A MEMS device according to an example embodiment of the present disclosure includes: a lower substrate; an infrared sensor formed on the lower substrate; and a lower bonding pad disposed to cover the infrared sensor. The infrared sensor includes: a metal pad formed on an upper surface of the lower substrate and electrically connected to a detection circuit; a reflective layer formed on the upper surface of the lower substrate and reflecting an infrared band; an absorption plate disposed to be spaced apart from an upper portion of the reflective layer and absorbing infrared rays to change resistance; and an anchor formed on the metal pad to support the absorption plate and to electrically connect the metal pad and the absorption plate to each other. The reflective layer has a curved or stepped shape such that a distance between the reflective layer and the absorption plate varies depending on a position of the reflective layer.

A MEMS device according to an example embodiment of the present disclosure includes: a lower substrate; an infrared sensor formed on the lower substrate; and a lower bonding pad disposed to cover the infrared sensor. The infrared sensor includes: a metal pad formed on an upper surface of the lower substrate and electrically connected to a detection circuit; a reflective layer formed on the upper surface of the lower substrate and reflecting an infrared band; an absorption plate disposed to be spaced apart from an upper portion of the reflective layer and absorbing infrared rays to change resistance; and an anchor formed on the metal pad to support the absorption plate and to electrically connect the metal pad and the absorption plate to each other. The reflective layer has a curved or stepped shape such that a distance between the reflective layer and the absorption plate varies depending on a position of the reflective layer.

Embodiments of the present disclosure generally relate to apparatus for processing a substrate, and more specifically to reflector plates for rapid thermal processing. In an embodiment, a reflector plate assembly for processing a substrate is provided. The reflector plate assembly includes a reflector plate body, a plurality of sub-reflector plates disposed within the reflector plate body, and a plurality of pyrometers. A pyrometer of the plurality of pyrometers is coupled to an opening formed in a sub-reflector plate. Chambers including a reflector plate assembly are also described herein.

An image sensor includes on a support a plurality of first pixels and a plurality of second pixels intended to detect an infrared radiation emitted by an element of a scene. Each of the pixels includes a bolometric membrane suspended above a reflector covering the support, wherein the reflector of each of the first pixels is covered with a first dielectric layer, and the reflector of each of the second pixels is covered with a second dielectric layer differing from the first dielectric layer by its optical properties.

An image sensor includes on a support a plurality of first pixels and a plurality of second pixels intended to detect an infrared radiation emitted by an element of a scene. Each of the pixels includes a bolometric membrane suspended above a reflector covering the support, wherein the reflector of each of the first pixels is covered with a first dielectric layer, and the reflector of each of the second pixels is covered with a second dielectric layer differing from the first dielectric layer by its optical properties.

A geometric and radiometric calibration and test apparatus for electro-optical thermal-IR (8-12 micron) instruments and designed to simulate angularly-extending thermal-IR sources with different geometries and with thermal-IR emissions containing hot-cold transitions. The apparatus comprises an IR collimator having an optical axis and a focal plane; a thermal-IR source movable relative to the collimator to be controllably arrangeable and displaceable in the focal plane of the collimator, and operable to radiate thermal-IR radiations towards the collimator; and a kit of masks interchangeably arrangeable in front of the thermal-IR source and having geometric and radiometric properties to cause the thermal-IR radiation reproduced on the electro-optical instrument to be calibrated or tested to contain different hot-cold transitions.

Provided is a method of calibrating a microwave radiometer, which eliminates use of liquid nitrogen as a calibration source. The method is applied to a microwave radiometer configured to receive, by a receiver having a primary radiator connected thereto, a radio wave emitted from an object to be measured depending on a temperature of the object to be measured and to measure a brightness temperature of the object to be measured from an output signal of the receiver. In the method, the method a noise temperature T.sub.rx of the receiver appearing on an output side of the receiver is calibrated by observing a plurality of calibration sources having known brightness temperatures. The method includes using a radio wave reflector configured to totally reflect noise radiated from an input side of the receiver as one of the plurality of calibration sources.

Disclosed herein are MEMS devices and systems and methods of manufacturing or operating the MEMS devices and systems. In some embodiments, the MEMS devices and systems are used in imaging applications.

Apparatus and methods are described for use with feces of a subject that are disposed within a toilet bowl, and an output device. One or more light sensors are configured to receive light from the toilet bowl, while the feces are disposed within the toilet bowl. A computer processor analyzes the received light, and, in response thereto, detects a currently-occurring inflammatory bowel disease episode, and/or a predicted upcoming inflammatory bowel disease episode. The computer processor generates an output on the output device, at least partially in response thereto. Other applications are also described.

Apparatus and methods are described for use with feces of a subject that are disposed within a toilet bowl, and an output device. One or more light sensors are configured to receive light from the toilet bowl, while the feces are disposed within the toilet bowl. A computer processor analyzes the received light, and, in response thereto, detects a currently-occurring inflammatory bowel disease episode, and/or a predicted upcoming inflammatory bowel disease episode. The computer processor generates an output on the output device, at least partially in response thereto. Other applications are also described.