A security sensor device includes: a plurality of sensor units each of which includes an infrared ray detection element having a visual field in a predetermined target direction, the plurality of sensor units aligned in a predetermined arrangement direction; a plurality of optical systems through which detection rays transmit from a corresponding detection area to each infrared ray detection element, the plurality of optical systems aligned in the predetermined arrangement direction; a target object detection circuit into which an output signal is input from each infrared ray detection element; and a switching unit which is configured to change a configuration between each of the plurality of sensor units and the plurality of optical systems according to a user operation, so that two detections of low-place mounting detection and high-place mounting detection are respectively performed.

A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.

Methods and apparatus for a sensor system having a structure having a reflective surface, wherein the structure is rotatable about a longitudinal axis. Channels provide respective paths from an entry into the channels to the reflective surface. A shroud selectively block ones of the channels to provide an operational configuration and a calibration configuration.

An apparatus includes an optical detector configured to detect at least a portion of incoming radiation. The apparatus also includes an optical component configured to provide at least the portion of the incoming radiation to the optical detector. The apparatus further includes at least one flexure that mounts the optical component to the optical detector. Each flexure is configured to deform in response to expansion or contraction of at least one of the optical component and the optical detector. Each flexure may include a side surface that is flexible in a first dimension and rigid in second and third dimensions, where the dimensions are orthogonal to each other. The optical component may include at least one of a filter, a lens, a polarizer, an aperture, and a cover.

A cap for a thermometer having a probe configured to be placed in contact with a patients body or to be inserted into a body cavity of the patient and a temperature sensor includes a cap housing, a proximity sensor and a proximity sensor electrical conductor. The cap housing is configured to selectively connect with and to be selectively detached from the thermometer and at least partially surround the probe of the thermometer when connected with the thermometer. The proximity sensor is connected with the cap. The proximity sensor electrical conductor is connected with the cap and electrically connected with the proximity sensor. A thermometer including the cap is also provided.

Systems, methods, and devices for thermal detection. A thermal detection device includes a visual sensor, a thermal sensor (e.g., a thermopile array), a controller, a user interface, a display, and a removable and rechargeable battery pack. The thermal detection device also includes a plurality of additional software and hardware modules configured to perform or execute various functions and operations of the thermal detection device. An output from the visual sensor and an output from the thermal sensor are combined by the controller or the plurality of additional modules to generate a combined image for display on the display.

Systems, methods, and devices for thermal detection. A thermal detection device includes a visual sensor, a thermal sensor (e.g., a thermopile array), a controller, a user interface, a display, and a removable and rechargeable battery pack. The thermal detection device also includes a plurality of additional software and hardware modules configured to perform or execute various functions and operations of the thermal detection device. An output from the visual sensor and an output from the thermal sensor are combined by the controller or the plurality of additional modules to generate a combined image for display on the display.

A wafer-level integrated thermal detector comprises a first wafer and a second wafer (W1, W2) bonded together. The first wafer (W1) includes a dielectric or semiconducting substrate (100), a dielectric sacrificial layer (102) deposited on the substrate, a support layer (104) deposited on the sacrificial layer or the substrate, a suspended active element (108) provided within an opening (106) in the support layer, a first vacuum-sealed cavity (110) and a second vacuum-sealed cavity (106) on opposite sides of the suspended active element. The first vacuum-sealed cavity (110) extends into the sacrificial layer (102) at the location of the suspended active element (108). The second vacuum-sealed cavity (106) comprises the opening of the support layer (104) closed by the bonded second wafer. The thermal detector further comprises front optics (120) for entrance of radiation from outside into one of the first and second vacuum-sealed cavities, aback reflector (112) arranged to reflect radiation back into the other one of the first and second vacuum-sealed cavities, and electrical connections (114) for connecting the suspended active element to a readout circuit (118).

Methods and apparatus for a sensor system having a structure having a reflective surface, wherein the structure is rotatable about a longitudinal axis. Channels provide respective paths from an entry into the channels to the reflective surface. A shroud selectively block ones of the channels to provide an operational configuration and a calibration configuration.

An apparatus includes an optical detector configured to detect at least a portion of incoming radiation. The apparatus also includes an optical component configured to provide at least the portion of the incoming radiation to the optical detector. The apparatus further includes at least one flexure that mounts the optical component to the optical detector. Each flexure is configured to deform in response to expansion or contraction of at least one of the optical component and the optical detector. Each flexure may include a side surface that is flexible in a first dimension and rigid in second and third dimensions, where the dimensions are orthogonal to each other. The optical component may include at least one of a filter, a lens, a polarizer, an aperture, and a cover.