Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

A method of measuring a pressure of a fluid adjacent a wall of a pipe or vessel. A transducer is attached to the wall of the pipe or vessel. A signal is transmitted by the transducer at a characteristic frequency via a plurality of guided wave modes. The characteristic frequency is a frequency at which the guided wave modes are separated in time from each other when received. The signal is received after the plurality of guided wave modes travel in or through the wall a predetermined number of times. The signal has a signal receipt time after the predetermined number of times. The pressure of the fluid is calculated using the signal receipt time.

An electromechanical pressure sensor includes an electromechanical resonator having a driving electrode, a sensing electrode, and a beam resonator arranged between the driving and sensing electrodes. The beam resonator includes a resonator beam coupled on a first end to a first fixed anchor and coupled on a second end to a fixed second fixed anchor. The electromechanical resonator also includes a first voltage source coupled to the driving electrode and configured to provide an alternating current to the driving electrode and a second voltage source coupled to the first fixed anchor. The second voltage source provides a DC bias to the resonator beam. The electromechanical resonator further includes a third voltage source coupled to the resonator beam via the first and second fixed anchors. The third voltage source is configured to supply a voltage to the resonator beam that results in a temperature differential between the resonator beam and the first and second fixed anchors. The electromechanical resonator also includes a processor coupled to the sensing electrode and configured to correlate a voltage on the sensing electrode with a pressure value.

A mechanical connection is provided for a microelectromechanical and/or nanoelectromechanical device for measuring a variation in pressure. The device includes a fixed component extending in a main plane, a mobile component to move or deform in an out-of-plane direction under effect of a variation in pressure, and a detector of movement or deformation having at least one mobile element. The mechanical connection includes: a lever arm; a first connection connecting the mobile component to a first end of the lever arm, the first connection transmitting out-of-plane movement of the mobile component to the first end of the lever arm while allowing out-of-plane rotation of the lever arm about a direction of rotation; a second connection connected to the second end of the lever arm to allow mainly an out-of-plane rotation of the lever arm about an axis of rotation extending in the direction of rotation; a third connection connecting the lever arm to the detector at a given distance from the axis of rotation in the out-of-plane direction, the third connection being designed to convert the rotation of the lever arm about the axis of rotation into a translation in the plane of the at least one mobile element in a direction of translation.

Measurement of pressure of a fluid in a vessel using a cantilever spring in the vessel; a magnet connected to the cantilever spring in the vessel; an electromagnet outside of the vessel operatively connected to the magnet and the cantilever spring in the vessel, wherein the electromagnet induces movement of the magnet and the cantilever spring in the vessel, and wherein the movement is related to the pressure of the fluid in the vessel; a receiving coil operatively positioned relative to the magnet, wherein movement of the cantilever spring and the magnet in the vessel creates an electromotive response in the coil; and a controller analyzer connected to the receiving coil, wherein the controller analyzer uses the electromotive response in the coil for measuring the pressure of the fluid in the vessel.

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

A method of measuring a pressure of a fluid adjacent a wall of a pipe or vessel. A transducer is attached to the wall of the pipe or vessel. A signal is transmitted by the transducer at a characteristic frequency via a plurality of guided wave modes. The characteristic frequency is a frequency at which the guided wave modes are separated in time from each other when received. The signal is received after the plurality of guided wave modes travel in or through the wall a predetermined number of times. The signal has a signal receipt time after the predetermined number of times. The pressure of the fluid is calculated using the signal receipt time.

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.