The present description relates to a stabilized interferometric system comprising: a light source (210) for emitting an initial beam of coherent light; a spatial light modulator (220) configured to receive at least a first part of said initial beam and input data (203) and configured to emit a spatially modulated beam resulting from a spatial modulation of a parameter of said first part of said initial beam based on said input data; a scattering medium (230) configured to receive said spatially modulated beam; a detection unit (240) configured to acquire an interference pattern (IN.sub.0) resulting from the interferences between randomly scattered optical paths taken by the spatially modulated beam through the scattering material; a control unit (250) configured to vary the frequency of the laser source in order to at least partially compensate a change in said interference pattern resulting from a change in at least one environmental parameter.

There is described an interferometer for use in an optical locker. The interferometer comprises at least two transparent materials having different thermal path length sensitivities. The interferometer is configured such that an input beam is split by the interferometer into first and second intermediate beams, which recombine to form an output beam, the first and second intermediate beams travelling along respective first and second intermediate beam paths which do not overlap. At least one of the intermediate beam paths passes through at least two of the transparent materials. A length of each intermediate beam path which passes through each transparent material is selected such that an optical path difference between the first and second intermediate beam path is substantially independent of temperature.

The present invention provides a temperature-insensitive Mach-Zehnder interferometer, including: a first mode converter; a second mode converter, located on one side of the first mode converter and with a distance from the first mode converter; and a connecting arm, located between the first mode converter and the second mode converter, one end of the connecting arm is connected with the first mode converter, and the other end is connected with the second mode converter. The connecting arm includes a straight waveguide connecting arm. The temperature-insensitive Mach-Zehnder interferometer of the present invention can be configured to be insensitive to temperature by adjusting parameters such as the width and thickness of the connecting arm.

The present invention provides a temperature-insensitive Mach-Zehnder interferometer, including: a first mode converter; a second mode converter, located on one side of the first mode converter and with a distance from the first mode converter; and a connecting arm, located between the first mode converter and the second mode converter, one end of the connecting arm is connected with the first mode converter, and the other end is connected with the second mode converter. The connecting arm includes a straight waveguide connecting arm. The temperature-insensitive Mach-Zehnder interferometer of the present invention can be configured to be insensitive to temperature by adjusting parameters such as the width and thickness of the connecting arm.

The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

An optical interferometric range sensor includes a light source that emits light with a changing wavelength, a light splitter that splits the light emitted from the light source into a plurality of beams to be incident on a plurality of spots, an interferometer that generates, for each of the plurality of beams of the split light incident on a corresponding spot of the plurality of spots, interference light based on measurement light and reference light, a light receiver that receives the interference light to convert the interference light to an electric signal, a processor that calculates a distance from a sensor head to a measurement target based on the electric signal, an identifier that identifies the sensor head based on a beat signal generated by the interferometer, and a light adjuster that adjusts an amount of light to be incident on the measurement target based on the sensor head.

A method for calibrating a measuring device (10) for interferometrically determining a shape of an optical surface (12) of an object under test (14). The measuring device includes a module plane (32) for arranging a diffractive optical test module (30) which is configured to generate a test wave (34) that is directed at the optical surface and that has a wavefront at least approximately adapted to a target shape (60) of the optical surface. The method includes: arranging a diffractive optical calibration module (44) in the module plane for generating a calibration wave (80), acquiring a calibration interferogram (88) generated using the calibration wave in a detector plane (43) of the measuring device, and determining a position assignment distribution (46) of points (52) in the module plane to corresponding points (54) in the detector plane from the acquired calibration interferogram.

An optical interference range sensor includes: a light source configured to project a light beam while continuously varying a wavelength thereof using a predetermined sweep frequency pattern; a processing unit configured to measure the distance to a measurement target based on an electrical signal converted by a light-receiving unit; and a storage unit configured to store distance information indicating the measured distance. The predetermined sweep frequency pattern includes a first sweep frequency pattern and a second sweep frequency pattern. The processing unit includes an average distance value calculation unit configured to calculate an average distance value based on the measured distance, first distance information indicating a distance based on a light beam projected using the first sweep frequency pattern, and second distance information indicating a distance based on a light beam projected using the second sweep frequency pattern, of past distance information regarding multiple measurements stored in the storage unit.

The present invention provides a temperature-insensitive Mach-Zehnder interferometer, including: a first mode converter; a second mode converter, located on one side of the first mode converter and with a distance from the first mode converter; and a connecting arm, located between the first mode converter and the second mode converter, one end of the connecting arm is connected with the first mode converter, and the other end is connected with the second mode converter. The connecting arm includes a straight waveguide connecting arm. The temperature-insensitive Mach-Zehnder interferometer of the present invention can be configured to be insensitive to temperature by adjusting parameters such as the width and thickness of the connecting arm.

The present invention provides a temperature-insensitive Mach-Zehnder interferometer, including: a first mode converter; a second mode converter, located on one side of the first mode converter and with a distance from the first mode converter; and a connecting arm, located between the first mode converter and the second mode converter, one end of the connecting arm is connected with the first mode converter, and the other end is connected with the second mode converter. The connecting arm includes a straight waveguide connecting arm. The temperature-insensitive Mach-Zehnder interferometer of the present invention can be configured to be insensitive to temperature by adjusting parameters such as the width and thickness of the connecting arm.