A metrology system may include an imaging sub-system to image a metrology target buried in a sample, where the sample is formed from bonded first and second substrates with a metrology target at the interface. The metrology system may further include an illumination sub-system with an illumination field stop and an illumination pupil, where the illumination field stop includes an aperture to provide that a projected size of the field-stop aperture on a measurement plane corresponding to the metrology target matches a field of view of the detector at the measurement plane, and where the illumination pupil includes a central obscuration to provide oblique illumination of the metrology target with angles greater than a cutoff angle selected to prevent illumination from the illumination source from reflecting off of the bottom surface of the sample and through the field of view of the detector at the measurement plane.

An inspection apparatus includes a light source unit, cameras, a keyboard, and a controller that determines a wavelength of the excitation light, based on the information on the emission color received by the keyboard, and that controls the light source unit so that the light source unit generates excitation light with the determined wavelength. The controller determines a wavelength longer than an absorption edge wavelength of the substrate of the sample and shorter than a peak wavelength of an emission spectrum of the light-emitting element, the peak wavelength being specified from the information on the emission color, to be the wavelength of the excitation light.

An axis deviation detection device includes: a first detection unit that detects a first object from pickup information acquired by a camera disposed in an interior of a vehicle cabin of a vehicle; a second detection unit that detects a second object from point information acquired by a LIDAR disposed in an exterior of the vehicle cabin of the vehicle; and an axis deviation angle estimation unit that estimates an axis deviation angle of the LIDAR to the camera, and that estimates that the axis deviation angle of the LIDAR to the camera is a predetermined angle, in a case where a result of comparison between a detection result of the first detection unit and an after-rotation detection result from rotating a detection result of the second detection unit by the predetermined angle about an attachment position of the LIDAR on the vehicle satisfies a predetermined condition.

A device for detecting whether a wafer is present on a clamping jaw and detecting whether the wafer is parallel to a bottom of the clamping jaw. The device for detecting a wafer comprises: a wafer parallel measuring unit arranged in a CMP cleaning and drying device, and used for emitting a parallel measuring laser beam parallel to the bottom of the clamping jaw and receiving the parallel measuring laser beam; a wafer detection unit used for emitting a wafer detecting laser beam to the wafer and receiving the wafer detecting laser beam; and a detection processing unit electrically connected to the wafer parallel measuring unit and the wafer detection unit, and used for determining whether the wafer is present on the clamping jaw and whether the wafer is parallel to the bottom of the clamping jaw according to the received wafer detecting laser beam and parallel measuring laser beam.

The present disclosure proposes an apparatus for determining a first three-dimensional shape of an object. The apparatus includes a first light source configured to irradiate first pattern lights to the object, first image sensors configured to capture first reflected lights generated by reflecting the first pattern lights from the object, a second light source configured to sequentially irradiate second pattern lights having one phase range, a beam splitter and lenses configured to change optical paths of the second pattern lights, a second image sensor configured to capture second reflected lights generated by reflecting the second pattern lights from the partial region, and a processor configured to determine the first three-dimensional shape of the object based on the first reflected lights and the second reflected lights.

The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.

A system and method. The system may include a head-up display (HUD). The HUD may include a positionable combiner optical element (COE) and a combiner alignment detector (CAD) configured to conform images displayed on the positionable COE with a view through the positionable COE. The CAD may include a mirror that moves with the positionable COE, an infrared (IR) emitter configured to emit IR pulses onto the mirror with a duty cycle of less than 1% such that an average time-based radiance of the IR pulses is compatible with a night vision imaging system (NVIS), and an IR detector configured to receive the IR pulses reflected off of the mirror.

A method and system for measuring signal loss in a fiber optic cable. The tail ends of reference and test fiber optic cables are illuminated with a diffuse light. The head end of each of the reference and test fiber optic cables are positioned in a measurement area. A core imager captures an image of the core of each head-end while it is in the measurement area. Reference and test radiant fluxes emitted from the reference and test head-ends are determined from the respective core images. The relative signal loss of the test fiber optic cable is then determined by comparing the test radiant flux to the reference radiant flux.

An optical apparatus includes a folding mirror configured to direct first and second illumination lights on first and second alignment marks respectively and reflect first and second reflected lights reflected from the first and second alignment marks in different horizontal directions respectively, first and second lenses arranged respectively in optical paths of the first and second reflected lights reflected from the first and second reflective surfaces of the folding mirror, first and second reflection portions configured to reflect the first and second reflected lights passing through the first and second lenses respectively, and a beam splitter prism configured to divide an illumination light incident through a first surface into the first and second illumination lights and direct to the first and second reflection portions, and transmit the first and second reflected lights reflected by the first and second reflection portions through a second surface.

Disclosed is a method and apparatus for determining information about an alignment of one or more optical components of a multi-component assembly involving: detecting an optical interference pattern produced from a combination of at least three optical wave fronts including at least two optical wave fronts caused by reflections from at least two surfaces of the one or more optical components; and computationally processing information derived from the detected optical interference pattern with at least one simulated optical wave front derived from a model of at least one selected optical surface of the at least two surfaces to computationally isolate information corresponding to an alignment of the selected optical surface.