To provide enhanced data storage devices and systems, various systems, architectures, apparatuses, and methods, are provided herein. In a first example, a resistive random access memory (ReRAM) array is provided. The ReRAM array includes a plurality of memory cells each comprising resistive memory material formed into a layer of a substrate, with resistance properties of the resistive memory material corresponding to data bits stored by the memory cells. The ReRAM array also includes a plurality of interconnect features each comprising conductive material between adjacent memory cells formed into the layer of the substrate, and gate portions coupled onto the memory cells and configured to individually alter the resistance properties of the resistive memory material of associated memory cells responsive to at least voltages applied to the gate portions.

A memory using mixed valence conductive oxides is disclosed. The memory includes a mixed valence conductive oxide that is less conductive in its oxygen deficient state and a mixed electronic ionic conductor that is an electrolyte to oxygen and promotes an electric filed to cause oxygen ionic motion.

The invention provides a resistive memory with better area efficiency without degrading reliability, which includes an array area, word lines, a local bit line, source lines, and a shared bit line. In the array area, memory cells are arranged in a matrix, and each memory cells includes a variable resistance element and an accessing transistor. The word lines extend in a row direction of the array area and are connected to the memory cells in the row direction. The local bit line extends in a column direction of the array area. The source lines extend in the column direction and are connected to first electrodes of the memory cells in the column direction. The shared bit line is connected to the local bit line. The shared bit line extends in the row direction and is connected to second electrodes of the memory cells in the row direction.

Provided are memory cells, such as resistive random access memory (ReRAM) cells, each cell having multiple metal oxide layers formed from different oxides, and methods of manipulating and fabricating these cells. Two metal oxides used in the same cell have different dielectric constants, such as silicon oxide and hafnium oxide. The memory cell may include electrodes having different metals. Diffusivity of these metals into interfacing metal oxide layers may be different. Specifically, the lower-k oxide may be less prone to diffusion of the metal from the interfacing electrode than the higher-k oxide. The memory cell may be formed to different stable resistive levels and then resistively switched at these levels. Each level may use a different switching power. The switching level may be selected a user after fabrication of the cell and in, some embodiments, may be changed, for example, after switching the cell at a particular level.

According to one embodiment, a memory device includes first to third interconnects, memory cells, and selectors. The first to third interconnects are provided along first to third directions, respectively. The memory cells includes variable resistance layers formed on two side surfaces, facing each other in the first direction, of the third interconnects. The selectors couple the third interconnects with the first interconnects. One of the selectors includes a semiconductor layer provided between associated one of the third interconnects and associated one of the first interconnects, and gates formed on two side surfaces of the semiconductor layer facing each other in the first direction with gate insulating films interposed therebetween.

A memory cell array includes a first and a second column of memory cells, a first and a second bit line, a source line and a first set of vias. The first or second bit line includes a first conductive line located on a first metal layer, and a second conductive line located on a second metal layer. The first and second conductive lines overlap a source of a transistor of a memory cell of the first column or second column of memory cells. The source line is coupled to the first and second column of memory cells. The first set of vias is electrically coupled to the first and second conductive line. A pair of vias of the first set of vias is located above where the first conductive line overlaps each memory cell of the first or second column of memory cells.

A semiconductor memory device according to an embodiment includes a memory cell array that includes a plurality of memory cells. The memory cell array comprises: a plurality of first conductive layers that are stacked in a first direction above a substrate and extend in a second direction intersecting the first direction; a second conductive layer extending in the first direction; a variable resistance film provided at intersections of the plurality of first conductive layers and the second conductive layer; a first select transistor disposed closer to a side of the substrate than a lowermost layer of the plurality of first conductive layers, the first select transistor including a first select gate line intersecting the second conductive layer; a third conductive layer that extends in a third direction intersecting the second direction and is connected to a lower end of the second conductive layer via the first select transistor; and a second select transistor disposed between at least one pair of the plurality of first conductive layers adjacent in the first direction, the second select transistor including a second select gate line intersecting the second conductive layer.

Systems and methods for improving performance of a non-volatile memory that utilizes a Vacancy Modulated Conductive Oxide (VMCO) structure are described. The VMCO structure may include a layer of amorphous silicon (e.g., a Si barrier layer) and a layer titanium oxide (e.g., a TiO2 switching layer). In some cases, the VMCO structure or VMCO stack may use bulk switching or switching O-ion movements across an area of the VMCO structure, as opposed to switching locally in a constriction of vacancy formed filamentary path. A VMCO structure may be partially or fully embedded within a word line layer of a memory array.

A vacancy-modulated conductive oxide (VMCO) resistive random access memory (ReRAM) device includes at least one interfacial layer between a semiconductor portion and a titanium oxide portion of a resistive memory element. The at least one interfacial layer includes an oxygen reservoir that can store oxygen atoms during operation of the resistive memory element. The at least one interfacial layer can include an interfacial metal oxide layer, a metal layer, and optionally, a ruthenium layer.

In accordance with an example embodiment of the present invention, an apparatus is disclosed. The apparatus includes a resistive memory component including an active material and two or more electrodes in electrical contact with the active material of the resistive memory component; and a selector component providing control over the resistive memory component, the selector component including an active material and two or more electrodes in electrical contact with the active material of the selector component. The resistive memory component and the selector component share one or more electrodes, and the resistive memory component and the selector component share at least part of the active material. A method and apparatus for producing the apparatus are also disclosed.