A hermetic terminal (110) includes a barrier wall (12) to be joined to a housing (11), a body (15) that is to be connected to a signal ground and is fixed to the barrier wall (12) via a first insulator (13), and a signal line (16) passing through the body (15) and fixed to the body (15) via a second insulator (14). When the barrier wall (12) is joined to the housing (11), a space (28) is formed between an inner wall of the housing (11) and a surface (31) of the body (15) intersecting an end face (29) of the body (15) positioned towards the inside of the housing (11).

A micromechanical component for a capacitive pressure sensor device, including a diaphragm that is stretched with the aid of a frame structure in such a way that a cantilevered area of the diaphragm spans a framed partial surface, and including a reinforcement structure that is formed at the cantilevered area. A first spatial direction oriented in parallel to the framed partial surface is definable in which the cantilevered area has a minimal extension, and a second spatial direction oriented in parallel to the framed partial surface and oriented perpendicularly with respect to the first spatial direction is definable in which the cantilevered area has a greater extension. The reinforcement structure is present at a first distance from the frame structure in the first spatial direction, and at a second distance in the second spatial direction, the second distance being greater than the first distance.

A flow passage unit is detachably mounted on a pressure detection unit and detects a pressure to be transmitted to a pressure detection part. The flow passage unit includes a flexible flow passage part including a flexible flow passage which introduces liquid, flowing in the flexible flow passage part from an inflow port, to an outflow port, and which is made of a flexible material. The flow passage unit also includes a body portion configured to form a pressure transmitting space which surrounds an outer peripheral surface of the flexible flow passage part. The flow passage unit also includes a pressure transmitting part mounted on the body portion and having a thin-film shape. One surface of the pressure transmitting part faces the pressure transmitting space, and the other surface of the pressure transmitting part is capable of coming into contact with the pressure detection part.

An apparatus for measuring pressure within a fluid path includes a housing defining the structure of the apparatus. The housing includes a fluid path that extends through the housing and allows a fluid to pass through the housing. The apparatus also includes a first volume chamber that is in fluid communication with the fluid path and has a first volume chamber opening, and a second volume chamber with a second volume chamber opening that is less than the first volume chamber opening. A diaphragm separates the first volume chamber from the second volume chamber and fluidly disconnects the second volume chamber from the fluid path. The diaphragm deforms based upon the pressure within the fluid path. The apparatus also includes an interface that is connectable to a pressure sensor, and the second volume chamber is in fluid communication with the interface.

Sensor devices including force sensors and robots incorporating the same are disclosed. In one embodiment, a sensor device includes an inflatable diaphragm operable to be disposed on a member, and an array of force sensors disposed about the inflatable diaphragm, wherein the array of force sensors provides one or more signals indicative of a location of contact between an object and the inflatable diaphragm.

Sensors having a deformable layer and an outer cover layer and robots incorporating the same are disclosed. In one embodiment, a sensor includes an inflatable diaphragm operable to be disposed on a member, wherein the inflatable diaphragm includes a port. The sensor further includes an outer cover layer disposed around the inflatable diaphragm, wherein the outer cover layer is fabricated from a material having a strength of greater than or equal to 35 cN/dtex, and a pressure sensor fluidly coupled to the port and operable to detect a pressure within the inflatable diaphragm.

A pressure sensor and method of manufacturing the like are provided for determining a pressure of a fluid. An example pressure sensor includes a pressure sensor housing sealably attached to a diaphragm at a first end. The header includes a lip configured to engageably fit with the second end of the pressure sensor housing to create a hermetically sealed component compartment. The header also includes header pin(s) configured to transmit electrical signals between an interior and an exterior of the hermetically sealed component compartment. A sensing element and a processor are disposed within the hermetically sealed component compartment and in communication with one another. The sensing element is mounted to the processor within the hermetically sealed compartment. The corresponding method of manufacture is also provided.

An apparatus for measuring pressure within a fluid path includes a housing defining the structure of the apparatus. The housing includes a fluid path that extends through the housing and allows a fluid to pass through the housing. The apparatus also includes a first volume chamber that is in fluid communication with the fluid path and has a first volume chamber opening, and a second volume chamber with a second volume chamber opening that is less than the first volume chamber opening. A diaphragm separates the first volume chamber from the second volume chamber and fluidly disconnects the second volume chamber from the fluid path. The diaphragm deforms based upon the pressure within the fluid path. The apparatus also includes an interface that is connectable to a pressure sensor, and the second volume chamber is in fluid communication with the interface.

Robots and sensor systems having a compliant member for maintaining the position of a sensor are disclosed. In one embodiment, a robot includes a rigid surface, one or more compliant members attached to the rigid surface, and a sensor device. The sensor device includes an inflatable diaphragm operable to be disposed around the one or more compliant members, the inflatable diaphragm having a port, and a pressure sensor fluidly coupled to the port and operable to detect a pressure within the inflatable diaphragm. The one or more compliant members prevent lateral movement and rotational movement of the sensor device.

Pressure sensors and robots incorporating pressure sensors are disclosed. In one embodiment, a pressure sensor device includes a base layer, a deformable layer bonded to the base layer such that the base layer and the deformable layer define at least one inflatable chamber, and at least one pressure sensor fluidly coupled to the at least one inflatable chamber and operable to produce a signal indicative of a pressure within the at least one inflatable chamber.