A spectrally-resolved Raman water lidar, including: a transmitter unit, a receiver unit, and a data acquisition and control unit. The transmitter unit includes a seeder, a solid Neodymium-doped Yttrium Aluminum Garnet (Nd: YAG) laser, a beam expander, and a first reflecting mirror to emit a 354.8-nm laser beam. The receiver unit includes a telescope, an iris, a collimator, a second reflecting mirror, a first bandpass filter, a beam splitter, a narrow-band interference filter, a third lens, a first detector, a second bandpass filter, a coupler and a home-made dual-grating polychromator to enable simultaneous profiling of backscattered Raman spectrum signals from water vapor, water droplets and ice crystals as well as aerosol fluorescence in the atmosphere. The data acquisition and control unit includes a computer to store the acquired data and guarantee an automatic operation of the lidar system through a time-sequence circuit.

The present disclosure provides an optical imaging system that defines an optical path. In an aspect, the optical imaging system includes a first optical sub-system configured to substantially image, at a focus plane, electromagnetic radiation emanating from an object plane, a slit element at the focus plane to extract a line image from the electromagnetic radiation, a second optical sub-system configured to collimate, at a center plane, the electromagnetic radiation from the slit element, a dispersive element at the center plane with variable dispersive properties, a third optical sub-system configured to image the collimated electromagnetic radiation from the center plane to an image plane, and a detecting element at the image plane. In one example, the slit element is mechanically movable into and out of the optical path.

A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.

A non-relayed reflective triplet and a double-pass imaging spectrometer including the reflective triplet configured as its objective. In one example the reflective triplet includes a primary mirror that receives and reflects electromagnetic radiation from a viewed scene and defines an optical axis of the optical system, a secondary mirror that receives and reflects the electromagnetic radiation reflected from the primary mirror, and a tertiary mirror that receives the electromagnetic radiation reflected from the secondary mirror and focuses the electromagnetic radiation onto an image plane to form an image of the viewed scene. The primary, secondary, and tertiary mirrors together are configured to form a virtual exit pupil for the optical system, the image plane being located between the tertiary mirror and the virtual exit pupil. The reflective triplet is on-axis in aperture and off-axis in field of view.

This invention relates to a light delivery and collection device for performing spectroscopic analysis of a subject. The light delivery and collection device comprises a reflective cavity with two apertures. The first aperture receives excitation light which then diverges and projects onto the second aperture. The second aperture is applied to the subject such that the reflective cavity substantially forms an enclosure covering an area of the subject. The excitation light interacts with the covered area of the subject to produce inelastic scattering and/or fluorescence emission from the subject. The reflective cavity reflects the excitation light as well as the inelastic scattering and/or fluorescence emission that is reflected and/or back-scattered from the subject and redirects it towards the subject. This causes more excitation light to penetrate into the subject hence enabling sub-surface measurement and also improves the collection efficiency of the inelastic scattering or fluorescence emission. The shape of the reflective cavity is optimized to further improve the collection efficiency.

The present invention is directed to an assembly for use in detecting an analyte in a sample based on thin-film spectral interference. The assembly includes a light source to emit light signals; a light detector to detect light signals; a coupler to optically couple the light source and the light detector to a waveguide tip; a monolithic substrate having a coupling side and a sensing side; and a lens between the waveguide tip and the monolithic substrate. The lens relays optical signals between the waveguide tip and the monolithic substrate.

To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member. The optical member includes a first diffraction lens configured to diffract the detection light and a first refraction lens configured to refract the detection light. The first refraction lens is disposed with a non-diffraction surface exposed from the head housing.

Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

Reflective imager sub-systems that have a non-circular entrance pupil and provide substantially increased throughput to a detecting component of a system are disclosed.

A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.