Patent classifications
G01K11/3213
MEASUREMENT APPARATUS, MEASUREMENT SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND MEASUREMENT METHOD
A measurement apparatus includes: an input part into which a signal according to a state of a measurement target is input; a measurement part configured to measure the state of the measurement target from the signal input to the input part, and generate, when the measurement of the state of the measurement target is completed, a switching instruction signal instructing switching a multiplexer configured to selectively output the signal; and an output part configured to output the switching instruction signal generated by the measurement part.
Calibration System for Fiber Optic Temperature Probe
A temperature sensing system is provided, including an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector is also provided for connecting an optical temperature sensing probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections via the at least two contact points. An extension cable is also provided for connecting an optical temperature sensing probe to a converter, the extension cable comprising a first end and a second end, and at least two electrical conductors extending between the first end and the second end to carry a signal from the probe to the converter via the extension cable.
FLUORESCENCE TIME DECAY SENSING APPARATUS AND METHODS OF MANUFACTURING SAME
A fluorescence sensor for use in phosphor thermometry is provided, the sensor comprising: an optical light guide which includes a distal end; and a sensing element, the sensing element attached to the distal end or located proximate to the distal end and in alignment with the distal end, the sensing element including a polycrystalline nanocomposite which includes at least one host, at least one dopant and at least one filler.
FLUORESCENCE TIME DECAY SENSING APPARATUS AND METHODS OF MANUFACTURING SAME
A fluorescence sensor for use in phosphor thermometry is provided, the sensor comprising: an optical light guide which includes a distal end; and a sensing element, the sensing element attached to the distal end or located proximate to the distal end and in alignment with the distal end, the sensing element including a polycrystalline nanocomposite which includes at least one host, at least one dopant and at least one filler.
OPTOELECTRONIC TRANSDUCER MODULE FOR THERMOGRAPHIC TEMPERATURE MEASUREMENTS
Examples of a optoelectronic transducer module with integrated signal processing for use in thermographic temperature measurement are disclosed. The module includes a light source to provide an excitation light, an optical element to couple the light to an optical port, a connector configured to connect the optoelectronic transducer module to a fiber optic sensor, a detector coupled to the optical port to detect an emitted light from the fiber optic sensor and convert the detected emitted light into an electrical signal, a module processing unit coupled to the light source and the detector configured to convert the electrical signal into a set of digital results, a high speed circuitry in communication with an external processing unit for data aggregation and a low speed circuitry in communication with the external processing unit for configuration and firmware upgrade in the module.
MULTIPOINT SURFACE TEMPERATURE MEASUREMENT SYSTEM AND METHOD THEREOF
Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.
FIBER OPTIC TEMPERATURE PROBE
A fiber optic temperature probe is disclosed. The fiber optic temperature probe includes a probe shaft containing an optical fiber. An optical temperature sensor element is coupled to the probe shaft and configured to be excited by light from the optical fiber and emit light back to the optical fiber. A thermally conductive plate is coupled to the probe shaft and interfaces with the optical temperature sensor element. Baffling extends from the probe shaft and surrounds the edges of the thermally conductive plate.
Optical temperature sensor head, temperature sensor device and electric machine having a temperature sensor head
An optical temperature sensor head having an optical fibre and a sensor material, which is optically connected to a free end of the optical fibre. The free end of the optical fibre has an overmould made of a plastics material, which engages over a free end of the optical fibre and forms a protective body. A transparent window is arranged in the protective body. The window permits an optical connection with the free end of the optical fibre. Luminescence radiation from a sensor material can enter the optical fibre. The protective body has the effect that the temperature sensor head is mechanically stable and is insensitive to environmental influences. A temperature sensor device having such a temperature sensor head. An electric machine having a winding with a winding wire, which is connected to a proposed temperature sensor head.
Optical temperature sensor head, temperature sensor device and electric machine having a temperature sensor head
An optical temperature sensor head having an optical fibre and a sensor material, which is optically connected to a free end of the optical fibre. The free end of the optical fibre has an overmould made of a plastics material, which engages over a free end of the optical fibre and forms a protective body. A transparent window is arranged in the protective body. The window permits an optical connection with the free end of the optical fibre. Luminescence radiation from a sensor material can enter the optical fibre. The protective body has the effect that the temperature sensor head is mechanically stable and is insensitive to environmental influences. A temperature sensor device having such a temperature sensor head. An electric machine having a winding with a winding wire, which is connected to a proposed temperature sensor head.
MULTI-ZONE TEMPERATURE CONTROL DEVICE AND MULTI-ZONE TEMPERATURE CONTROL METHOD
A multi-zone temperature control device and a multi-zone temperature control method are disclosed. The multi-zone temperature control device has multiple thermo-conductive reservoirs for accommodating a specimen, multiple temperature adjustment devices for adjusting temperatures of multiple adjustment blocks, a driving device, and a control device.
The control device executes multiple temperature control procedures at the same time. During the execution of each temperature control procedure, the present disclosure makes the adjustment blocks contact and leave the thermo-conductive reservoirs in the same zone, such that the thermo-conductive reservoirs reach the target temperatures of the temperature control procedure sequentially.