A method for fabricating a tunable optical phased array, and a tunable optical phased array are disclosed by the present application. The tunable optical phased array includes: a substrate layer (10), a distributed Bragg reflector (20), a support layer (30), a piezoelectric layer (40), an antenna array (60), and a transducer module (50) configured to make interconversion between a phase control signal and a surface wave; the antenna array (60) and the distributed Bragg reflector (20) are used to form a Fabry Perot resonant cavity, and the phase control signal output by a signal source is concerted into the surface wave by the transducer module (50), and the surface wave is conducted to the antenna array (60) through the piezoelectric layer (40).

A method for fabricating a tunable optical phased array, and a tunable optical phased array are disclosed by the present application. The tunable optical phased array includes: a substrate layer (10), a distributed Bragg reflector (20), a support layer (30), a piezoelectric layer (40), an antenna array (60), and a transducer module (50) configured to make interconversion between a phase control signal and a surface wave; the antenna array (60) and the distributed Bragg reflector (20) are used to form a Fabry Perot resonant cavity, and the phase control signal output by a signal source is concerted into the surface wave by the transducer module (50), and the surface wave is conducted to the antenna array (60) through the piezoelectric layer (40).

A system for nonlinear frequency conversion includes an acousto-optic modulator for diffracting a portion of an input laser beam as a first-order beam and transmitting a non-diffracted portion of the input laser beam as a zeroth-order beam. The system also includes a nonlinear crystal arranged to receive and frequency convert each of the zeroth-order and first-order beams to generate two respective frequency-converted laser beams, whereby, when the acousto-optic modulator changes the average-power ratio between the zeroth-order and first-order beams, variations of the heat load in the nonlinear crystal are minimized. Either one of the two frequency-converted laser beams may be used as an output laser beam of the system, while the other one of the two frequency-converted laser beams serves to stabilize the heat load in the nonlinear crystal when the acousto-optic modulator is operated to change the average power in the output laser beam.

A system for nonlinear frequency conversion includes an acousto-optic modulator for diffracting a portion of an input laser beam as a first-order beam and transmitting a non-diffracted portion of the input laser beam as a zeroth-order beam. The system also includes a nonlinear crystal arranged to receive and frequency convert each of the zeroth-order and first-order beams to generate two respective frequency-converted laser beams, whereby, when the acousto-optic modulator changes the average-power ratio between the zeroth-order and first-order beams, variations of the heat load in the nonlinear crystal are minimized. Either one of the two frequency-converted laser beams may be used as an output laser beam of the system, while the other one of the two frequency-converted laser beams serves to stabilize the heat load in the nonlinear crystal when the acousto-optic modulator is operated to change the average power in the output laser beam.

A beam positioner includes a first acousto-optic (AO) deflector (AOD) comprising an AO cell and a transducer attached to the AO cell, and a wave plate optically contacted to the first AOD.

A beam positioner includes a first acousto-optic (AO) deflector (AOD) comprising an AO cell and a transducer attached to the AO cell, and a wave plate optically contacted to the first AOD.

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and a signal generator that outputs the reference signal input to the demodulation circuit and outputs a drive signal input to the optical modulator, in which Vd/Vr<10, where Vr is a voltage of the reference signal and Vd is a voltage of the drive signal.

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and a signal generator that outputs the reference signal input to the demodulation circuit and outputs a drive signal input to the optical modulator, in which Vd/Vr<10, where Vr is a voltage of the reference signal and Vd is a voltage of the drive signal.

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, and the demodulation circuit intermittently performs the demodulation process.

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and a demodulation circuit that performs a demodulation process for demodulating the sample signal from the light reception signal, and the demodulation circuit intermittently performs the demodulation process.