A mirror drive portion which causes a mirror portion to swing around a predetermined swing axis; a single optical sensor including a single light emission portion and a single light reception portion which receives light emitted from the light emission portion; a light blocking portion which is arranged in the mirror portion to swing together with the swing of the mirror portion and periodically blocks the light emitted from the light emission portion along with the swing; and a mirror control portion which controls the swing of the mirror portion based on an alternating voltage and a detection signal of the optical sensor, wherein the mirror control portion acquires a state of the swing of the mirror portion based on a light reception state of the light reception portion and a zero-cross timing of the alternating voltage, and controls the swing of the mirror portion.

A mirror drive portion which causes a mirror portion to swing around a predetermined swing axis; a single optical sensor including a single light emission portion and a single light reception portion which receives light emitted from the light emission portion; a light blocking portion which is arranged in the mirror portion to swing together with the swing of the mirror portion and periodically blocks the light emitted from the light emission portion along with the swing; and a mirror control portion which controls the swing of the mirror portion based on an alternating voltage and a detection signal of the optical sensor, wherein the mirror control portion acquires a state of the swing of the mirror portion based on a light reception state of the light reception portion and a zero-cross timing of the alternating voltage, and controls the swing of the mirror portion.

This application discloses a galvanometer and a LiDAR. The galvanometer includes a first shaft and a second shaft. A first shaft drive voltage is used to control the galvanometer to vibrate around the first shaft, a second shaft drive voltage is used to control the galvanometer to vibrate around the second shaft, and the first shaft drive voltage and the second shaft drive voltage are superimposed to drive the galvanometer. There are N working intervals in a second shaft drive period, and in the N working intervals, the second shaft drive voltage and the first shaft drive voltage jointly drive the galvanometer to form N scanning tracks. The N scanning tracks do not coincide and N is a positive integer.

A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.

In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

An optical sensing system is provided, including a sensing module, a light emitter, and a light receiver. The sensing module has a substrate, an optical waveguide disposed on the substrate, and a sensing membrane disposed on the optical waveguide for carrying a specimen. The light emitter emits a sensing light to the optical waveguide, and the light receiver receives the sensing light that propagates through the optical waveguide.

To provide a three-dimensional survey apparatus, a three-dimensional survey method, and a three-dimensional survey program which are capable of suppressing an occurrence of a data-deficient part. A three-dimensional survey apparatus includes a collimating ranging unit, a scanner unit, and a control calculation portion. If there is a data-deficient part where three-dimensional data is not acquired among a measurement object when the scanner unit acquires point cloud data, the control calculation portion executes control to replenish the three-dimensional data related to the data-deficient part having been acquired by the collimating ranging unit to the point cloud data having been acquired by the scanner unit.

To provide a three-dimensional survey apparatus, a three-dimensional survey method, and a three-dimensional survey program which are capable of suppressing an occurrence of a data-deficient part. A three-dimensional survey apparatus includes a collimating ranging unit, a scanner unit, and a control calculation portion. If there is a data-deficient part where three-dimensional data is not acquired among a measurement object when the scanner unit acquires point cloud data, the control calculation portion executes control to replenish the three-dimensional data related to the data-deficient part having been acquired by the collimating ranging unit to the point cloud data having been acquired by the scanner unit.

A laser beam scanning (“LBS”) display device is configured with an optical system that includes a laser beam emitter configured to emit a laser beam. The optical system also includes a driver configured to generate a driving signal for controlling a mirror, such as a microelectromechanical systems (“MEMS”) mirror. The optical system also includes a controller configured to generate a driving signal while rejecting a system disturbance response.