A spectrometer including at least one light-coupling element, a variable entrance slit, a dispersive element, a detector element and a control and evaluation unit. The object of providing a spectrometer having improved measuring characteristics is achieved in that the variable entrance slit is implemented by a first spatial modulation element including a plurality of pixels, wherein the individual pixels can be arranged independently of one another by the control and evaluation unit, wherein the individual pixels are arranged in order to implement the entrance slit during operation in such a manner that at least part of the light incident from the light-coupling element is passed on to the dispersive element.

A spectrometer system comprises a housing provided with a window, an illumination source, a spectrometer and a standard for internal recalibration being disposed in said housing. Specific absorption bands of a filling gas present in the housing are identified in a reference spectrum, which was recorded using the standard, wherein a wavelength characterizing the relevant identified specific absorption band is measured in each case such that measured values are obtained for the wavelengths of the absorption bands. A test spectrum is recorded by the spectrometer using the standard. The specific absorption bands of the filling gas are identified in the test spectrum, wherein a wavelength characterizing the relevant identified specific absorption band is measured in each case such that measured values are obtained for the wavelengths of the specific absorption bands.

An optical modulation micro-nano structure, a micro-integrated spectrometer and a spectrum modulation method are provided. The optical modulation micro-nano structure includes an optical modulation layer located on a photoelectric detection layer that can modulate incident light to form differential responses on the photoelectric detection layer, so as to obtain an original spectrum by reconstruction, thereby overcoming the defects that the existing spectrometers rely too much on precise optical components, which makes spectrometers bulky, heavy and expensive. The optical modulation layer includes a base plate and at least one modulation unit; the base plate is provided on the photoelectric detection layer, and each of the modulation units is located on the base plate; each modulation unit is provided with several modulation holes penetrating into the base plate, and respective modulation holes inside a same modulation unit are arranged into a two-dimensional graphic structure with a specific pattern.

One embodiment of a method for restricting laser beams entering an aperture to a chosen dyad and measuring their separation. The method works with frequency-modulated coherent light, and one embodiment uses a moveable, variable-aperture apparatus (FIG. 1) in conjunction with a converging lens (6) and a detector (7). Key elements of other embodiments are described.

An apparatus includes a substrate transmissive of electromagnetic energy of at least a plurality of wavelengths, having a first end, a second end, a first major face, a second major face, at least one edge, a length, a width, and a thickness, at least a first output optic that outputs electromagnetic energy the substrate; and a first input optic oriented and positioned to provide electromagnetic energy into the substrate via at least one of the first or the second major face of the substrate. The first output optic is laterally spaced from the first input optic. A number of reflectors and optional absorbers may be positioned proximate the first major face and/or the second major face to structure electromagnetic energy and/or to translate such from the first input optic to the first output optic. The apparatus may be part of a spectrometer or other optical system.

A plasma processing apparatus is provided. A plasma processing apparatus includes a chamber, in which a plasma process is performed, a chuck disposed inside the chamber and provided with a wafer, a gas feeder disposed on the chuck and for providing process gas to the inside of the chamber, an OES port extending in a vertical direction along a sidewall of the chamber, and for receiving each of a first light emitted from plasma at a first position and a second light emitted from plasma at a second position closer to the gas feeder than the first position, an OES sensor for sensing the first light to measure first plasma data, and sensing the second light to measure second plasma data, and a control unit for controlling the plasma process using the first and second plasma data.

A differential interference imaging system capable of rapidly changing shear direction and amount includes: a light source (101), a filter (102), a polarizer (103), a sample stage (104), an infinite imaging microobjective (105), a tube lens (106), a shear component, an analyzer (113), and an image sensor (114). After the light intensity and a polarization direction is adjusted, the linearly polarized light passes through a transparent sample, to be collected by the infinite imaging microobjective (105) and to implement imaging through the tube lens (106). An imaging beam is divided into two linearly polarized light fields which are perpendicular to each other in the polarization directions and have tiny shear amount, then they are further combined into an interference light filed by the analyzer (103) to form a differential interference image in the image sensor (114). The system may be flexibly assembled, is simple in structure and easy to implement.

A spectroscopic device includes a first optical element for wavelength-dispersing the light, a second optical element for converging the light which has been wavelength-dispersed, a light deflector for changing a trajectory of the converged light, the light deflector being of a transmission type and having an electro-optical effect, a drive power supply that applies a voltage to the light deflector, light receiver that detects at a predetermined position the light of which the trajectory has been changed, and a process unit that derives the wavelength of the detected light from the voltage.

A system for performing spectroscopy on a target is provided. In some aspects, the system includes an optical assembly that includes an optical source configured to generate light at one or more frequencies to be directed to a target. The optical assembly also includes at least one optical filter configured to select desired light signals coming from the target, wherein the at least one optical filter comprises an etalon and at least one reflecting surface external to the etalon, the at least one reflecting surface being configured to redirect to the etalon, at least once, an incident beam reflected from the etalon.

A color measurement apparatus includes an incident light processing portion that processes light incident through the opening portion, a light emission portion that emits light toward the measurement target, a first circuit substrate in which the incident light processing portion is disposed, a second circuit substrate in which the light emission portion is disposed, and a frame assembly that is formed of a metal material, and in which the first circuit substrate and the second circuit substrate are disposed, in which the frame assembly includes a main frame that forms a base of the apparatus, a first subframe that holds the first circuit substrate, and a second subframe that holds the second circuit substrate, and the first subframe and the second subframe are in direct or indirect contact with the main frame.