A method of chemical mechanical polishing includes bringing a substrate having a conductive layer disposed over a semiconductor wafer into contact with a polishing pad, generating relative motion between the substrate and the polishing pad, monitoring the substrate with an in-situ electromagnetic induction monitoring system as the conductive layer is polished to generate a sequence of signal values that depend on a thickness of the conductive layer, determining a sequence of thickness values for the conductive layer based on the sequence of signal values, and at least partially compensating for a contribution of conductivity of the semiconductor wafer to the signal values.

A measurement device for measuring properties of a metal sheet processed in a rolling mill, including: an inspection coil set including a transmitter coil and a receiver coil, the transmitter coil being configured to apply a time-varying magnetic field to the metal sheet, and the receiver coil being configured to detect a magnetic field transient produced from the metal sheet. The property of the metal sheet is derivable from the magnetic field transient. A correction coil set, for detecting a spatial deviation of the metal sheet from a reference plane, each correction coil being connectable to a capacitor to form a respective resonance circuit having a resonance frequency. The correction coils are resonated at the respective resonance frequency. A shift in the resonance frequency in the presence of the metal sheet is detectable and the spatial deviation is derivable from the shifts.

A method of chemical mechanical polishing includes bringing a conductive layer of a substrate into contact with a polishing pad, supplying a polishing liquid to the polishing pad, generating relative motion between the substrate and the polishing pad, monitoring the substrate with an in-situ electromagnetic induction monitoring system as the conductive layer is polished to generate a sequence of signal values that depend on a thickness of the conductive layer, and determining a sequence of thickness values for the conductive layer based on the sequence of signal values. Determining the sequence of thickness values includes at least partially compensating for a contribution of the polishing liquid to the signal values.

A device and method for nondestructively inspecting, measuring, and/or detecting metallic. The device may enable multiple synthetic apertures for measurements simultaneously. The device includes a transmitter coil array and a receiver coil array wound around a core. The receiver coil array includes multiple receiver coil sections built with gaps in between adjacent sections to form multiple associated apertures. An analog electrical network is coupled to the multiple receiver coil sections to enable multiple combined synthetic apertures to be operated together for the transducer to conduct measurements simultaneously to provide multiple outputs associated to the multiple synthetic apertures. Measurement signals can be combined to build a processed signal that can represent more accurate information from the target.

The disclosure discloses a method, apparatus and system for detecting multi-mode electromagnetic acoustic and magnetic flux leakage and a sensor. The method comprises: S102, receiving an operation instruction for detecting an object to be detected, the operation instruction is used for controlling a detection sensor to enter into any one or more of working modes as follows: magnetic flux leakage detection, ultrasonic bulk wave detection, ultrasonic guided wave detection and surface wave detection; S104, controlling the detection sensor to output a corresponding detection signal according to the operation instruction; and S106, detecting the object to be detected on the basis of the detection signal. The technical solution achieves a purpose of using one sensor to realize various detection modes, such as magnetic flux leakage and electromagnetic acoustic modes, reduces complexity and cost of a detection system, and improves detection efficiency.

The invention relates to a measuring arrangement and to a method for the inductive analysis of metal objects, comprising a coil arrangement having an excitation coil (1.1) that can be excited by means of an excitation current, and at least one receiver coil (1.2), said two coils being inductively coupled to one another. By means of an evaluation unit, an output signal (5.4) of the measuring arrangement is evaluated. Means for generating a ramp-shaped voltage signal of the excitation voltage (2.5) as a specification for a ramp-shaped current through the excitation coil are provided. A control device regulates the current at the base point of the excitation coil (1.1) such that a ramp-shaped excitation current is produced, which is modulated by the metal object (1.6), and which affects the change in the excitation voltage. Thus, an inductive analysis or detection method is provided, in which temperature influences on the coil system have no effect at all, and which, moreover, allows a spectral analysis of the inductive properties of the metal to be analyzed in a wide frequency range.

A method of non-contact measurement of a thickness (d) of an object of an electrically conductive material by means of a Pulsed Eddy Current, PEC, system including a transmitter coil and a receiver coil. The method includes, after having turned off a current in the transmitter coil, at the receiver coil, measuring a voltage induced by the decaying magnetic field at a first time point, a second time point, and a third time point. The method also includes calculating a total magnetic flux which is generated by the eddy currents in the object at the first time point and picked up by the receiver coil, by comparing the measured flux at the first time point with a predetermined total flux picked up by the receiver coil when no object is present. The method also includes normalizing measured magnetic flux resulting from the eddy currents and picked up by the receiver coil, using the calculated total magnetic flux as a normalization factor such that the normalized eddy current flux is independent of a distance between the object and the transmitter and receiver coils. The method also including, based on the measurements at the first, second and third time points, determining the thickness and the resistivity of the object.

A measurement device for measuring properties of a metal sheet processed in a rolling mill, including: an inspection coil set including a transmitter coil and a receiver coil, the transmitter coil being configured to apply a time-varying magnetic field to the metal sheet, and the receiver coil being configured to detect a magnetic field transient produced from the metal sheet. The property of the metal sheet is derivable from the magnetic field transient. A correction coil set, for detecting a spatial deviation of the metal sheet from a reference plane, each correction coil being connectable to a capacitor to form a respective resonance circuit having a resonance frequency. The correction coils are resonated at the respective resonance frequency. A shift in the resonance frequency in the presence of the metal sheet is detectable and the spatial deviation is derivable from the shifts.

A shaft furnace, in particular a blast furnace, includes a metal jacket defining the furnace outer wall and a protective layer protecting the inner surface of the outer wall. At least one condition monitoring probe is arranged inside within the protective layer to monitor the latter. The condition monitoring probe is connected to a wireless module arranged outside the outer wall to transmit condition monitoring data. The wireless module is located inside a casing mounted to the outer surface of the metal jacket. The condition monitoring probe includes one or more conductive loops positioned at predetermined depths below the front face of the cooling plate body, or of the refractory lining, so that wear of the body, resp. refractory, can be detected by a change of an electrical characteristic of the loop(s) due to abrasion.

A system for measuring brake data from a braking assembly of a vehicle. The braking assembly includes a floating portion that moves relative to brake pad wear. The system includes a brake sensor for each wheel. The brake sensors include a fixed sensing element and a target portion attached for movement with the floating portion. The sensing element generates a signal indicating a position of the target portion. The signal is used to determine brake pad thickness. The brake sensor also transmits the signal over a wireless vehicle area network for receipt and processing by a wireless hub in the vehicle area network. The vehicle area network can generate and transmit an alert and/or instructions for an autonomous vehicle based on the signal.