An optical assembly includes a beam path, passing, in succession, through multiple microlens arrays and a Fourier lens assembly. The microlens arrays have a uniform aperture of their microlenses, and the entirety of the microlens arrays has an effective focal length. The optical assembly further includes an adjustment mechanism, configured to adjust a mutual optical distance of at least some of the microlens arrays in the beam path, thereby setting the effective focal length of the entirety of the microlens arrays. The adjustment mechanism has multiple adjustment positions i=1, . . . , M wherein M is a natural number ≥2, i is an adjustment position index, at which the term $\frac{a^2}{\lambda .Math.f_{\mathrm{ML},i}}$
in each case essentially smoothly results in a natural number Ni. λ is a center wavelength, fML,i is an effective focal length fML of the entirety of the microlens arrays set by the adjustment position i.

A light deflector includes a fixed part, a movable part provided with a reflection plane, a pair of elastic supporting units configured to support the movable part, a pair of connecting parts configured to connect between the pair of elastic supporting units and the fixed part, and a driving unit configured to deform the pair of connecting parts to make the movable part oscillate. The pair of connecting parts are supported by the fixed part in a cantilevered state, and each one of the pair of connecting parts having a folded structure. An optical scanning system includes the light deflector. An image projection device includes the light deflector.

A method for reducing apparatus performance variation. The method includes obtaining (i) a reference performance (e.g., CD) of a reference apparatus (e.g, a reference scanner), (ii) a set of initial leading degrees of freedom selected from a plurality of degrees of freedom of a plurality of pupil facet mirrors of an apparatus (e.g., to be matched scanner) that is selected to reproduce the reference performance, and (iii) exposure data related to one or more parameters (e.g., CD, overlay, focus, etc.) of the patterning process indicating a performance of the apparatus based on the set of initial leading degrees of freedom; and determining a matching pupil of the apparatus based on the set of initial leading degrees of freedom and the exposure data such that the matching pupil reduces a difference between the performance of the apparatus and the reference performance.

A method for reducing apparatus performance variation. The method includes obtaining (i) a reference performance (e.g., CD) of a reference apparatus (e.g., a reference scanner), (ii) a set of initial leading degrees of freedom selected from a plurality of degrees of freedom of a plurality of pupil facet mirrors of an apparatus (e.g., to be matched scanner) that is selected to reproduce the reference performance, and (iii) exposure data related to one or more parameters (e.g., CD, overlay, focus, etc.) of the patterning process indicating a performance of the apparatus based on the set of initial leading degrees of freedom; and determining a matching pupil of the apparatus based on the set of initial leading degrees of freedom and the exposure data such that the matching pupil reduces a difference between the performance of the apparatus and the reference performance.

An optical unit includes a first light source, a second light source, a rotary reflector that rotates about an axis of rotation while reflecting first light emitted from the first light source, and a projection lens that projects the first light reflected by the rotary reflector into a light illuminating direction of the optical unit to form a first light distribution pattern. The second light source is disposed such that second light emitted from the second light source enters the projection lens without being reflected by the rotary reflector. The projection lens is configured to project the second light into the light illuminating direction of the optical unit to form a second light distribution pattern such that the second light distribution pattern overlaps an end portion of the first light distribution pattern in a right-left direction.

An optical unit includes a first light source, a second light source, a rotary reflector that rotates about an axis of rotation while reflecting first light emitted from the first light source, and a projection lens that projects the first light reflected by the rotary reflector into a light illuminating direction of the optical unit to form a first light distribution pattern. The second light source is disposed such that second light emitted from the second light source enters the projection lens without being reflected by the rotary reflector. The projection lens is configured to project the second light into the light illuminating direction of the optical unit to form a second light distribution pattern such that the second light distribution pattern overlaps an end portion of the first light distribution pattern in a right-left direction.

A reflective beam conditioner includes a monolithic body having two or more mirrors and at least one alignment feature. The at least one alignment feature has a predetermined orientation or position with respect to at least one of the two or more mirrors. The two or more mirrors are configured such that, in use, a beam reflects once sequentially off of each of the mirrors. A method of manufacturing such a reflective beam conditioner includes providing a monolithic body. The method further includes restraining the monolithic body to a machining fixture. The method further includes forming a first mirror, a second mirror, and an alignment feature in the monolithic body with the monolithic body restrained in the machining fixture.

A laser projector includes a laser assembly, a beam combination mirror group and a phase delaying component. The laser assembly includes a red laser light emitting region, a blue laser light emitting region and a green laser light emitting region. Red laser light is polarized in a first direction, green laser light is polarized in a second direction, and blue laser light is polarized in a third direction. The beam combination mirror group combines the red laser light, the blue laser light and the green laser light. The phase delaying component is on a light emitting path of at least one of the red laser light, the blue laser light the green laser light, and changes a polarization direction of the at least one of the red laser light, the blue laser light or the green laser light before being output by the beam combination mirror group.

An optical unit includes a first light source, a second light source, a rotary reflector that rotates about an axis of rotation while reflecting first light emitted from the first light source, and a projection lens that projects the first light reflected by the rotary reflector into a light illuminating direction of the optical unit to form a first light distribution pattern. The second light source is disposed such that second light emitted from the second light source enters the projection lens without being reflected by the rotary reflector. The projection lens is configured to project the second light into the light illuminating direction of the optical unit to form a second light distribution pattern such that the second light distribution pattern overlaps an end portion of the first light distribution pattern in a right-left direction.

The invention relates to an optical device (1) for enhancing the resolution of an image or for reducing speckle noise.