The present invention relates to an apparatus and a method for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization. More specifically, the present invention relates to an apparatus for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization in an apparatus for measuring a thickness and a refractive index of a measurement object coated with the multilayer thin film, the apparatus including: an illumination optical module having a light source emitting light; a first beam splitter configured to reflect some of the light emitted from the illumination optical module; an objective lens configured to input some of the light reflected from the first beam splitter to the measurement object constituted by the multilayer thin film and reflect the remaining light to a reference plane to form interference light on a back focal plane; a second beam splitter in which interference light where the reflected light incident and reflected to the measurement object interferes with the reflected light reflected from the reference plane is incident, wherein some of the interference light is reflected and the remaining interference light is transmitted; a first angle-resolved spectral image acquiring unit configured to receive interference light reflected from the second beam splitter and first-polarize the interference light located in the back focal plane of the objective lens to acquire a first polarized interference image; and a second angle-resolved spectral image acquiring unit configured to receive interference light transmitted from the second beam splitter and second-polarize the interference light located in the back focal plane of the objective lens to acquire a second polarized interference image.

An optical complex amplitude measurement apparatus causes a polarization controller to perform control of making a polarized beam of a signal beam having a frequency that is output from a first laser and then passes through a measurement target match with a polarized beam of a reference beam from a second laser. A spatial filter extracts, from the matched signal beam, a plane wave component in which a wave front is distorted due to the passage, and outputs a signal beam having the frequency. The second laser performs a phase synchronization control of a frequency of the reference beam such that a frequency difference due to multiplexing of the signal beam and the reference beam by a homodyne interferometer becomes 0. The controlled reference beam and the signal beam from the polarization controller are multiplexed by a beam splitter.

The invention provides a laser processing system having the function of optical diffraction tomography, comprising: an integrated imaging optical path and a processing optical path; the imaging optical path is used to perform optical diffraction tomography on the device to be processed; the processing optical path is used for processing the device to be processed. Moreover, the specific optical path structure is introduced. During the processing of the device to be processed, the laser processing system can also perform real-time imaging of the device to be processed without shifting the device to be processed. That is to say, the laser processing and imaging processing of the device to be processed can be realized at the same time in a laser processing system.

A system for polarization-sensitive optical coherence tomography (PS-OCT) of a sample comprises an interferometric arrangement comprising a reference arm and a sample arm, the sample arm being arranged to emit optical radiation towards the sample; a phase modulation system arranged at an input to the sample arm; and a detector arranged to detect a signal generated by interference between a reference beam from the reference arm and a sample beam from the sample arm. The phase modulation system comprises: an electro-optic modulator; a polarizer arranged at a rotation angle relative to the fast axis of the electro-optic modulator; and a signal generator for delivering a driving voltage to the electro-optic modulator; wherein the rotation angle and the driving voltage are selected such that the phase modulation system generates three mutually orthogonal polarization states.

An interferometric measurement system includes ports configured to receive an optical signal from an optical source and an optical signal from a target. A photonic integrated circuit includes a variable delay configured to select between at least two optical paths from the input to an output such that the optical signal from the optical source passes to the output while experiencing an optical delay based on a selected one of the at least two optical paths where a loss of the optical signal from the optical source provided to the input that passes to the output is nominally the same for each of the at least two optical paths. An optical receiver is configured to receive the optical signal from the target and to receive the optical signal from the optical source that experiences the optical delay based on the selected one of the at least two optical paths and generates a corresponding electrical receive signal at an electrical output. A processor is configured to generate an interferometric measurement signal based on the receive signal.

Systems, methods, and media for multiple beam optical coherence tomography are provided which, in some embodiments, include: a light source; a splitter that outputs a fraction of light to various waveguides; optical components that receive light from the waveguides and direct the light as beams that simultaneously impinge a sample at different lateral positions, and collect backscattered light from the lateral positons; another splitter that outputs a fraction of light to waveguides of a reference arm as reference light samples; a mixer that receives the backscattered light samples and the reference light samples, and combines each backscattered sample with a corresponding reference sample such that the mixer outputs fringes; and a detector that receives the fringes, and outputs OCT signals, each indicative of a structure of the sample at a respective lateral position.

The present invention relates to an apparatus and a method for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization. More specifically, the present invention relates to an apparatus for measuring a thickness and a refractive index of a multilayer thin film using an angle-resolved spectral interference image according to polarization in an apparatus for measuring a thickness and a refractive index of a measurement object coated with the multilayer thin film, the apparatus including: an illumination optical module having a light source emitting light; a first beam splitter configured to reflect some of the light emitted from the illumination optical module; an objective lens configured to input some of the light reflected from the first beam splitter to the measurement object constituted by the multilayer thin film and reflect the remaining light to a reference plane to form interference light on a back focal plane; a second beam splitter in which interference light where the reflected light incident and reflected to the measurement object interferes with the reflected light reflected from the reference plane is incident, wherein some of the interference light is reflected and the remaining interference light is transmitted; a first angle-resolved spectral image acquiring unit configured to receive interference light reflected from the second beam splitter and first-polarize the interference light located in the back focal plane of the objective lens to acquire a first polarized interference image; and a second angle-resolved spectral image acquiring unit configured to receive interference light transmitted from the second beam splitter and second-polarize the interference light located in the back focal plane of the objective lens to acquire a second polarized interference image.

An interferometer having a fundamental beam generator, a first second harmonic generator, a waveplate, a second second harmonic generator, a harmonic separator, and a polarizing beam splitter, mounted uniaxially, (i.e., the components are aligned along one optical axis), wherein the interferometer is adapted to change a diameter of a beam to match a diameter of a sample, and to change the diameter of the beam back to its original diameter.

The invention discloses a method for measuring a complex degree of coherence of a random optical field by using a mutual intensity-intensity correlation, including the steps of: building a test optical path; rotating a quarter-wave plate to enable the fast axis of the quarter-wave plate to be consistent with a polarization direction of reference light, to obtain light intensity distribution information of a first combined light; rotating the quarter-wave plate to enable the slow axis of the quarter-wave plate to be consistent with the polarization direction of the reference light, to obtain light intensity distribution information of a second combined light; blocking the reference light to obtain light intensity distribution information of to-be-tested light; blocking the to-be-tested light to obtain light intensity distribution information of the reference light; and calculating the amplitude and phase of a complex degree of coherence of the to-be-tested light.

A probe for an optical measurement system includes a probe body arranged to be adjustably mounted in a measuring machine for optically measuring a test object. A polarizing fiber optically coupled within the probe body transmits a source beam having an instantaneous or sequentially established bandwidth spanning a range of wavelengths to the probe body and also transmits a measurement beam from the probe body toward a detector. An adjustable beam manipulator is provided for angularly redistributing the reference beam along the reference arm.