A system to determine a temperature corrected pressure of a medium in a pressure transducer is disclosed. The system comprises a first circuitry to obtain a first value related to a vibration frequency of the vibration of a pressure sensitive vibration member; a second circuity to obtain a second value related to a vibration amplitude of the vibration of the vibration member; and a third circuity to use the first value and the second value to determine the temperature corrected pressure of the medium based on a predetermined relationship between the vibration frequency and the vibration amplitude.

A transducer apparatus comprises a deformation body as well as, positioned on the deformation body and connected therewith by material bonding, a radio sensor having a surface facing away from the deformation body. The radio sensor is adapted to receive free-space electromagnetic waves and to convert them into acoustic surface waves propagating along the surface facing away from the deformation body, or to convert acoustic surface waves propagating along the surface into free-space electromagnetic waves. Additionally, the deformation body is adapted as a function of a mechanical force acting thereon, and/or as a function of a temperature change, to be at least partially deformed, in such a manner that at least the surface of the radio sensor facing away from the deformation body experiences a shape change influencing a propagation of acoustic surface waves propagating along the surface. A measuring system formed by means of such a transducer apparatus comprises additionally a measuring electronics electrically coupled with the transducer apparatus and adapted to generate at least one electrical driver signal feeding and/or activating the transducer apparatus and to couple such into the transducer apparatus, and to receive and to evaluate a measurement signal delivered from the transducer apparatus.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

In accordance with one aspect, a device is provided having a transducer comprising a conductor, a diaphragm configured to move relative to the conductor, and a reference volume in communication with the external environment. The diaphragm separates the reference volume and the external environment. The device further includes a controller operably coupled to the transducer and configured to determine an air pressure of an external environment based at least in part on movement of the diaphragm.

An integrated optical transducer for detecting dynamic pressure changes comprises a micro-electro-mechanical system, MEMS, die having a MEMS diaphragm with a first side exposed to the dynamic pressure changes and a second side, and an application-specific integrated circuit, ASIC, die having an optical interferometer assembly. The interferometer assembly comprises a beam splitting element for receiving a source beam from a light source and for splitting the source beam into a probe beam in a first beam path and a reference beam in a second beam path, a beam combining element for combining the probe beam with the reference beam to a superposition beam, and a detector configured to generate an electronic interference signal depending on the superposition beam. The MEMS die is arranged with respect to the ASIC die such that a gap is formed between the second side of the diaphragm and the ASIC die, with the gap defining a cavity and having a gap height. The first beam path of the probe beam comprises coupling into the cavity, reflection off of a deflection point or a deflection surface (16) of the diaphragm and coupling out of the cavity.

There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a non-piezoelectric substrate, the conductor pattern including an interdigital conductor pattern (ICP); and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.

There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP), and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.

The present invention provides a pressure transducer (1) and a method for fabricating a pressure transducer. The pressure transducer is for use in a gas pressure gauge and uses a squeeze-film. The pressure transducer comprises a first wafer (2) and a second wafer (3), wherein—at least the first wafer comprises a device layer (2.1) and a handle layer (2.3); —the second wafer (3) has a top and bottom surface; and wherein—at least the device layer (2.1) of the first wafer (2) is structured. The pressure transducer further comprises a membrane (4.1), a cavity (5) between the membrane (4.1) and the second wafer (3), wherein the cavity (5) has a cavity bottom, an inlet (12) connecting the cavity (5) to a surrounding, a suspension (6) of the membrane (4.1), wherein the suspension (6) allows oscillation of the membrane (4.1), and an oscillation generator to set the membrane (4.1) in oscillation. The pressure transducer is characterized in that the structured device layer (2.1) of the first wafer (2) comprises the membrane (4.1) and suspension (6) of the membrane (4.1), in that the first wafer (2) is bonded to the top surface of the second wafer (3), and in that the handle layer (2.3) of the first wafer (2) is structured to release the suspension (6).

A variable diaphragm and a control method thereof are provided. The variable diaphragm includes: a first substrate and a second substrate opposite to each other; a light detector on a side of the first substrate distal to the second substrate, and configured to detect an intensity of incident light and generate a first signal; an electrowetting microfluid medium layer between the first substrate and the second substrate, and including a transparent fluid medium and an opaque fluid medium immiscible with the transparent fluid medium, wherein an aperture of the variable diaphragm is formed by the transparent fluid medium, and one of the transparent fluid medium and the opaque fluid medium is a conductive medium; and a driving electrode between the first substrate and the second substrate, and configured to receive a driving voltage corresponding to the first signal and for driving the electrowetting microfluid medium layer, so as to change an area in a direction parallel to the first substrate or the second substrate of a portion of one substrate covered by the opaque fluid medium, the one substrate being one of the first substrate and the second substrate that has a larger contact area with the opaque fluid medium, thereby changing a diameter of the aperture.

In accordance with one aspect, a device is provided having a transducer comprising a conductor, a diaphragm configured to move relative to the conductor, and a reference volume in communication with the external environment. The diaphragm separates the reference volume and the external environment. The device further includes a controller operably coupled to the transducer and configured to determine an air pressure of an external environment based at least in part on movement of the diaphragm.