To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.

To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid passing through the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.

The present invention provides a new and unique apparatus featuring a signal processor or processing module configured to: receive signaling containing information about a fluid flow passing through a pipe that is channelized causing flow variations in the fluid flow; and determine corresponding signaling containing information about a fluid flow characteristic of the fluid flow that depends on the flow variations caused in the fluid flow channelized, based upon the signaling received. The signal processor or processing module may be configured to provide the corresponding signaling, including where the corresponding signaling contains information about the fluid flow characteristic of the fluid flow channelized.

A flow sensor for use downstream from a particulate media dispensing device is provided having an inlet to receive particulate media and an outlet to dispense the media. The flow sensor has an inlet portion with a funnel to direct particulate media towards a central axis. An axially mounted flow director is located downstream from the funnel to direct the media outwards towards a sensor portion. A capacitive sensor located in the sensor portion surrounds the flow director to create an annular flow path to measure the amount of media that passes through sensor rings in the sensor.

The present invention provides a new and unique apparatus featuring a signal processor or processing module configured to: receive signaling containing information about a fluid flow passing through a pipe that is channelized causing flow variations in the fluid flow; and determine corresponding signaling containing information about a fluid flow characteristic of the fluid flow that depends on the flow variations caused in the fluid flow channelized, based upon the signaling received. The signal processor or processing module may be configured to provide the corresponding signaling, including where the corresponding signaling contains information about the fluid flow characteristic of the fluid flow channelized.