G11C2213/14

Tunable Forming Voltage for RRAM Device
20210234094 · 2021-07-29 ·

The present invention provides RRAM devices with tunable forming voltage. In one aspect, a method of forming an RRAM device includes: depositing a first dielectric layer on a substrate; forming metal pads in the first dielectric layer; depositing a capping layer onto the first dielectric layer; forming heating elements in the capping layer in contact with the metal pads; forming an RRAM stack on the capping layer; patterning the RRAM stack into an RRAM cell(s) including a bottom electrode, a high-κ switching layer disposed on the bottom electrode, and a top electrode disposed on the high-κ switching layer; depositing a second dielectric layer over the RRAM cell(s); and forming a contact to the top electrode in the second dielectric layer. An RRAM device and a method of operating an RRAM device are also provided.

Tunable forming voltage for RRAM device

RRAM devices with tunable forming voltage are provided herein. A method of forming an RRAM device includes: depositing a first dielectric layer on a substrate; forming metal pads in the first dielectric layer; depositing a capping layer onto the first dielectric layer; forming heating elements in the capping layer in contact with the metal pads; forming an RRAM stack on the capping layer; patterning the RRAM stack into an RRAM cell(s) including a bottom electrode, a high-κ switching layer disposed on the bottom electrode, and a top electrode disposed on the high-κ switching layer; depositing a second dielectric layer over the RRAM cell(s); and forming a contact to the top electrode in the second dielectric layer. An RRAM device and a method of operating an RRAM device are also provided.

METHOD FOR MATERIAL PACKAGING AND DEVELOPING ROTATIONALLY ANISOTROPIC MATERIALS

A support structure for a reconfigurable molecule includes a first support portion having a first mounting region; a second support portion having a second mounting region; and a rotatable molecule anchored between the first support portion and the second support portion on the first mounting region and the second mounting region, the rotatable molecule having an internal rotational axis extending from the first mounting region to the second mounting region; wherein the first support portion and the second support portion are mirror images of one another.