The invention relates to a free-beam interferometric method for illuminating a sequence of sectional areas in the interior of the light-scattering object. The method makes it possible for the user to select a larger image field and/or a higher image resolution than previously possible with the occurrence of self-interference of the specimen light from a scattering specimen.

A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).

A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).

An advance in high-resolution optical metrology has been achieved by the introduction of incoherent holographic imaging. FINCH, an example of incoherent holography, is shown to simplify the process, eliminating many steps in metrology and at the same time increasing throughput, resolution and accuracy of the method. A proposed technique requires only a single image capture with a non-moving camera rather than the capture of multiple stacks of images requiring many camera exposures and movement of the camera or sample in the conventional techniques.

An apparatus and method to produce a hologram of an object includes an electromagnetic radiation assembly configured to receive a received electromagnetic radiation, such as light, from the object. The electromagnetic radiation assembly is further configured to diffract the received electromagnetic radiation and transmit a diffracted electromagnetic radiation. An image capture assembly is configured to capture an image of the diffracted electromagnetic radiation and produce the hologram of the object from the captured image.

An apparatus and method to produce a hologram of an object includes an electromagnetic radiation assembly configured to receive a received electromagnetic radiation, such as light, from the object. The electromagnetic radiation assembly is further configured to diffract the received electromagnetic radiation and transmit a diffracted electromagnetic radiation. An image capture assembly is configured to capture an image of the diffracted electromagnetic radiation and produce the hologram of the object from the captured image.

A structured illumination microscope includes a holographic image generator that generates a holographic image at a position overlapping an observation object. The structured illumination microscope further includes an image sensor that senses an interference image generated by overlapping the observation object with the holographic image. The structured illumination microscope additionally includes an image recovery processor that recovers an image of the observation object by comparing received data of the holographic image to received data of the interference image.

The layered generation of at least one volume grating in a recording medium by way of exposure, the recording medium having at least one photosensitive layer which is sensitized for a presettable wavelength of the exposure light. Each volume grating is generated in the recording medium by at least two wave fronts of coherent light capable of generating interference, the wave fronts being superposed in the recording medium at a presettable depth, at a presettable angle and with a presettable interference contrast. The depth and the thickness of the refractive index modulation and/or transparency modulation of a volume grating in the recording medium is controlled by depth-specific control of the spatial and/or temporal degree of coherence of the interfering wave fronts in the direction of light propagation.

Techniques to improve image quality in holography utilizing lenses made from materials with non-quantized anisotropic electromagnetic properties, such as birefringent materials, to advantageously split an incoming beam of light into two coincident beams with different focal lengths that interfere with one another and thus create holograms free of electro-optical or pixelated devices are disclosed for microscopy and other applications. The use of thin birefringent lenses and single crystal alpha-BBO lenses are introduced. Corresponding systems, methods and apparatuses are described.

Techniques to improve image quality in holography utilizing lenses made from materials with non-quantized anisotropic electromagnetic properties, such as birefringent materials, to advantageously split an incoming beam of light into two coincident beams with different focal lengths that interfere with one another and thus create holograms free of electro-optical or pixelated devices are disclosed for microscopy and other applications. The use of thin birefringent lenses and single crystal alpha-BBO lenses are introduced. Corresponding systems, methods and apparatuses are described.