Systems and methods for measuring a fundamental mode vibrational spectrum of materials and substances in the Mid-IR spectral range of 2.5 m to 14 m wavelength. are disclosed herein. In one embodiment, a Mid-infrared absorption spectrometer (MIRAS) system includes an infrared Micro-Electro-Mechanical System (MEMS) single element emitter light source. The light source is electrically pulsed and emits electromagnetic radiation in the wavelength range from 2.5 m to 14 m and has an integral energy concentrating optic to provide energy for a spectral absorption process. The system includes a scanning high-efficiency infrared spectral grating with self-calibrating feature, configured so that incident energy having absorption information for the spectral absorption process of a sample is within a predefined threshold of a grating blaze angle. The system also includes a single-element thermal detector to receive output energy having the absorption information from the infrared spectral grating.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

The invention relates to an optical arrangement, particularly for the detection beam path of a multi-spot scanning microscope, comprising a detection plane, in which a detector is positionable, comprising a dispersive device for spectrally splitting detection light. According to the invention, the optical arrangement is characterized in that a distorting optical unit is present for guiding the detection light into the detection plane, said distorting optical unit being arranged downstream of the dispersive device and upstream of a detection plane, and in that a rotating device is present for the relative rotation of a luminous field of the spectrally separated detection light and the distorting optical unit. The invention additionally relates to a multi-spot scanning microscope and a method for operating a microscope.

A spectral imaging system includes an autocorrelator to generate different autocorrelations when the moving reflector in the autocorrelator is at different positions so as to reconstruct spectral images. The system also includes a position measurement system to measure the actual positions of the moving reflector when autocorrelations are taken. These actual locations, instead of the desired locations in conventional methods, are then used to reconstruct the spectral image. This approach can address the misalignment of the moving reflector from its desired location (due to external disturbances, slow actuator dynamics, and other factors) in conventional spectral imaging techniques and allow the development of high-resolution, high-stability, portable imaging spectrometers for the general public.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.

The present invention provides a wide-filed spectral imaging system including a laser generator, a wavelength adjustment module, an objective lens, and a single-pixel imaging and a spectral separating module. The laser generator is configured to generate a laser excitation beam. The wavelength adjustment module is configured to disperse the laser excitation beam into a plurality of beams of different wavelengths. The objective lens is configured to focus the plurality of beams of different wavelengths on a sample to excite molecules under test in the sample and generate an emission light. The single-pixel imaging and spectral separating module is configured to generate a series of patterns and modulate the emission light with the series of patterns to generate a diffracted beam. The single-pixel imaging and spectral separating module further disperses the wavelength of the diffracted beam, collects light signals of the expanded diffracted beam, and performs a spectral image reconstruction.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

A spectral imaging system includes an autocorrelator to generate different autocorrelations when the moving reflector in the autocorrelator is at different positions so as to reconstruct spectral images. The system also includes a position measurement system to measure the actual positions of the moving reflector when autocorrelations are taken. These actual locations, instead of the desired locations in conventional methods, are then used to reconstruct the spectral image. This approach can address the misalignment of the moving reflector from its desired location (due to external disturbances, slow actuator dynamics, and other factors) in conventional spectral imaging techniques and allow the development of high-resolution, high-stability, portable imaging spectrometers for the general public.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.