G01F1/6965

Thermal flow meter

The present invention provides a thermal flow meter 300 which reduces a stress applied from a fixing portion 3721, which is used to hold and fix a circuit package 400 with respect to a housing 302, to the circuit package 400 and has high reliability. In the thermal flow meter of the invention, the circuit package 400 embedded with a flow rate measurement circuit is formed through a first resin molding process, the fixing portion 3721 is formed along with the housing 302 through a second resin molding process, and the circuit package 400 is enveloped by the fixing portion 3721, whereby the circuit package 400 is held by and fixed to the housing 302. In order to reduce the influence of a stress, generated based on a temperature change of the fixing portion 3721, on the circuit package 400, the fixing portion 3721 is constituted of a thick portion 4714 and a thin portion 4710. Since thickness of a resin of the thin portion 4710 is small, the stress to be generated is small, and a force applied to the circuit package 400 can be reduced.

Composite panel edge treatments and joints and cargo body having same
11428556 · 2022-08-30 · ·

A cargo body panel includes a composite construction including an interior skin, an exterior skin, and a core positioned between the interior and exterior skins. The panel has parallel first and second edges spaced in a first direction. A pocket is formed by the interior skin at a location spaced away from the first and second edges, the pocket extending parallel to the first and second edges to define a length. The pocket is wide enough to accommodate a logistics profile insert having a width that exceeds a depth of the pocket, the depth measured into the panel, perpendicular to both the first direction and the length.

Thermal flow meter including a protrusion protruding from a circuit package body and a temperature detection element buried in the protrusion

Provided is a thermal flow meter to improve the measurement accuracy of a temperature detector provided in a thermal flow meter. The thermal flow meter includes a bypass passage through which a measurement target gas 30 flowing through a main passage flows, and a circuit package 400 which includes a measurement circuit for measuring a flow rate of the measurement target gas 30 flowing through the bypass passage and a temperature detecting portion 452 for detecting a temperature of the measurement target gas. The circuit package 400 includes a circuit package body which is molded by a resin to internally envelope the measurement circuit and a protrusion 424 molded by the resin. The temperature detecting portion 452 is provided in the leading end portion of the protrusion 424, and at least the leading end portion of the protrusion protrudes to the outside from a housing 302.

Thermal flow meter

Provided is a thermal flow meter that can be prevented from being eroded due to adhesion of water or like to a cut end portion of the lead exposed from the mold resin of the circuit package. A thermal flow meter 300 of the present invention is a thermal flow meter having a circuit package 400 formed by mounting a detection element 518 on leads 544 and 545 supported by a support frame 512, sealing with a mold resin, and cutting off the support frame 512, wherein cut end portions 544a and 545a of the leads 544 and 545 exposed from the mold resin of the circuit package 400 by cutting off the support frame 512 is covered by a covering portion 371.

Physical quantity detecting device

A decrease in the accuracy after switching of the heating state can be reduced. The physical quantity detecting device includes: a flow rate detecting unit configured to include a heating element to measure a flow rate of a fluid to be measured; a heating element control unit configured to switch a control state of the heating element to any one of a heating state and a heating suppression state; and a signal processing unit configured to process a measured value of the flow rate detecting unit. When the heating element control unit switches the control state, the signal processing unit processes an estimated value determined based on a measured value of the flow rate detecting unit before the switching for a predetermined period immediately after the switching.

System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller

A mass flow controller includes at least one conduit having a fluid inlet and a fluid outlet, the conduit defining a flow path along which the fluid flows. The mass flow controller also includes a modified inlet block having an inlet aperture, an inlet channel, and a reservoir fluidly coupled to the inlet channel and the conduit that enhances flow through the controller and improves rate-of-decay measurements. The mass flow controller includes at least one flow sensor that generates a flow sensor signal that is proportional to the mass flow rate of the fluid through the conduit. The mass flow controller includes a control subsystem coupled to a flow sensor and a valve assembly to control flow through the conduit.

Thermal flow meter with temperature detection element positioned on protrusion of circuit package

In order to provide a thermal flow meter for improving workability of a flow rate measurement device having a temperature measurement function for the measurement target gas and measurement accuracy for measuring a temperature, the thermal flow meter is structured such that a flow rate measurement circuit package having a protrusion for measuring a gas temperature is formed through resin molding. An inlet port opened to the upstream side of the measurement target gas is formed, a protrusion is arranged inside the inlet port, an inlet port and an outlet port are formed in the front and rear covers along the protrusion, and the measurement target gas received from the inlet port flows along the protrusion. Since the measurement target gas subjected to the measurement flows along the protrusion, it is possible to reduce influence of the heat from other heat resources and improve measurement accuracy.

Non-invasive process fluid flow indication using temperature difference
11248940 · 2022-02-15 · ·

A process fluid flow system includes a first pipe skin sensor and a second pipe skin sensor. The first pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a first location on the process fluid conduit. The second pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a second location on the process fluid conduit. Measurement circuitry is coupled to the first and second pipe skin sensors. A controller is coupled to the measurement circuitry and is configured to identify a process fluid flow condition based on signals from the first and second pipe skin sensors and to output an indication of the process fluid flow condition.

Physical quantity detecting device

It is possible to suppress overcorrection. A physical quantity detecting device includes: a physical quantity detecting sensor that detects a physical quantity of a measurement target fluid and outputs a detection signal; a compensation amount calculation unit that calculates, by using the detection signal, a lead compensation amount used in lead compensation for the detection signal; and a gain control unit that adjusts the lead compensation amount based on a deviation that is an amount of change in lead compensation amount over time.

Thermal mass flow sensor with improved accuracy
11209298 · 2021-12-28 · ·

Mass flow controllers and methods for controlling mass flow controllers are disclosed. A method includes providing a gas through a thermal mass flow sensor of the mass flow controller and processing a flow sensor signal from the thermal mass flow sensor of the mass flow controller to produce a measured flow signal. The measured flow signal is corrected to produce a corrected flow signal by gradually changing non-linearity correction to the measured flow signal when a flow rate of the gas changes. A valve of the mass flow controller is controlled using the corrected flow signal and a setpoint signal.