An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

A system includes a structure bonding layer and a sensor. The structure bonding layer is disposed on a structure. The structure bonding layer is a metallic alloy. The sensor includes a non-metallic wafer and a sensor bonding layer disposed on a surface of the non-metallic wafer. The sensor bonding layer is a metallic alloy. The sensor bonding layer is coupled to the structure bonding layer via a metallic joint, and the sensor is configured to sense data of the structure through the metallic joint, the structure bonding layer, and the sensor bonding layer.

Provided are an optical sensor device using surface acoustic waves and an optical sensor device package. The optical sensor device includes: a substrate including a first light sensing area and a temperature sensing area and including a piezo electric material; a first input electrode and a first output electrode which are disposed in the first light sensing area and are apart from each other with a first delay gap therebetween; a first sensing film overlapping the first delay gap and configured to cover at least some portions of the first input electrode and the first output electrode; and a second input electrode and a second output electrode which are disposed in the temperature sensing area and are apart from each other with a second delay gap therebetween. The second delay gap is exposed to air.

Embodiments of present disclosure relate to a power cable connector, an electrical system and a method for assembling a power cable connector. The power cable connector comprises a housing comprising a first portion adapted to contain a conductive plug inserted therethrough. The power cable connector also comprises a first layer arranged on at least a part of an inner wall of the housing. The power cable connector further comprises a second layer arranged on the first layer so that the first layer is at least partially located between the inner wall of the housing and the second layer. The power cable connector further comprises a passive wireless measuring apparatus embedded into the second layer, wherein in the case that the conductive plug is inserted into the first portion, a surface of the passive wireless measuring apparatus is coupled to the conductive plug. According to embodiments of the present disclosure, the on-line monitoring of the temperature of the conductive plug can be obtained and the power failure can be detected in advance.

A measurement method performed by a semiconductor manufacturing apparatus including a chamber is provided. In the measurement method, first measurement data including a signal of a resonance frequency of the chamber is acquired as reference data, in response to transmitting an electrical signal into the chamber while a jig capable of performing wireless communication is not placed in the chamber. Subsequently, second measurement data including the signal of the resonance frequency of the chamber and including a signal of a resonance frequency of a sensor installed in the jig is acquired, in response to transmitting an electrical signal into the chamber while the jig is placed in the chamber. By subtracting the reference data from the second measurement data, third measurement data is calculated.

A motor or work machine having a housing part, a stator element, a rotor element with a monitoring device for monitoring a state parameter of the rotor. The monitoring device includes a sensor unit contains a coupling element and a conductor structure, SAW sensor element connecting the aforementioned elements, and a query unit. The query unit preferably operates according to the S-FSCW principle. The unit has a signal generator for generating query signals and a coupling structure. The coupling structure is positioned along an air gap formed between the rotor element and stator element or a section of the housing covered by the coupling element when the rotor element is rotated. The positioning is such that a coupling is enabled between the coupling structure and the coupling element for signal transmission over the air gap. The query unit has an evaluation circuit for evaluating received response signals.

A system for recording a physical property of an item to be cooked or of a cooking process auxiliary means during a cooking process performed by a cooking appliance (10) comprises: a sensor means (20) for sensing the physical property of the item to be cooked or of the cooking process auxiliary means; a first transmission means for wirelessly transmitting a status signal freely through space, which status signal corresponds to the physical property of the item to be cooked or of the cooking process auxiliary means, wherein the first transmission means is connected to the sensor means (20); a first receiving means (22) for receiving the pot status signal transmitted by the first transmission means, the first receiving means (22) being arranged in a separate unit (12), which is independent from the cooking appliance (10); a second transmission means (24) electrically connected to the first receiving means (22), the second transmission means (24) being configured to forward the status signal transmitted by the first transmission means or to transmit a processed signal generated by processing the status signal, wherein the second transmission means (24) is arranged in or at the separate unit (12); anda second receiving means (28, 30) for receiving the processed signal or the status signal transmitted by the second transmission means (24), the second receiving means (28, 30) being arranged in or at the cooking appliance (10) and electrically connected to a control unit of the cooking appliance (10).

An antenna device according to an exemplary embodiment includes a first metal layer, a first dielectric layer, a second metal layer, and a second dielectric layer. The first dielectric layer has a thermal conductivity and heat resistance that are higher than those of an FR-4 resin. The antenna device includes a first metal terminal and a second metal terminal, and a thermosensor. A pair of an input terminal and an output terminal of the thermosensor are electrically connected to the first metal terminal and the second metal terminal, respectively, and the second metal layer includes a first segment and a second segment. The first metal terminal is disposed above the first segment, and the second metal terminal is disposed above the second segment.

A surface elastic wave resonator comprises a piezoelectric material to propagate the surface elastic waves and a transducer inserted between a pair of reflectors comprising combs of interdigitated electrodes and having a number Nc of electrodes connected to a hot spot and an acoustic aperture W wherein the relative permittivity of the piezoelectric material is greater than about 15, a product of Nc.Math.W/fa for the transducer being greater than 100 m.Math.MHz.sup.1, where fa is the antiresonance frequency of the resonator. A circuit comprises a load impedance and a resonator according to the invention and having an electrical response manifesting as a peak in the coefficient of reflection S.sub.11 at a frequency of a minimum value of the parameter S.sub.11 that is lower than 10 dB, the antiresonance peak of the resonator being matched to the impedance of the load.

An energy transmission system comprising a pole, at least one wire, a sensing system coupled to the pole for monitoring pole temperature, dynamic pole loading, external impact on the pole, vibration of the pole, and wires that are downed, at least one line sensor coupled to the wire and at least one powered data integrator. The sensing system comprises at least one dynamic pole loading sensor and a three-dimensional accelerometer. The dynamic pole loading sensor can be coupled to the lower portion of the pole above ground level but not more than 10 feet above ground level. Optionally there are two dynamic pole loading sensors, the first sensor having a longitudinal axis parallel to a longitudinal axis of the pole, and the second sensor having a longitudinal axis perpendicular to the longitudinal axis of the pole.