An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.

The present invention discloses a multichannel broadband high-resolution spectrograph, comprising a plurality of light source incident slits, a multichannel integrated grating, a multichannel shared two-dimensional focus imaging mirror and a two-dimensional area array detector which are sequentially disposed along a light source incident or reflection line, wherein the multichannel integrated grating consists of a plurality of sub-gratings, incident light enters the corresponding integrated gratings along the light source incident slits and then is focused by the shared two-dimensional focus imaging mirror after diffraction of the integrated grating, and diffraction light in a full-spectrum region is incident onto a focal plane of the two-dimensional area array detector for detection. No any mechanical displacement part is disposed, multichannel, full-spectrum and high-speed detection and analysis is achieved, and the present disclosure has high spectrum resolution and working reliability.

A transmissive sampling module is provided, which is adapted to a spectrometer main body. The transmissive sampling module includes a light source assembly and a support base. The light source assembly is directly connected to the support base. The support base includes a tube body and at least one fixing member. The tube body surrounds an accommodating groove, and an extending direction of the tube body is not parallel to an optical path of the light source assembly, and the tube body includes a transparent portion, and the optical path of the light source assembly passes through the transparent portion and the accommodating groove. The at least one fixing member is disposed on the tube body and is adjustably protruded out of an inner surface of the tube body. A transmissive spectrometer is also provided.

The invention relates to a compact wideband vacuum ultraviolet (VUV) and soft X-ray grazing incidence spectrometer based on a plane amplitude diffraction grating. The spectrometer enables simultaneous detection of a VUV spectrum in a positive first order of diffraction and a negative first order of diffraction. The technical result of the invention is that of recording a spectrum in a wide spectral range (3-200 nm) with a moderate spectral resolution (/15-30) and with a significantly higher spectral resolution (/100-200) in a narrow soft X-ray or extreme ultraviolet range with the possibility of measuring the absolute radiation output in these regions of the spectrum.

A slit slider assembly for providing a plurality of slits. The slit slider assembly includes: a holder including a first channel and a pair of set screws that each has a ball partially extruding into the first channel; and a slit carrier assembly configured to be slidably disposed in the first channel and carry a slit mask that includes a plurality of slits, the slit carrier assembly including a plurality of dimples for receiving a portion of the ball. When the balls of the pair of set screws engage two dimples of the plurality of the dimples, the holder is configured to pass light through one of the plurality of slits that corresponds to the two dimples.

The invention relates to a compact wideband vacuum ultraviolet (VUV) and soft X-ray grazing incidence spectrometer based on a plane amplitude diffraction grating. The spectrometer enables simultaneous detection of a VUV spectrum in a positive first order of diffraction and a negative first order of diffraction. The technical result of the invention is that of recording a spectrum in a wide spectral range (3-200 nm) with a moderate spectral resolution (/15-30) and with a significantly higher spectral resolution (/100-200) in a narrow soft X-ray or extreme ultraviolet range with the possibility of measuring the absolute radiation output in these regions of the spectrum.

Disclosed herein are spectral imaging systems having an internally folded prism, which can have four different refracting surfaces. A first angle defines the spatial relationship between the first and second refracting surfaces. The first angle can have a range between 45-95 degrees. In some embodiments, the first angle can be 70 degrees. The spatial relationship of the third and fourth refracting surfaces can be defined by a second angle, which can be the same as the first angle. Finally, the spatial relationship of the second and third refracting surfaces can be defined by a third angle, which can have a range between 90-145 degrees. The prism index of refraction, the first, second, and third angles are selected such that TIR is achieved at two of the refracting surfaces. Additionally, these prism parameters are selected such that a 180 degrees fold of the optical path is achieved entirely within the prism.

An optical system includes a spectrograph having a concave diffraction grating and a detector. An aperture is selectively positioned by an associated actuator or positioning mechanism either into, or out of, an optical path of the input light beam downstream of a sample and prior to entering the spectrograph. A slit plate having a plurality of different size entrance slits is positioned downstream of the aperture and movable by an associated actuator or positioning mechanism to position one of the plurality of entrance slits in the optical path of the input light beam. A controller coupled to the detector and the actuators is configured to control the actuators to selectively position the aperture and the slit plate to provide a selectable resolution of the spectrograph. The aperture setting and slit plate setting may be determined from a lookup table in response to a request for finer or coarser spectral resolution.

An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.

An optical module includes a micro spectrometer. The micro spectrometer includes an optical crystal, a lens, and a photosensitive assembly. The optical crystal is configured to receive detection light and covert the detection light into interference light. The optical crystal is surrounded by a sleeve, the sleeve configured to fix a position of the optical crystal. The lens is configured for receiving the interference light and focusing the interference light. The photosensitive assembly is configured for imaging the interference light into an interference image. The optical module further comprises a controller. The controller is electrically connected to the photosensitive assembly, and the controller is used to convert the interference image into light wavelength signals and light intensity signals.