Patent classifications
G02F1/353
LIGHT SOURCE WITH OPTICAL FREQUENCY MIXING
A light source based on an optical frequency mixer is disclosed. The light source has a first laser for emitting light at a first optical frequency, and a plurality of second lasers for emitting light at different second optical frequencies. The optical frequency mixer provides output light beams at mixed optical frequencies of the first and second lasers. Wavelength of output light beams may be tuned by tuning wavelength of any of the first or second lasers. In this manner, RGB wavelength-tunable light sources may be constructed based on red or near-infrared lasers. The wavelength tunability of the output light beams may be used to angularly scan or refocus the light beams.
Strontium tetraborate as optical coating material
Strontium tetraborate is used as an optical coating material for optical components utilized in semiconductor inspection and metrology systems to take advantage of its high refractive indices, high optical damage threshold and high microhardness in comparison to conventional optical materials. At least one layer of strontium tetraborate is formed on the light receiving surface of an optical component's substrate such that its thickness serves to increase or decrease the reflectance of the optical component. One or multiple additional coating layers may be placed on top of or below the strontium tetraborate layer, with the additional coating layers consisting of conventional optical materials. The thicknesses of the additional layers may be selected to achieve a desired reflectance of the optical component at specific wavelengths. The coated optical component is used in an illumination source or optical system utilized in a semiconductor inspection system, a metrology system or a lithography system.
DEVICES FOR GENERATION OF ELECTROMAGNETIC RADIATION OF PREDETERMINED PROFILE
A device for producing an electromagnetic radiation of predetermined properties is configured as a layered structure and includes a light interacting layer, in communication with at least one light emitting source, and having one or more light interacting regions, each configured to define a closed-loop light mixing path for optically coupling a pair of input coherent light components of predetermined first and second frequencies to create an output radiation component of a third beating frequency of a predetermined high-frequency profile. The device further includes a control layer interfacing with said light interacting layer and configured for controllable switching between inoperative opaque and operative transparent states with respect to the at least one third beating frequency, to selectively prevent and allow transmission of the at least one output radiation component of the third frequency towards a medium in the vicinity of the layered structure.
Microjoule amplifier system for three photon microscopy utilizing existing femtosecond lasers used for two photon microscopy as a seed source
Disclosed are ideas to produce an add-on device which turns widely used high repetition rate lasers used for 2-photon microscopy into a light source which can be used for 3-photon microscopy. The add-on encompasses a device to reduce the pulse repetition rate of the high repetition rate (>50 MHz) laser source (laser or OPO) to less than 10 MHz which allows for higher pulse energies while maintaining reasonable average powers. If the high repetition sources operate below 1250 nm the add-on shifts or broadens the seed light to cover 1.3 μm to 1.8 μm before amplification. If the high repetition rate source operates at or around 1.3 μm the add-on only needs to amplify the pulse after downshifting the repetition rate. In another implementation the add-on shifts or broadens the 1.3 μm light to cover the spectral range out to 1.8 μm before amplification.
Nonlinear crystal
A nonlinear crystal comprising a first end face and an opposing second end face is described. The first and second end faces are separated along an optical axis of the nonlinear crystal by a length in the range of 0.25 mm and 2 mm. Although the length of the nonlinear crystal results in a reduction in the nonlinear effects induced on an optical field propagating through the crystal it also provides for reduced deviation experienced by the generated optical field when the nonlinear crystal is rotated. Therefore, when the nonlinear crystals are incorporated within an enhancement cavity their reduced length allows for the deviation of the output field to be minimised by servo control electronics arranged to adjust a single cavity mirror. This significantly reduces the complexity, and thus expensive of the servo control electronics when compared to those employed with the prior art enhancement cavities.
Illumination source for an inspection apparatus, inspection apparatus and inspection method
An illumination source apparatus (500), suitable for use in a metrology apparatus for the characterization of a structure on a substrate, the illumination source apparatus comprising: a high harmonic generation, HHG, medium (502); a pump radiation source (506) operable to emit a beam of pump radiation (508); and adjustable transformation optics (510) configured to adjustably transform the transverse spatial profile of the beam of pump radiation to produce a transformed beam (518) such that relative to the centre axis of the transformed beam, a central region of the transformed beam has substantially zero intensity and an outer region which is radially outwards from the centre axis of the transformed beam has a non-zero intensity, wherein the transformed beam is arranged to excite the HHG medium so as to generate high harmonic radiation (540), wherein the location of said outer region is dependent on an adjustment setting of the adjustable transformation optics.
BROADBAND LIGHT SOURCE DEVICE AND METHOD OF CREATING BROADBAND LIGHT PULSES
A broadband light source device for creating broadband light pulses includes a hollow-core fiber and a pump laser source device. The hollow-core fiber is configured to create the broadband light pulses by an optical non-linear broadening of pump laser pulses. The hollow-core fiber includes a filling gas, an axial hollow light guiding fiber core configured to support core modes of a guided light field, and an inner fiber structure surrounding the fiber core and configured to support transverse wall modes of the guided light field. The pump laser source device is configured to create and provide the pump laser pulses at an input side of the hollow-core fiber. The transverse wall modes include a fundamental transverse wall mode and second and higher order transverse wall modes.
Brillouin dynamic grating generation using dual-Brillouin-peak optical fiber
Disclosed herein is a method comprising injecting light of a first wavelength λ.sub.1 into a wavelength division multiplexer; injecting light of a second wavelength λ.sub.2 into the wavelength division multiplexer; combining the light of the first wavelength λ.sub.1 and the light of the second wavelength λ.sub.2 in the wavelength division multiplexer to produce light of a third wavelength λ.sub.3; and reflecting the light of the third wavelength λ.sub.3 in a dual-Brillouin peak optical fiber that is in communication with the wavelength divisional multiplexer; wherein the dual-Brillouin peak optical fiber has at least two Brillouin peaks, such that an amplitude A.sub.1 of at least one of said Brillouin peaks is within 50% to 150% of an amplitude A.sub.2 of another Brillouin peak 0.5A2≤A.sub.1≤1.5A.sub.2; wherein the dual-Brillouin peak optical fiber generates a Brillouin dynamic grating that reflects an improved back-reflected Brillouin signal of the combined light.
Display device comprising a reflective sheet having a plurality of light conversion dots disposed around a plurality of first holes
A display apparatus includes a liquid crystal panel; a plurality of light sources configured to emit blue light; a reflective sheet including four edge portions, wherein a plurality of holes are disposed on the reflective sheet, the plurality of holes includes a first hole disposed on each of the four edge portions of the reflective sheet, each of the four edge portions includes an edge of the reflective sheet, the first hole is disposed at a first distance from the edge of the reflective sheet; and a plurality of light conversion dots including eight first light conversion dots disposed around the first hole of the reflective sheet, and wherein a diameter of each of the eight first light conversion dots is equal to or greater than 1.04 mm, and is equal to or less than 1.56 mm, and wherein the plurality of light conversion dots includes at least one of a fluorescent material, a dye, or a pigment.
ACTIVE ELECTRO-OPTIC QUANTUM TRANSDUCERS COMPRISING RESONATORS WITH SWITCHABLE NONLINEARITIES
A quantum transducer device that comprises a microwave resonator component and optical resonator component that receives and transduce a set of optical photons and at least one of: a voltage pulse or modulated laser pulse, and generate a single microwave photon output.