a first operation mode in which laser emission is performed, the optical path shutter 39 is opened and the voltage applied to the Q switch 35 is changed from a high voltage to, for example, 0 V to emit pulsed laser light after the flash lamp 32 excites the laser rod 31. In a second operation mode in which the laser emission is interrupted and waited for, the optical path shutter 39 is closed and the voltage applied to the Q switch 35 is, for example, 0 V.

A flash lamp 32 excites a laser rod 31. A Q switch 35 which changes the loss of the optical resonator according to the voltage applied is inserted on the optical path of a pair of mirrors 33 and 34 forming the optical resonator. An optical path shutter 39 is provided on the optical path of laser emission light. In a first operation mode in which laser emission is performed, the optical path shutter 39 is opened and the voltage applied to the Q switch 35 is changed from a high voltage to, for example, 0 V to emit pulsed laser light after the flash lamp 32 excites the laser rod 31. In a second operation mode in which the laser emission is interrupted and waited for, the optical path shutter 39 is closed and the voltage applied to the Q switch 35 is, for example, 0 V.