An apparatus includes a first brightness value acquisition unit configured to obtain a first absolute brightness value by converting a representative brightness value of an image obtained using an image pickup unit, into absolute brightness, a first determination unit configured to determine an output value based on an input-output characteristic of an output device, the output value corresponding to the first absolute brightness value obtained by the first brightness value acquisition unit, and a second determination unit configured to determine information about exposure corresponding to the output value.

An apparatus includes a first brightness value acquisition unit configured to obtain a first absolute brightness value by converting a representative brightness value of an image obtained using an image pickup unit, into absolute brightness, a first determination unit configured to determine an output value based on an input-output characteristic of an output device, the output value corresponding to the first absolute brightness value obtained by the first brightness value acquisition unit, and a second determination unit configured to determine information about exposure corresponding to the output value.

A first reflection light guide includes an axial part as an end part, and a main body part, has a linear rod-like shape including the end part and the main body part, and allows light from a first reflection light source to enter the end part and to be emitted from the main body part. The end part of the first reflection light guide is narrower than the main body part, and includes a contact surface in contact with a cap. The cap includes a light source side opening. A first reflection light source is arranged at the light source side opening. The first reflection light source faces the end part.

A first reflection light guide includes an axial part as an end part, and a main body part, has a linear rod-like shape including the end part and the main body part, and allows light from a first reflection light source to enter the end part and to be emitted from the main body part. The end part of the first reflection light guide is narrower than the main body part, and includes a contact surface in contact with a cap. The cap includes a light source side opening. A first reflection light source is arranged at the light source side opening. The first reflection light source faces the end part.

An apparatus includes a first brightness value acquisition unit configured to obtain a first absolute brightness value by converting a representative brightness value of an image obtained using an image pickup unit, into absolute brightness, a first determination unit configured to determine an output value based on an input-output characteristic of an output device, the output value corresponding to the first absolute brightness value obtained by the first brightness value acquisition unit, and a second determination unit configured to determine information about exposure corresponding to the output value.

An apparatus includes a first brightness value acquisition unit configured to obtain a first absolute brightness value by converting a representative brightness value of an image obtained using an image pickup unit, into absolute brightness, a first determination unit configured to determine an output value based on an input-output characteristic of an output device, the output value corresponding to the first absolute brightness value obtained by the first brightness value acquisition unit, and a second determination unit configured to determine information about exposure corresponding to the output value.

The invention relates to a method for regulating a light source of a photolithography exposure system which comprises a plurality of LEDs, by means of the following steps: the light output of the individual LEDs in specific wavelength ranges is detected, and the detected light output is compared with a desired light output distribution over the entire spectrum. The LEDs are operated such that the desired spectral light output distribution is achieved in the most precise manner possible. The invention also relates to an exposure assembly for a photolithography device, having a light source which comprises a plurality of LEDs, a control means which controls the electrical power supplied to the individual LEDs, and a sensor which can detect the light output of the LEDs in the respective ranges of the wavelengths.