A physical quantity sensor includes a base on which an IC electrically connected to a gyro element is arranged and a wire group arranged on the base. The base includes a first outer edge and a second outer edge that crosses the first outer edge. The wire group includes a CLK wire arranged along the first outer edge and including an internal terminal connected to the IC and an S1 wire arranged along the second outer edge and including an internal terminal connected to the IC. A detection signal of the gyro element is input to the IC via the S1 wire.

A physical quantity sensor includes a base on which an IC electrically connected to a gyro element is arranged and a wire group arranged on the base. The base includes a first outer edge and a second outer edge that crosses the first outer edge. The wire group includes a CLK wire arranged along the first outer edge and including an internal terminal connected to the IC and an S1 wire arranged along the second outer edge and including an internal terminal connected to the IC. A detection signal of the gyro element is input to the IC via the S1 wire.

To improve durability against impact, a quartz crystal resonator element includes a recess in a plan view. The quartz crystal resonator element further includes a first principal surface and a second principal surface that are front and rear surfaces facing away from each other and a side surface disposed between the first principal surface and the second principal surface, and the side surface is formed of flat surfaces and curved surfaces formed by dry etching and alternately arranged. The quartz crystal resonator element preferably has a base and at least one resonating arm extending from the base.

A circuit device includes first and second detection circuits which detect physical quantity signals based on detection signals from first and second physical quantity transducers, a multiplexer which selects any one signal among a plurality of signals including the physical quantity signals from the first and second detection circuits, an A/D conversion circuit which performs A/D conversion of the selected signal, and a logic circuit which performs processing of a digital signal from the A/D conversion circuit. The first detection circuit is arranged on a second direction side from a first side of the circuit device. The second detection circuit is arranged on the second direction side from the first side and on a first direction side from the first detection circuit. The A/D conversion circuit is arranged between at least one of the first or second detection circuit and the logic circuit.

The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a planar surface and an inclined surface inclined with respect to the planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film. In the removing step, the weight film disposed at the planar surface is removed and the weight film disposed at the inclined surface is not removed by emitting the energy ray to the weight film from a normal direction of the planar surface.

A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a first planar surface, a second planar surface which is located closer to the second main surface than is the first planar surface and which is parallel to the first planar surface, and an inclined surface which couples the first planar surface and the second planar surface and which forms an angle of 100° or less with the first planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film from a normal direction of the first planar surface.

An inertia measure unit (IMU) includes a housing assembly, a weight block assembly, a circuit board, and a signal line. The housing assembly includes a cavity and a first opening in communication with the cavity. The weight block assembly is arranged in the cavity of the housing assembly. The weight block assembly includes a weight block forming an inner chamber and a second opening in communication with the inner chamber. An opening direction of the second opening is opposite to an opening direction of the first opening. The circuit board is disposed in the inner chamber. The signal line is coupled to an edge of the circuit board and sequentially extends out from the second opening and the first opening.

An inertia measure unit (IMU) includes a housing assembly, a weight block assembly, a circuit board, and a signal line. The housing assembly includes a cavity and a first opening in communication with the cavity. The weight block assembly is arranged in the cavity of the housing assembly. The weight block assembly includes a weight block forming an inner chamber and a second opening in communication with the inner chamber. An opening direction of the second opening is opposite to an opening direction of the first opening. The circuit board is disposed in the inner chamber. The signal line is coupled to an edge of the circuit board and sequentially extends out from the second opening and the first opening.