An Sb—Te-based alloy sintered compact sputtering target having Sb and Te as main components and which contains 0.1 to 30 at % of carbon or boron and comprises a uniform mixed structure of Sb—Te-based alloy particles and fine carbon (C) or boron (B) particles is provided. An average grain size of the Sb—Te-based alloy particles is 3 μm or less and a standard deviation thereof is less than 1.00. An average grain size of the C or B particles is 0.5 μm or less and a standard deviation thereof is less than 0.20. When the average grain size of the Sb—Te-based alloy particles is X and the average grain size of the carbon or boron particles is Y, Y/X is within a range of 0.1 to 0.5. This provides an improved Sb—Te-based alloy sputtering target that inhibits generation of cracks in the sintered target and prevents generation of arcing during sputtering.

A dielectric layer is formed from an oxide containing Sn and at least one of Zn, Zr, Si and Ga. The molar percentages of Sn, Zn, Zr, Si, and Ga, relative to the total elements in the oxide, represented by a, b, c, d, and e, respectively, satisfy the conditions (1)-(7): (1) 0≤b/(a+b)≤0.6, (2) 0≤(c+d)/(a+b+c+d+e)≤0.5, (3) 0≤b≤50, (4) 0≤c≤40, (5) 0≤d≤45, (6) 0≤e≤40, and (7) 20≤b+c+d+e≤80. The dielectric layer enables favorable information recording in an oxide-based recording layer on which the dielectric layer is directly overlaid, does not require preventive measures for health hazard, and is superior in durability.

A substrate processing method includes a first discharge step of discharging, from the first discharge port which faces a predetermined first region including the rotating center of the upper surface, a low surface tension liquid containing gas containing steam of a low surface tension liquid having a larger specific gravity than air and lower surface tension than the processing liquid and not discharging the low surface tension liquid containing gas from the second discharge port which faces a predetermined second region surrounding the outside of the first region on the upper surface of the substrate, and a second discharge step of discharging the low surface tension liquid containing gas from the second discharge port after the first discharge step and not discharging the low surface tension liquid containing gas from the first discharge port.

A substrate processing method includes a first discharge step of discharging, from the first discharge port which faces a predetermined first region including the rotating center of the upper surface, a low surface tension liquid containing gas containing steam of a low surface tension liquid having a larger specific gravity than air and lower surface tension than the processing liquid and not discharging the low surface tension liquid containing gas from the second discharge port which faces a predetermined second region surrounding the outside of the first region on the upper surface of the substrate, and a second discharge step of discharging the low surface tension liquid containing gas from the second discharge port after the first discharge step and not discharging the low surface tension liquid containing gas from the first discharge port.

A recording layer for an optical data recording medium is described. Recording is performed by irradiating the recording layer with a laser beam. The recording layer contains a W oxide, an Fe oxide, and at least one of a Ta oxide and a Nb oxide. The recording layer contains 10-60 atomic % of Fe and a total of 3-50 atomic % of Ta and Nb relative to the total metal atoms therein.

The present invention relates to a method for nanomodulating metal films by means of high-vacuum cathode sputtering of metals, and to stencils of anodized Al. As an example of the use of these nanomodulated metal films, the synthesis or production of a magnetically weak film by means of cathode sputtering, which film can he used as a magnetic field sensor, and a metal nanomodulated stencil are analyzed.

The same digital data is recorded with highly integrated manner on a plurality of media able to durably hold information over long-term. A minute graphic pattern indicating data bit information is drawn on a resist layer formed on a quartz glass substrate by exposing a beam and developed so as to prepare a master medium (M1), which comprises the quartz glass substrate having a minute recess and protrusion structure formed by etching where the remaining resist are used as a mask (FIG. (a)). The recess and protrusion structure recorded on the master medium (M1) is shaped and transferred onto a flexible recording medium (G2) on which a UV curable resin layer (61) is formed, whereby an intermediate medium (M2) is prepared (FIGS. (b)-(d)). The inverted recess and protrusion structure transferred to the intermediate medium (M2) is shaped and transferred onto a recording medium (G3) comprising a quartz glass substrate (70) on which a UV curable resin layer (80) is formed, whereby a reproduction medium (M3) having the same recess and protrusion structure as that of the master medium (M1) is prepared (FIGS. (e)-(h)). In shaping and transferring process, the media are separated using the flexibility of the intermediate medium (M2).

The same digital data is recorded with highly integrated manner on a plurality of media able to durably hold information over long-term. A minute graphic pattern indicating data bit information is drawn on a resist layer formed on a quartz glass substrate by exposing a beam and developed so as to prepare a master medium (M1), which comprises the quartz glass substrate having a minute recess and protrusion structure formed by etching where the remaining resist are used as a mask (FIG. (a)). The recess and protrusion structure recorded on the master medium (M1) is shaped and transferred onto a flexible recording medium (G2) on which a UV curable resin layer (61) is formed, whereby an intermediate medium (M2) is prepared (FIGS. (b)-(d)). The inverted recess and protrusion structure transferred to the intermediate medium (M2) is shaped and transferred onto a recording medium (G3) comprising a quartz glass substrate (70) on which a UV curable resin layer (80) is formed, whereby a reproduction medium (M3) having the same recess and protrusion structure as that of the master medium (M1) is prepared (FIGS. (e)-(h)). In shaping and transferring process, the media are separated using the flexibility of the intermediate medium (M2).

Conventionally, in making a double-sided optical disc by attaching recording substrates to each other via an ultraviolet curable adhesive layer, there was a problem that the ultraviolet curable adhesive layer was slow to cure. It is thought that this is because the out gases leached from the recording substrate disturbed the cure reaction of the adhesive layer. In contrast, in the optical disc of the present disclosure, it is possible to cure the adhesive layer in a short time in attaching the recording substrates to each other via the ultraviolet curable adhesive layer, by providing a gas barrier layer at an attachment surface of a substrate to inhibit out gases from leaching from the substrate to the ultraviolet curable adhesive layer.

Conventionally, in making a double-sided optical disc by attaching recording substrates to each other via an ultraviolet curable adhesive layer, there was a problem that the ultraviolet curable adhesive layer was slow to cure. It is thought that this is because the out gases leached from the recording substrate disturbed the cure reaction of the adhesive layer. In contrast, in the optical disc of the present disclosure, it is possible to cure the adhesive layer in a short time in attaching the recording substrates to each other via the ultraviolet curable adhesive layer, by providing a gas barrier layer at an attachment surface of a substrate to inhibit out gases from leaching from the substrate to the ultraviolet curable adhesive layer.