A method of processing by controlling one or more beam characteristics of an optical beam may include: launching the optical beam into a first length of fiber having a first refractive-index profile (RIP); coupling the optical beam from the first length of fiber into a second length of fiber having a second RIP and one or more confinement regions; modifying the one or more beam characteristics of the optical beam in the first length of fiber, in the second length of fiber, or in the first and second lengths of fiber; confining the modified one or more beam characteristics of the optical beam within the one or more confinement regions of the second length of fiber; and/or generating an output beam, having the modified one or more beam characteristics of the optical beam, from the second length of fiber. The first RIP may differ from the second RIP.

A method for reducing apparatus performance variation. The method includes obtaining (i) a reference performance (e.g., CD) of a reference apparatus (e.g., a reference scanner), (ii) a set of initial leading degrees of freedom selected from a plurality of degrees of freedom of a plurality of pupil facet mirrors of an apparatus (e.g., to be matched scanner) that is selected to reproduce the reference performance, and (iii) exposure data related to one or more parameters (e.g., CD, overlay, focus, etc.) of the patterning process indicating a performance of the apparatus based on the set of initial leading degrees of freedom; and determining a matching pupil of the apparatus based on the set of initial leading degrees of freedom and the exposure data such that the matching pupil reduces a difference between the performance of the apparatus and the reference performance.

Apparatus for generating an optical pattern from image points in an image plane, including: a control unit; a micro-mirror array; an illumination unit controllable by the control unit; a focusing unit; the control unit being configured to control one or several micro-mirror groups formed of several micro-mirrors of the multitude of micro-mirrors such that the centroid beams reflected at the micro-mirrors of one of the micro-mirror groups meet in the image plane, and such that optical path lengths of the centroid beams reflected at the micro-mirrors of the respective micro-mirror group are equal from the illumination unit up to the image plane or differ by an integer multiple of a wavelength of the light beams in order to generate an image point of the image points in such a way.

A light emitting device and an image capturing device using the light emitting device. The light emitting device includes a light emitting element, a digital micro mirror (DMD), a reflecting prism, and a housing. The light from the light emitting element is modulated by the DMD into structured light. The reflecting prism is on an optical path of the source light. The reflecting prism guides the source light to the DMD. The housing defines a receiving cavity. The light emitting element, the reflecting prism, and the DMD are received in the receiving cavity. The housing defines a light exit opening, the structured light exits from the light exit opening.

A light source module includes a light source; an optical fiber configured to guide light output from the light source; a pair of holding members configured to hold both ends of a first portion of the optical fiber such that the first portion extends linearly; a first vibrator configured to vibrate the first portion along a first direction intersecting an extending direction of the first portion; and a second vibrator configured to vibrate the first portion along a second direction intersecting the extending direction and differing from the first direction.

An optical assembly includes a beam path, passing, in succession, through multiple microlens arrays and a Fourier lens assembly. The microlens arrays have a uniform aperture of their microlenses, and the entirety of the microlens arrays has an effective focal length. The optical assembly further includes an adjustment mechanism, configured to adjust a mutual optical distance of at least some of the microlens arrays in the beam path, thereby setting the effective focal length of the entirety of the microlens arrays. The adjustment mechanism has multiple adjustment positions i=1, . . . , M wherein M is a natural number ≥2, i is an adjustment position index, at which the term

[00001]$\frac{a^2}{\lambda .Math.f_{\mathrm{ML},i}}$

in each case essentially smoothly results in a natural number Ni. λ is a center wavelength, fML,i is an effective focal length fML of the entirety of the microlens arrays set by the adjustment position i.

An illuminating device includes: a light source; a light guide element; and a deflecting element that has a deflecting surface for deflecting illumination light coming from the light source towards a light-incident end of the light guide element and that makes the illumination light incident on the light-incident end at incident angles according to deflection angles. The deflecting element is configured to change, between a first deflection angle and a second deflection angle, the deflection angle of the illumination light at each position on the deflecting surface and deflects the illumination light simultaneously at the first deflection angle and at the second deflection angle. A first portion deflected at the first deflection angle and a second portion deflected at the second deflection angle are both incident on the light-incident end.

A reflective beam conditioner includes a monolithic body having two or more minors and at least one alignment feature. The at least one alignment feature has a predetermined orientation or position with respect to at least one of the two or more mirrors. The two or more minors are configured such that, in use, a beam reflects once sequentially off of each of the mirrors. A method of manufacturing such a reflective beam conditioner includes providing a monolithic body. The method further includes restraining the monolithic body to a machining fixture. The method further includes forming a first minor, a second minor, and an alignment feature in the monolithic body with the monolithic body restrained in the machining fixture.

The light source device of the projection display apparatus according to the present disclosure includes: solid-state light sources that individually emit blue light, green light, and red light; a plurality of dichroic mirrors that combine the blue light, the green light, and the red light having exited from the solid-state light sources; a first diffusion plate on which the combined light having been combined by the plurality of dichroic mirrors is incident; a dynamic diffusion plate that is disposed at a position at which the combined light having exited from the first diffusion plate converges and starts to diverge.

A light deflector includes a fixed part, a movable part provided with a reflection plane, a pair of elastic supporting units configured to support the movable part, a pair of connecting parts configured to connect between the pair of elastic supporting units and the fixed part, and a driving unit configured to deform the pair of connecting parts to make the movable part oscillate. The pair of connecting parts are supported by the fixed part in a cantilevered state, and each one of the pair of connecting parts having a folded structure. An optical scanning system includes the light deflector. An image projection device includes the light deflector.