An embodiment of electron microscope system is described that comprises an electron column pole piece and a light guide assembly operatively coupled together. The light guide assembly also includes one or more detectors, and a mirror with a pressure limiting aperture through which an electron beam from an electron source passes. The mirror is also configured to reflect light, as well as to collect back scattered electrons and secondary electrons.

A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.

The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.

A scanning microscope includes a scanning unit that causes irradiation light emitted by a light source to scan a sample, an optical system that guides the emitted light that has passed through the scanning unit to the sample, an isolation unit that includes a transmissive portion that enables the irradiation light to pass the transmissive portion and a reflective portion that reflects at least some of light that is included in emitted light generated from the sample as a result of the irradiation light being radiated to the sample and that has passed through the optical system and the scanning unit, and a detection unit that detects the emitted light that has passed through the isolation unit. The isolation unit is disposed in an optical path of the irradiation light between the light source and the scanning unit.

Specialized linkage assemblies for Laser-Induced Breakdown Spectroscopy (LIBS) systems are provided. The linkage assemblies may facilitate the attachment of the laser housing of the LIBS system onto an existing sample supply chamber, such as a volumetric or gravimetric feeder. Generally, the linkage assemblies may comprise a specialized purge head and inert gas assembly that facilitate the attachment of the laser housing and may enhance the functionality of the LIBS system.

A leaky waveguide includes a waveguide configured to propagate light; a defect structure provided on a portion of the waveguide and configured to cause the light propagating in the waveguide to leak outside of the waveguide; and a plurality of detectors provided at predetermined positions adjacent to the defect structure and configured to detect the light leaking from the defect structure. Accordingly, a spectroscope including the leaky waveguide may have a reduced size.

A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

In accordance with an example embodiment of the invention, a detector assembly for an analyzer device for analysis of elemental composition of a sample using optical emission spectroscopy is provided. The detector assembly comprises an exciter for generating an excitation focused at a target position to invoke an optical emission from a surface of the sample at the target position; and a light collection arrangement for transferring the optical emission to a spectrometer. The light collection arrangement comprises a concave spherical mirror, an optical receiver arranged in an image point in the principal axis of the concave spherical mirror and a folding mirror including at least one aperture. The exciter is arranged with respect to the light collection arrangement such that the excitation is transferred towards the target position through said at least one aperture, and the folding mirror is arranged between the concave spherical mirror and the optical receiver such that the folding mirror folds the principal axis of the concave spherical mirror towards the target position and such that said at least one aperture is aligned with the principal axis of the concave spherical mirror to allow transferring optical emission reflected from the concave spherical mirror therethrough towards the optical receiver.

An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.

A method for determining surface characteristics of an intraoral structure may include illuminating an intraoral structure with light of a first light source passing through focusing optics and capturing depth image data during the illumination with the first light source of light from the intraoral structure passing through the focusing optics. The method may also include illuminating the intraoral structure with a second light source and capturing two-dimensional image data during the illumination with the second light source. Depth data of the intraoral structure may be generated using the depth image data and the two-dimensional image data may be mapped to the depth data.