A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member, and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member, a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

Techniques are provided for the production of high-contrast, x-ray and/or gamma-ray radiographic images. The images have minimal contributions from object-dependent background radiation. The invention utilizes the low divergence, quasi-monoenergetic, x-ray or gamma-ray output from a laser-Compton source in combination with x-ray optical technologies to produce a converging x-ray or gamma-ray beam with which to produce a high-contrast, shadowgraph of a specific object. The object to be imaged is placed within the path of the converging beam between the x-ray optical assembly and the focus of the x-ray beam produced by that assembly. The beam is then passed through an optically thick pinhole located at the focus of the beam. Downstream of the pinhole, the inverted shadowgraph of the object is then recorded by an appropriate 2D detector array.

The present invention relates to X-ray differential phase-contrast imaging, in particular to a deflection device for X-ray differential phase-contrast imaging. In order to provide differential phase-contrast imaging with improved dose efficiency, a deflection device (28) for X-ray differential phase-contrast imaging is provided, comprising a deflection structure (41) with a first plurality (44) of first areas (46), and a second plurality (48) of second areas (50). The first areas are provided to change the phase and/or amplitude of an X-ray radiation; and wherein the second areas are X-ray transparent. The first and second areas are arranged periodically such that, in the cross section, the deflection structure is provided with a profile arranged such that the second areas are provided in form of groove-like recesses (54) formed between first areas provided as projections (56). The adjacent projections form respective side surfaces (58) partly enclosing the respective recess arranged in between. The side surfaces of each recess have a varying distance (60) across the depth (62) of the recess.

A neutron beam diffraction material treatment system utilizes a neutron beam source configured to produce a first neutron beam having a first direction and second neutron beam source configured to produce a second neutron beam having a second direction. The neutron beam diffraction material treatment system can direct the first and second neutron beams to intersect with each other in or on a work-piece and thereby treat the work piece by neutron diffraction. One or more of the neutron beams may be configured to move to change the location of the intersecting point within the work-piece and/or the work-piece may be configured to move. The first and second neutron beams may be configured with a magnetic coil configured around the neutron beam and between the neutron beam source and the work-piece. The magnetic coil may be used to contain the neutron beams and reduce the scattering of neutron.

The disclosure relates to an optical element, in particular for a microlithographic projection exposure apparatus. The optical element has an optical effective surface. The optical element includes a substrate, a layer system that is present on the substrate, and a protective cover extending over an edge region of the optical element that is adjacent to the optical effective surface. During operation of the optical element, the protective coating reduces an ingress of hydrogen radicals into the layer system in comparison with an analogous design without the protective cover, wherein a gap is formed between the protective cover and the layer system.

A method of fabricating a refractive optical element on a substrate may provide less expensive and more compact optics for an X-ray system. The method includes coating the substrate with a resin and providing radiation to a portion of the resin to cause two photon polymerization of the resin. The method further includes forming, by two photon polymerization, a first surface of a polymer refractive optical element from the resin. The first surface is disposed along an optical axis of the refractive optical element and the first surface has a roughness of less than 100 nanometers. Further, the method includes forming, by two photon polymerization, a second surface of the polymer refractive optical element. The second surface is disposed along the optical axis of the refractive optical element and the second surface has a roughness of less than 100 nanometers.

Devices, systems and methods for performing X-ray scans with a single line of sight using a lens array for capturing the light field of the X-rays are described. In one example aspect, an X-ray optical system includes a primary optics subsection positioned to receive incoming X-rays after traversal through an object and to redirect the received incoming X-rays onto an intermediate image plane. The system also includes a microlens array positioned at or close to the intermediate image plane to receive at least some of the received incoming X-rays after redirection by the primary optics subsection to diffract the X-rays that are incident thereupon.

The disclosure relates to an optical element, in particular for a microlithographic projection exposure apparatus. The optical element has an optical effective surface. The optical element includes a substrate, a layer system that is present on the substrate, and a protective cover extending over an edge region of the optical element that is adjacent to the optical effective surface. During operation of the optical element, the protective coating reduces an ingress of hydrogen radicals into the layer system in comparison with an analogous design without the protective cover, wherein a gap is formed between the protective cover and the layer system.

The invention discloses an X-ray zoom lens system (Transfocator) and a focus variation method. The system includes a main frame, many switched arms arranged on one side of the main frame, and a driving component set at the top of the main frame, and a positioning groove set at the bottom of the main frame; For them, each switched arm is composed of successively connected a push rod, a push-push ratchet mechanism, a preload spring and a guide stick, two-dimensional flexible axis, and a CRLs holder from top to bottom; CRLs are stacked and arranged in the mentioned above CRLs holder.

An X-ray system comprises: a source of an X-ray diverging beam having a central imaging portion and a peripheral treatment-portion; a lens transforming the peripheral treatment portion of the X-ray beam into a converging beam directed to a target; a shutter located between the X-ray source and the target in the central imaging portion of the X-ray radiation; and a detector of imaging radiation after interaction with the target and to provide imaging information of the target.