A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and a signal generator that outputs the reference signal input to the demodulation circuit and outputs a drive signal input to the optical modulator, in which Vd/Vr<10, where Vr is a voltage of the reference signal and Vd is a voltage of the drive signal.

A differential polarization interferometer is provided. An interferometer performs direct measurement of phase shift of a light wave passed under an arbitrary angle through a sample composed of a transparent substrate holding a thin deposited test film, for metamaterial testing. An example apparatus has a laser source and a first polarizer, and two optically connected arms. A first arm creates orthogonally polarized components of a single output beam for a broadband non-polarizing beam splitter. A second arm has a controllable phase retarder to introduce a phase shift into one polarization component of the reflected single output beam, and a second polarizer to equalize and mix the polarization components of the reflected single output beam. This transforms the reflected single output beam into a beam resulting from interference of polarization components of the reflected single output beam. A photodetector transforms an intensity of the beam into an electric signal for output.

A fiber optic sensing system for determining the position of an object requires a light source, an optical fiber, a fiber optic splitter, a fiber tip lens, an optical detector and signal processing circuitry. Light emitted by the light source is conveyed via optical fiber and the splitter to the lens and onto an object, such that at least a portion of the light is reflected by the object and conveyed via fiber and the splitter to the detector. Signal processing circuitry coupled to the detector determines the position of the object with respect to the lens based on a characteristic of the reflected light. The system is suitably employed with a hydraulic accumulator having a piston, the position of which varies with the volume of fluid in the accumulator, with the system arranged to determine the position of the piston, from which the volume can be calculated.

The inventive phase measuring device includes a first A/D converter 2 that digitizes a first periodical input signal X at each predetermined sampling timing and outputs the resultant signal as a digital signal Xd, a first zero-crossing identification means operable to detect a sign of Xd, a counting processing unit 4 that counts a difference in the number of times of zero-crossing detection by the first zero-crossing identification means and calculates the difference at each sampling timing, and a fraction processing unit 5 that computes a fraction of the number of times of zero-crossing detection on the basis of Xd at sampling timings immediately before and immediately after determination of zero-crossing by the first zero-crossing identification means. An averaging processing unit 6 performs averaging by adding up and totalizing the outputs from the counting processing unit 4 and the fraction processing unit 5, thereby computing a phase. The inventive device thus implements a digital phase measuring device and a digital phase difference measuring device that allow input of periodical signals in a wide frequency range and that are capable of accurate and real-time measurement.

Metrology measurement methods and tools are provided, which illuminate a stationary diffractive target by a stationary illumination source, measure a signal composed of a sum of a zeroth order diffraction signal and a first order diffraction signal, repeat the measuring for a plurality of relations between the zeroth and the first diffraction signals, while maintaining the diffractive target and the illumination source stationary, and derive the first order diffraction signal from the measured sums. Illumination may be coherent and measurements may be in the pupil plane, or illumination may be incoherent and measurements may be in the field plane, in either case, partial overlapping of the zeroth and the first diffraction orders are measured. Illumination may be annular and the diffractive target may be a one cell SCOL target with periodic structures having different pitches to separate the overlap regions.

A fiber optic sensor arrangement is disclosed that includes a plurality of optical fiber based sensor elements, the sensor elements configured to modify an associated optical carrier signal in accordance with changes in a sensed quantity at a location of the sensor element and a phase modulation arrangement for phase modulating each optical carrier signal in accordance with respective uncorrelated pseudorandom binary sequence signals. The sensor arrangement also includes an interferometer module for receiving each of the phase modulated optical carrier signals, the interferometer module operable to convert a change in the phase modulated optical carrier signals to a change in optical intensity of the corresponding optical carrier signal to generate a combined modulated optical intensity signal, an optical intensity detector for measuring the combined modulated optical intensity signal and generating a time varying electrical detector signal and an analog to digital convertor to convert the time varying electrical detector signal to a time varying digitized detector signal. Also included in the sensor arrangement is a decorrelator arrangement for decorrelating the time varying digitized detector signal against the respective uncorrelated pseudorandom binary sequence corresponding to each of the optical carrier signals to recover each of the modulated optical carrier signals and a demodulator for demodulating each of the modulated optical carrier signals to recover the respective optical carrier signal to determine the changes in the sensed quantity at the location of the sensor element.

A method of measuring a polarization response of a sample (1), in particular a biological sample, comprises the steps of generating a sequence of excitation waves (2), irradiating the sample (1) with the sequence of excitation waves (2), including an interaction of the excitation waves (2) with the sample (1), so that a sequence of sample waves (3) is generated each including a superposition of a sample main pulse and a sample global molecular fingerprint (GMF) wave (E.sub.GMF(sample)(t)), irradiating a reference sample (1A) with the sequence of excitation waves (2), including an interaction of the excitation waves (2) with the reference sample (1A), so that a sequence of reference waves (3A) is generated each including a superposition of a reference main pulse and a reference GMF wave (E.sub.GMF(ref)(t)), optically separating a difference of the sample waves (3) and reference waves (3A) from GMF wave contributions which are common to both of the sample waves (3) and reference waves (3A) in space and/or time, and detecting the difference of the sample waves (3) and the reference waves (3A) and determining a temporal amplitude of differential molecular fingerprint (dMF) waves (ΔE.sub.GMF) (4) each comprising the difference of the sample and reference GMF waves. Furthermore, as a spectroscopic apparatus for measuring a polarization response of a sample (1) is described.

OCT measuring device in the present exemplary embodiment includes: wavelength sweep light source that emits light of which a wavelength is swept; optical interferometer that divides the light into measurement light and reference light, emits measurement light toward measurement surface of measuring target object, and generates an optical interference intensity signal indicating an intensity of interference between measurement light reflected from measurement surface and reference light; electro-optic element which is a phase modulator arranged in a light path of optical interferometer; measurement processor which is a signal generator that derives a position of measurement surface and generates a phase amount indicator signal that indicates a phase amount of phase modulator based on the optical interference intensity signal; and electro-optic element controller which is a phase amount controller that controls the phase amount given to the light that is transmitted through phase modulator.

A tomographic imaging device includes a light source, a light pulse generator, a wave shaper, a splitter, a frequency shifter, a light path length changer, an optical detector, filters, a demodulator and an analyzer. The light pulse generator generates an optical pulse train from an output of the light source. The wave shaper modulates the optical pulse train by binary phase shift keying with PN codes. The splitter splits the pulse train into two signals, one is shifted by the frequency shifter, and one has a path length changed by the light path length changer. The optical detector inputs back scattered light from an object and the signal whose length has changed, and generates a difference signal. The filters filter the difference signals, and the demodulator demodulates the filter outputs. The analyzer calculates a reflection site of the measurement object by analyzing the output signal of the demodulator.

Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets. Methods comprise generating a signal matrix by: illuminating a SCOL target at multiple values of at least one illumination parameter, and at multiple spot locations on the target, wherein the illumination is at a NA (numerical aperture) >⅓ yielding a spot diameter <1μ, measuring interference signals of zeroth and first diffraction orders, and constructing the signal matrix from the measured signals with respect to the illumination parameters and the spot locations on the target; and deriving a target overlay by analyzing the signal matrix. The SCOL targets may be reduced to be a tenth in size with respect to prior art targets, as less and smaller target cells are required, and be easily set in-die to improve the accuracy and fidelity of the metrology measurements.