A microelectromechanical systems (MEMS) scanner having actuator pairs adjacent to sides of a scanning mirror. Actuator pairs include individual actuators that are physically located adjacent to opposite sides of the scanning mirror and that, upon activation, induce angular rotation into the scanning mirror. Torsional beam flexures suspend the scanning mirror from a frame structure and facilitate rotation of the scanning mirror about a rotational axis. During operation of the MEMS scanner, a drive signal may be applied to the actuator pair to cause each individual actuator, of the actuator pair, to deform in unison, thereby generating some degree of tip deflection. Since the torsional beam flexures are connected to the tips of the actuators via the lever arms, this tip deflection serves as actuator stroke that induces torsional deformation into the torsional beam flexure—thereby causing rotation of the scanning mirror about the rotational axis.

A yoke assembly of an oscillatory system is described herein. The yoke assembly includes a yoke structure. The yoke structure includes a first sidewall and a second sidewall, the second sidewall spaced apart from the first sidewall, the first and second sidewalls having a gap therebetween. The yoke structure includes at least one member extending between the first and second sidewalls, a first flange extending laterally from the first sidewall and a second flange extending laterally from the second sidewall. The yoke structure is a unitary structure having the first and second sidewalls and the first and second flanges integrally connected.

A light detection and ranging system can employ a metal insulator metal tunnel junction positioned atop a substrate. Activation of the metal insulator metal tunnel junction by a signal from a controller can generate light via inelastic scattering. Light to be used to detect downrange targets can be combined from multiple junctions via a multimode interference combiner.

A light detection and ranging system can have a photonic integrated circuit coupled to a grating coupler and a scanning array. The scanning array may consist of a mechanical actuator configured to move at least one detector in response to a calibration operation. As a result, coherent downrange detection can be achieved with light modulation, optical mixing, and balanced detection.

A method for scanning solid angles is provided using at least two electromagnetic beams, at least one electromagnetic beam being generated that is subsequently deflected along a horizontal angle and/or along a vertical angle with the aid of a rotatable mirror; the solid angles being scanned using the at least one electromagnetic beam; and at least one reflected electromagnetic beam being received, after being reflected off an object, by a receiving optics that is pivotable along the horizontal angle synchronously with the mirror. Furthermore, a LIDAR device for carrying out the method is provided.

Provided is a beam scanning apparatus including a plurality of antenna resonators disposed two-dimensionally in a row direction and a column direction, a plurality of row voltage lines that are configured to provide a plurality of driving voltages in a row direction, respectively, a plurality of column voltage lines that are configured to provide a plurality of driving voltages in a column direction, respectively, and a driving voltage conversion circuit configured to control a driving voltage applied to each of the plurality of antenna resonators based on a driving voltage in the row direction that is provided from each of the plurality of row voltage lines and a driving voltage in the column direction that is provided from each of the plurality of column voltage lines.

Provided is a beam scanning apparatus including a plurality of antenna resonators disposed two-dimensionally in a row direction and a column direction, a plurality of row voltage lines that are configured to provide a plurality of driving voltages in a row direction, respectively, a plurality of column voltage lines that are configured to provide a plurality of driving voltages in a column direction, respectively, and a driving voltage conversion circuit configured to control a driving voltage applied to each of the plurality of antenna resonators based on a driving voltage in the row direction that is provided from each of the plurality of row voltage lines and a driving voltage in the column direction that is provided from each of the plurality of column voltage lines.

Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

A scanner for a lidar system is configured to direct emitted light to scan a field of regard of the lidar system in accordance with a scan pattern. The scanner includes a mirror and an actuator assembly. The mirror includes a reflective surface and a rear surface and is pivotable along a mirror axle. The actuator assembly is disposed along the rear surface of the mirror and is configured to exert a torque on the mirror to cause the mirror to pivot about the mirror axle.

An optical sensor includes a radiation part that irradiates an object to be measured with line shaped light; and an imaging part that receives line shaped light reflected by the object to be measured and captures an image of the object to be measured in a predetermined exposure time. The radiation part includes a light generation part that generates the line shaped light, and a light vibration part that irradiates the object to be measured with the line shaped light generated by the light generation part while vibrating the line shaped light in a length direction during the exposure time.