Systems and methods are disclosed for packaging sensors for use in high temperature environments. In one example implementation, a sensor device includes a header; one or more feedthrough pins extending through the header; and a sensor chip disposed on a support portion of the header. The sensor chip includes one or more contact pads. The sensor device further includes one or more wire bonded interconnections in electrical communication with the respective one or more contact pads and the respective one or more feedthrough pins. The sensor device includes a first sealed enclosure formed by at least a portion of the header. The first sealed enclosure is configured for enclosing and protecting at last the one or more wire bonded interconnections and the one or more contact pads from an external environment.

A pressure element for monitoring a fluid being applied to the pressure element, wherein the pressure element is configured to close an electrical circuit, as a result of a change in pressure which the fluid exerts on the pressure element, independently of an absolute value of the pressure, where the fluid preferably flows through a pipeline.

A method embodiment includes providing a micro-electromechanical (MEMS) wafer including a polysilicon layer having a first and a second portion. A carrier wafer is bonded to a first surface of the MEMS wafer. Bonding the carrier wafer creates a first cavity. A first surface of the first portion of the polysilicon layer is exposed to a pressure level of the first cavity. A cap wafer is bonded to a second surface of the MEMS wafer opposite the first surface of the MEMS wafer. The bonding the cap wafer creates a second cavity comprising the second portion of the polysilicon layer and a third cavity. A second surface of the first portion of the polysilicon layer is exposed to a pressure level of the third cavity. The first cavity or the third cavity is exposed to an ambient environment.

The pressure sensor 10 comprises: a bottomed cylindrical sensor module 11 having inside a pressure receiving chamber C1 communicating with a flow path and including a diaphragm 11a in contact with the pressure receiving chamber; a pressure detecting element 12 for outputting a strain of the diaphragm 11a as a pressure; a base ring 14 fixed at an outer edge of an open-side end part 11c of the sensor module and disposed on an outer peripheral side of the sensor module 11; a hermetic member 13 fixed to the base ring 14 for forming a sealed vacuum chamber C2 opposite to the pressure receiving chamber C1 across the diaphragm 11a; a gasket 18 sandwiched between the base ring 14 and a body 5; and a pressing flange 19 for pressing the base ring 14 to the body 5 through the gasket 18.

The aim of the invention is to economically produce a pressure measuring sensor element, and relates, according to one aspect, to a method for producing a pressure sensor measuring element for a pressure sensor which comprises at least one membrane and a covering protecting the membrane, the pressure sensor element being produced in a layer-by-layer generative production method. This makes it possible to, for example, easily construct a combination sensor for detecting pressure and an additional parameter. It is also possible to structures for reinforcement or for influencing resonant frequency or for influencing heat conduction.

Submersible transducer includes a transducer housing configured to be submerged within an aqueous liquid and a pressure sensor operable to obtain data for determining a pressure of the aqueous liquid. The pressure sensor may be disposed within the transducer housing. The submersible transducer also includes a submersible cable having an electrical conductor and a venting tube operably coupled to the pressure sensor. The pressure sensor uses an atmospheric pressure of an external environment that is detected through the venting tube to determine the pressure of the aqueous liquid. The submersible cable also includes a cable jacket and an inner layer that is surrounded by the cable jacket. The inner layer surrounds the electrical conductor and the venting tube. The inner layer includes a non-hygroscopic polymer that is more resistant to absorbing the aqueous liquid than the cable jacket.

This pressure sensor is equipped with: a housing (10) having a tip tubular portion (11) that lengthens in the direction of an axis (S) and is exposed to a pressure medium; an output measurement unit (20) that includes a piezoelectric member (22) and is housed inside the housing; and a pressure transmission member for occluding the space for storing the output measurement unit in the housing, and transmitting the pressure from the pressure medium imparted in the axial direction to the output measurement unit. The pressure transmission member is a bottomed diaphragm having: an inner tubular portion (32) that is affixed to the tip portion of the tip tubular portion and lengthens in the axial direction toward the output measurement unit inside the tip tubular portion; and a pressure receiving bottom portion (33) that contacts the output measurement unit and is integrally formed with the inner tubular portion.

A progressive stopper for a pressure sensing element is able to redistribute and reduce the stress of a diaphragm exposed to high pressure via multi-step contacts, such as at least dual contacts, where the diaphragm (designed for detecting pressure within a defined pressure range) is enabled to withstand much higher pressures above of the defined pressure range, such that the progressive stopper prevents catastrophic failure of the diaphragm. The progressive stopper is created to redistribute and reduce stress on the diaphragm significantly and effectively. The progressive stopper does not limit the output of the pressure sensing element such that the pressure sensing element is able to maintain the output voltage above the maximum output voltage of the defined pressure range when the diaphragm is exposed to high pressures with reduced stresses and strains.

A pressure-measuring device according to the invention has a hydrophobic membrane, which is air permeable in the dry state and air impermeable in a moistened state, and a pressure sensor, which is in mechanical contact with the hydrophobic membrane and which is designed to follow a movement of the membrane. During the filling of a line system, air is separated via the hydrophobic membrane and, in the air-impermeable state, the pressure in the line system is measured by means of the moistened hydrophobic membrane.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.