The present application discloses a method of using a LED-based solar simulator light source having at least one LED array formed by multiple LED groups of LED assemblies, at least one field flattening device, at least one diffractive element, and at least one optical element configured to condition the broad spectrum light source output signal and direct the light source output signal to a work surface.

An EUV collector serves for use in an EUV projection exposure apparatus. The collector guides EUV used light emitted by a plasma source region. An overall impingement surface of the collector is impinged upon by radiation emitted by the plasma source region. A used light portion of the overall impingement surface guides the EUV used light. An extraneous light portion of the overall impingement surface is impinged upon by extraneous light radiation, the wavelength of which differs from that of the used light. The used light portion and the extraneous light portion are not congruent. This EUV collector has increased efficiency can involve reduced production costs.

A lighting apparatus for vehicles with a number of semiconductor-based light sources and a projection device for generating the specified light distribution with a cut-off line. The projection device features a correction device with at least two lenses. The surface of at least one of the lenses is designed as a diffractive lens surface for achromatization in a visible wavelength range. The two lenses are made from different lens materials. The surfaces of at least two lenses are designed as refractive lens surfaces that have their optical power calculated based on a temperature range and/or expansion coefficient of the lens material of at least two lenses such that adding the optical power of the lenses yields a predefined total optical power of the correction device.

Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. The drop-in mirror is configured to reflect illumination light incident on the reflective surface and illuminate the mask. An area of the reflective surface is configured to be greater than an area of an illuminated spot irradiated with the illumination light on the reflective surface. The drop-in mirror is configured to be movable. A position of the illuminated spot on the reflective surface is configured to be moved when the drop-in mirror is moved.

Provided are a hyperspectral sensor and a hyperspectral camera in which influence of external information such as a reflecting material is reduced such that the spectral data accuracy of a subject to be acquired can be improved. In the hyperspectral sensor in which light from a subject is split into light components in a plurality of wavelength ranges by a spectral optical element and each of the light components in the wavelength ranges is received by a sensor array consisting of a plurality of photodetection elements to acquire spectral data in which spectral information of the subject is associated with each of the photodetection elements, a polarization diffraction element that emits polarized light is used as the spectral optical element.

An apparatus comprising at least: a first waveguide; a second waveguide; and a diffractive element. The first waveguide guides a first band of onto the diffractive element such that the first band is diffracted at an m.sup.th non-zero order over a first range of angles. The second waveguide guides a second band onto the diffractive element such that the second band is diffracted at the m.sup.th non-zero over the first range of angles. The second waveguide guides a third band onto the diffractive element such that the third band is diffracted at the n.sup.th non-zero order over the first range of angles. Wavelengths of the first band, the second band, and the third band do not overlap with each other. The m.sup.th order and the n.sup.th order are different from each other.

A quantum dot light emitting device includes a grating device which includes a grating region that has a particular grating interval, and a quantum dot layer located above the grating region. The device provides high-purity color light based on a selection of a wavelength band by the grating region in correspondence with a wavelength band of light emitted from the quantum dot layer.

A multi-spectral imaging (MSI) device can include an imaging plane and a diffractive optic. The imaging plane can include at least two groups of pixels an array of pixels for sensing at least two spectral bands. The at least two spectral bands can include a first spectral band and a second spectral band. The diffractive optic can be configured for diffracting an electromagnetic wave into the at least two spectral bands and focusing each spectral band component of the electromagnetic wave onto the group of pixels for the spectral band to generate an image.

Multibeam diffraction grating-based color backlighting includes a plate light guide, a multibeam diffraction grating at a surface of the plate light guide, and light sources laterally displaced from one another in a direction corresponding to a propagation axis of the plate light guide. The light sources produce light of different colors. The plate light guide is to guide light from the light sources. The multibeam diffraction grating is to couple out a portion of the guided light using diffractive coupling as a plurality of light beams of different colors in a plurality of different principal angular directions.

A multi-color spaceplate includes a first component spaceplate and a second component spaceplate cascaded with the first component spaceplate. The first component spaceplate has an on-resonance compression ratio C.sub.11 at a first resonance wavelength and, at a second resonance wavelength, an off-resonance compression ratio C.sub.21, less than on-resonance compression ratio C.sub.11. The second component spaceplate has an on-resonance compression ratio C.sub.22 at the second resonance wavelength and, at the first resonance wavelength, an off-resonance compression ratio C.sub.12 less than on-resonance compression ratio C.sub.22. The multi-color spaceplate may include a third component spaceplate, cascaded with the first and second component spaceplates, and having: (i) an on-resonance compression ratio C.sub.33 at a third resonance wavelength, (ii) at the first resonance wavelength, an off-resonance compression ratio C.sub.13 that is less than on-resonance compression ratio C.sub.33, and (iii) at the second resonance wavelength, an off-resonance compression ratio C.sub.23 less than on-resonance compression ratio C.sub.33.