A method and a system for controlling an output of an optical system, the method comprising generating a plurality of optical signal components having different optical properties and passing the generated optical signal components as input to an optical system comprising an optical device and/or an optical medium; an output of the optical system being based on interactions of the signal components within the optical device and/or the optical medium; and relative proportions of the optical signal components that are generated and individual optical properties thereof being selected to control the output of the optical system.

Aspects of the present disclosure describe improved supercontinuum generation based upon alternating optical dispersion along a waveguide length that advantageously generates much more spectral bandwidth than possible with conventional, prior art techniques without losing coherence as well as supporting a larger range of pulse energies (i.e., for lower than conventionally allowed pulse energies or high pulse energies).

Utilities (e.g., systems, methods, etc.) that make use of a secure input/output (I/O) channel between system firmware (e.g., BIOS) and the SP to allow the BIOS to securely send data (e.g., error data) for secure consumption by the SP while preventing or limiting other sources from sending falsified data or the like the SP. The secure I/O channel includes interface hardware (e.g., Field-programmable gate array (FPGA)) that is configured to be unlocked by the BIOS using a security key received from a key generator over a separate security channel. After such data is securely sent to the interface hardware, the BIOS may then pass error interrupt(s) to the OS for performing of any necessary recovery actions. At any appropriate time, the SP may read or consume error data from the memory register of the interface hardware and perform any appropriate diagnoses and/or handling of the error data.

An all-fiber configuration system and method for generating temporally coherent supercontinuum pulsed emission are provided. The system includes a sequential structure of all-fiber sections including: a fiber laser seed source to produce a seed pulse with given optical properties; a stretching section including an optical fiber to temporally stretch the seed pulse; an amplification section including an active optical fiber, doped with a rare earth element, to amplify the stretched pulse by progressively stimulating radiation of active ions of the doped active optical fiber; a compressing section to temporally compress the amplified pulse; and a spectrum broadening section including an ANDi microstructured fiber that spectrally broadens the compressed pulse by a nonlinear effect of Self Phase Modulation (SPM) while maintaining the temporal coherence of the pulse.

A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.

The invention relates to a supercontinuum light source comprising a microstructured optical fiber and a pump light source. The microstructured optical fiber comprises a core and a cladding region surrounding the core, as well as a first fiber length section, a second fiber length section and an intermediate fiber length section between said first and second fiber length sections. The first fiber length section comprises a core with a first characteristic core diameter. The second fiber length section comprises a core with a second characteristic core diameter, smaller than said first characteristic core diameter, where said second characteristic core diameter is substantially constant along said second fiber length section. The intermediate length section of the optical fiber comprises a core which is tapered from said first characteristic core diameter to said second characteristic core diameter over a tapered length.

A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

A Photonic Crystal Fiber (PCF) a method of its production and a supercontinuum light source comprising such PCF. The PCF has a longitudinal axis and includes a core extending along the length of said longitudinal axis and a cladding region surrounding the core. At least the cladding region includes a plurality of microstructures in the form of inclusions extending along the longitudinal axis of the PCF in at least a microstructured length section. In at least a degradation resistant length section of the microstructured length section the PCF includes hydrogen and/or deuterium. In at least the degradation resistant length section the PCF further includes a main coating surrounding the cladding region, which main coating is hermetic for the hydrogen and/or deuterium at a temperature below T.sub.h, wherein T.sub.h is at least about 50 C., preferably 50 C.<T.sub.h<250 C.

An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.

An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.