Patent classifications
G01J5/0875
Transmission-Based Temperature Measurement of a Workpiece in a Thermal Processing System
A thermal processing system for performing thermal processing can include a workpiece support plate configured to support a workpiece and heat source(s) configured to heat the workpiece. The thermal processing system can include window(s) having transparent region(s) that are transparent to electromagnetic radiation within a measurement wavelength range and opaque region(s) that are opaque to electromagnetic radiation within a portion of the measurement wavelength range. A temperature measurement system can include a plurality of infrared emitters configured to emit infrared radiation and a plurality of infrared sensors configured to measure infrared radiation within the measurement wavelength range where the transparent region(s) are at least partially within a field of view the infrared sensors. A controller can be configured to perform operations including obtaining transmittance and reflectance measurements associated with the workpiece and determining, based on the measurements, a temperature of the workpiece less than about 600° C.
Sensor light and a system for preventing false triggering of a sensor
The present disclosure provides a sensor light and a system for preventing false triggering of a sensor. The sensor light includes a sensor module, a light emitting module, a power drive circuit, and a shielding component. The sensor module is configured to measure incoming infrared light radiated to the sensor module, and generate a trigger signal when the measured infrared light meets a preset condition. The light emitting module is configured to emit light. The power drive circuit is connected to the sensor module and the light emitting module, and configured to receive the trigger signal from the sensor module, and control the light emitting module to emit light in response to the trigger signal. The shielding component is disposed between the sensor module and the light emitting module, and configured to shield the sensor module from radiation of infrared light generated by the light emitting module.
Image forming apparatus
To provide an image forming apparatus whose detection range of a person by using a pyroelectric sensor is adjustable without adjusting sensitivity of the pyroelectric sensor, an image forming apparatus includes: an image forming apparatus main body; and a pyroelectric sensor that detects presence of a person based on light received from the periphery of the image forming apparatus main body, wherein the pyroelectric sensor is rotatably mounted to the image forming apparatus main body.
LENS
An infrared transmitting lens for mounting in an aperture of a housing containing an apparatus to be subjected to infrared inspection, comprising a grille and an infrared transmitting material. The grille comprises a network of bars with an array of apertures between the bars, the grille providing mechanical protection to the infrared transmitting lens. The infrared transmitting material is positioned, in a combination of: on one, or both sides of the grille, or within the apertures of the grille; and thus enables infrared inspection through the array of apertures of the grille and through the infrared transmitting material. A method of manufacturing an infrared transmitting lens for mounting in an aperture of a housing containing an apparatus to be subjected to infrared inspection.
Thermopile module
An electronic device includes an outer case, a circuit substrate, a thermopile sensor chip, a filter structure, and a waterproof structure. The outer case has an opening. The circuit substrate is disposed inside the outer case. The thermopile sensor chip is disposed on the circuit substrate. The filter structure is disposed above the thermopile sensor chip. The waterproof structure is surroundingly connected between the filter structure and the outer case, wherein the waterproof structure has a through hole for exposing the filter structure and communicated with the opening of the outer case.
METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING NON-CONTACT TEMPERATURE MEASUREMENT
Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.
COVER STRUCTURE, DETECTION DEVICE, AND METHOD FOR MANUFACTURING DETECTION DEVICE
A detection device of the present invention includes a temperature sensor configured to detect a temperature of an eardrum of a human, a supporting member including a columnar portion, to a distal end of which the temperature sensor is attached, a cover that covers the temperature sensor, and a heat shrinkable tube that adheres tightly to a peripheral wall of the cover and a side surface of the columnar portion in a state in which the heat shrinkable tube is shrunk after being heated.
Method and apparatus for processing a substrate using non-contact temperature measurement
Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.
Infrared transparent constructs and methods of making them
Infrared transparent constructs (e.g., infrared transparent windows) may be shaped as a dome (e.g., for an infrared detector system) and/or other desired geometries, such as portions of IR seeker domes. Electrically conductive tracing(s) may be printed in desired shapes and forms, e.g., in the form of EMI shielding, an FSS grid, an anti-static component, electrical connectors, etc., and integrated into the interior of the construct structure. The electrically conductive tracing(s) may be printed between layers of independent infrared transparent window components that are then engaged together to form a window preform. Additionally or alternatively, the electrically conductive tracing(s) may be printed between printed layers of infrared transparent ceramic or plastic material built up to form the window preform. Once formed, the window preform may be sintered, e.g., in an ultrafast high temperature sintering process (and optionally further treated) to produce the final infrared transparent construct.
Infrared transparent constructs and methods of making them
Infrared transparent constructs (e.g., infrared transparent windows) may be shaped as a dome (e.g., for an infrared detector system) and/or other desired geometries, such as portions of IR seeker domes. Electrically conductive tracing(s) may be printed in desired shapes and forms, e.g., in the form of EMI shielding, an FSS grid, an anti-static component, electrical connectors, etc., and integrated into the interior of the construct structure. The electrically conductive tracing(s) may be printed between layers of independent infrared transparent window components that are then engaged together to form a window preform. Additionally or alternatively, the electrically conductive tracing(s) may be printed between printed layers of infrared transparent ceramic or plastic material built up to form the window preform. Once formed, the window preform may be sintered, e.g., in an ultrafast high temperature sintering process (and optionally further treated) to produce the final infrared transparent construct.