Provided is a PCV valve assembly that includes a fluidic geometry that allows for the flow of combustion fluid/gas to flow between an inlet and an outlet and switch between two modes of operation, (i) a radial or high flow mode, and (ii) a tangential or low flow mode, as dictated during the operation of the engine. At low vacuums, the fluidic equipped PCV valve assembly has been tuned to operate in the radial mode producing high flow rates due to low flow resistance. As vacuum increases, the PCV valve assembly is tuned to automatically switch modes. This may be enabled due to the shape of the fluidic geometry and the bypass channel which is adapted to vary the amount of flow between a first and a second control ports. The bypass channel allows the geometric fluidic pattern to switch between the high flow mode and the low flow mode.

Provided is a bi-directional PCV valve assembly, system and method. The bi-directional PCV valve may include a fluidic geometry that allows for a flow of fluid a high flow rate in one direction, forward flow, and a low flow rate in the opposite direction, reverse flow. The reverse flow includes a swirling flow that increases the pressure drop and reduces the flow rate to a third of the flow rate of the forward flow. The disclosed assembly produces a strong swirling flow (vortex) in the reverse direction and an efficient (low pressure drop) flow in the forward direction.

A fluid sterilization device includes: a flow passage tube having a first end and a second end opposite to the first end and defining a processing passage extending in an axial direction; a light source provided in a vicinity of the first end and radiating ultraviolet light from the first end toward the processing passage in the axial direction; and a housing that defines a straightening chamber encircling the first end from outside in a radial direction. The straightening chamber includes a communication port that serves as an inlet or an outlet for a fluid flowing in the processing passage, and communicates with the processing passage via a gap between the first end and an opposing member opposing the first end in the axial direction.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. Specifically, the apparatus may be calibrated on installation using a two-step process of measuring the volume of gas box downstream from the apparatus by flowing nitrogen gas into the gas box and measuring the resulting temperature and rate of pressure rise. Using the computed volume of the gas box, a sweep of several mass flow rates may be performed using the process gas and the gas map for the process gas. The apparatus is calibrated based on the measured temperature and pressure values, which allow calculation of the actual mass flow rate for the process gas as compared with the commanded mass flow rates.

An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.

A flow control device that includes an orifice placed in an opening of a duct. A flexible sheet of material is wrapped around a first duct section to include an extended section which is crimped inwardly around the face of the orifice. A sleeve with tightening straps can be wrapped around the aligned first and second duct sections, with the sections having the orifice positioned between. A bead on the duct sections can assist in orifice positioning, attachment, and sealing. The orifice can also be attached to the duct section using tabs and a retention ring. A duct sleeve is also provided for placement in the opening of a duct. The duct sleeve includes a reception slot that receives an orifice plate that is attached in a secure and sealable manner.

An equipment front end module. An equipment front end module (EFEM) includes a flow modification feature projecting away from an interior wall of the equipment front end module and extending into an interior of the equipment front end module (EFEM) at an angle. The flow modification feature modifies the flow of gas flowing from a top to a bottom of the EFEM by deflecting gas flow away and/or laminarizing gas flow across an opening of the EFEM, which may improve the purge performance of a wafer carrier docked at the EFEM.

An oil return mechanism includes a base, a control switch, a first blocking ball mounted in the base, an elastic member mounted between the first blocking ball and the base. The base has a liquid storing cavity, a liquid returning cavity, a communicating cavity, a first communicating opening communicating between the liquid returning cavity and the communicating cavity, and a second communicating opening communicating between the communicating cavity and the liquid storing cavity. The present invention can regulate a speed of a fluid flowing from the liquid returning cavity to the communicating cavity, and has the advantages of simple structure and great reduction of cost.

This disclosure includes apparatuses and methods for directing fluid. Some apparatuses include a frame configured to be coupled to a surface of a structure and a plurality of fins configured to be coupled to the frame, each having a width, a length greater than the width, and a bottom surface, wherein, when the frame is coupled to the surface of the structure and the fins are coupled to the frame, the bottom surface of at least one of the fins is angularly disposed at a non-perpendicular angle relative to the surface of the structure such that the fin redirects fluid that contacts the bottom surface of the fin away from the surface of the structure. In some apparatuses, the frame includes a first end and a second end, wherein the first end is configured to be coupled to the surface of the structure such that the second end is free.

A flow control device that includes an orifice placed in an opening of a duct. A flexible sheet of material is wrapped around a first duct section to include an extended section which is crimped inwardly around the face of the orifice. A sleeve with tightening straps can be wrapped around the aligned first and second duct sections, with the sections having the orifice positioned between. A bead on the duct sections can assist in orifice positioning, attachment, and sealing. The orifice can also be attached to the duct section using tabs and a retention ring. A duct sleeve is also provided for placement in the opening of a duct. The duct sleeve includes a reception slot that receives an orifice plate that is attached in a secure and sealable manner.