A pressure sensor includes a sensor member including a sensor face to which pressure is imparted and a cover member that covers at least part of the peripheral face of the sensor member while exposing the sensor face out of one end side. With such a configuration, the sensor member can be protected from a lateral force (side pressure), whereby the sensor member can be prevented from being broken by the application of the side pressure to the sensor member.

A pressure sensor made of semiconductor material, the sensor comprising a box defining a housing under a secondary vacuum, at least one resonator received in the housing and suspended by flexible beams from at least one elastically deformable diaphragm closing the housing that also contains means for exciting the resonator in order to set the resonator into vibration and detector means for detecting a vibration frequency of the resonator. The detector means comprise at least a first suspended piezoresistive strain gauge having one end secured to one of the beams and one end secured to the diaphragm. The resonator and the first strain gauge are arranged to form zones of doping that are substantially identical in kind and in concentration.

The invention relates to a pressure measuring cell with a base body including an internal space, which base body comprises a first opening. A pressure sensor is arranged in the internal space of the base body and the internal space is filled with a pressure transfer medium. The pressure measuring cell further comprises an uneven membrane made from plastic. The membrane fully covers the first opening of the base body and is metallically coated at least on one of its two sides.

A polymer layer system pressure sensor device includes a first polymer substrate having a first cavity and a first polymer membrane stretched over the first cavity. The first polymer membrane is configured to be deflected dependent on a pressure in the first cavity. The device further includes a first membrane metallization layer applied to the first polymer membrane above the first cavity. The first membrane metallization layer is configured to be deflected together with the first polymer membrane dependent on the pressure in the first cavity. The device further includes a second polymer substrate, arranged over the first polymer membrane, a second cavity, arranged over the first cavity, and a second polymer membrane, stretched over the second cavity. The device further includes a second membrane metallization layer applied to the second polymer membrane within the second cavity and includes a third polymer substrate arranged over the second polymer membrane.

The voltages output from a low-pressure MEMS sensor are increased by increasing the sensitivity of the sensor. Sensitivity is increased by thinning the diaphragm of the low pressure sensor device. Nonlinearity increased by thinning the diaphragm is reduced by simultaneously creating a cross stiffener on the top side of the diaphragm. An over-etch of the top side further increases sensitivity.

A pressure sensor has a circuit arrangement supported by a sensor body and includes: a first electrical-circuit pattern, having respective tracks made of electrically conductive material deposited on a first face of an electrically insulating material, a second electrical-circuit pattern having respective tracks made of electrically conductive material deposited on a region of the second face of the material, and connection means, which electrically connect the first electrical-circuit pattern to the second electrical-circuit pattern. Tracks of the second electrical-circuit pattern have at least one first track defining a plurality of first pads and one second track defining a plurality of second pads, for connection of a first terminal and of a second terminal of the second circuit component, respectively. The first and second track are prearranged so that the first terminal and the second terminal can be connected to any one of the first pads and the second pads.

Disclosed is a pressure gauge comprising a pressure sensor, a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm, the outer side of which can be supplied with pressure and under which a pressure receiving chamber is enclosed, and comprising a hydraulic pressure transmission path connected to the pressure receiving chamber and filled with a pressure transmitting fluid. The diaphragm seal comprises a deflection device actuated by a controller connected to the pressure sensor and/or to a temperature sensor, and which is designed to exert a force on the isolation diaphragm, or on an element connected to the isolation diaphragm, said force deflecting the isolation diaphragm in the direction of its diaphragm bed, at times that are determined by the controller and that are based on a pressure measured continuously by the pressure sensor and/or a temperature measured continuously by the temperature sensor.

A pressure sensor includes a diaphragm on a silicon substrate and a plurality of piezoelectric element areas that change in resistance according the distortion of the diaphragm. The plurality of piezoelectric element areas of the pressure sensor include a first piezoelectric element area, a second piezoelectric element area, a third piezoelectric element area, and a fourth piezoelectric element area. The diaphragm has a maximum deflection area whose stress becomes 80% or more of a maximum stress when distorted by a predetermined pressure. The first piezoelectric element area, the second piezoelectric element area, the third piezoelectric element area, and the fourth piezoelectric element area are disposed in the maximum deflection area.

A sensor system (10) has a medical device provided with a first transmission/reception unit (16) installed inside a medical instrument (12) to output a detection signal of a sensor unit (22), and a second transmission/reception unit (18) detachably installed outside the medical instrument (12) to transmit/receive a signal to and from the first transmission/reception unit (16) in a contactless manner. The first transmission/reception unit (16) and the second transmission/reception unit (18) are arranged so as to be opposed to each other across the medical instrument (12) to transmit/receive the signal by electromagnetic induction.

The invention discloses a MEMS pressure sensor, which includes a bulk silicon layer, a buried oxygen layer, a substrate, a varistor, a first passivation layer, an electrode layer, and a second passivation layer. The varistor is located on the upper surface of the buried oxygen layer, and the first passivation layer is a rectangular shell located on the upper surface of the buried oxygen layer; there is a through hole in the center of the top of the rectangular shell; the first passivation layer covers the varistor, and the gap between the first passivation layer and the varistor forms an isolation cavity. The electrode layer is located on the upper surface of the first passivation layer and is connected with the varistor via the through hole. The second passivation layer is located on the upper surface of the electrode layer.