Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the supporting section being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and wherein the supporting section has, along a longitudinal extension, portions with different inner circumferential shapes and/or inner circumferential dimensions, wherein a first portion of the supporting section forms the outer circumference of the membrane and a second portion with an inner circumferential shape and/or dimension differing from the first portion and is constant in the longitudinal extent forms at least 25% of the longitudinal extent of the supporting section.

The present application provides a pressure sensor including: an upper cover plate having a first cover plate surface, wherein the upper cover plate has a cover plate through hole formed on the first cover plate surface; a pressure-sensitive film having a first pressure-sensitive surface and a second pressure-sensitive surface opposite to each other, wherein the first pressure-sensitive surface is attached to the first cover plate surface, a first electrode is formed on the second pressure-sensitive surface, and at least a portion of the first electrode corresponds to the cover plate through hole; and a substrate having a first surface joined to the second pressure-sensitive surface, wherein a concave cavity is formed on the first surface at a position corresponding to the cover plate through hole, a second electrode is formed at a wall portion of the concave cavity, and the first and second electrodes constitute two electrodes of a capacitor.

Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a first pressure sensitive element and a second pressure sensitive element with respective first and second membranes positioned in juxtaposed relation to each other to form a capacitor. Some embodiments include a pusher that extends from the membrane toward a first electrode. Some embodiments have a housing comprising a ceramic substrate with a sensor element mounted on an inside surface of the substrate. Other embodiments have direction sensing capabilities including a heater positioned in a core material and at least three temperature sensors located at or near the peripheral surface of the core material and spaced apart angularly in relation to each other.

Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the membrane being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and having an outer circumferential shape with at least one corner.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

The present invention relates to a differential pressure sensor device, comprising a substrate, another layer formed on a main surface of the substrate and a first cavity and a second cavity separated from each other by a membrane. The first cavity is in fluid communication with a channel that is in fluid communication with a vent hole through which air can enter from an environment of the sensor device. The channel extends within the other layer or the substrate in a plane that is substantially parallel to the main surface.

A pressure measuring device includes a ceramic pressure sensor and a process connection, the pressure sensor including a measuring membrane. The pressure measuring device further includes a carrier made of titanium and having a free-standing tubular carrier region running parallel to the surface normal onto the measuring membrane and having an end region adjacent the process connection connected to the process connection and an end region opposite the process connection to which the pressure sensor is fastened by a jointing that connects an outer edge of a front face of the pressure sensor to the end region of the carrier opposite the process connection and carries the pressure sensor.

The invention relates to a method for operating a pressure measuring cell of a capacitive pressure sensor. The pressure measuring cell comprises a pressure-dependent measuring capacitor and a reference capacitor, with an internal alternating square wave excitation voltage applied. The pressure measured value is obtained from capacitance values of the measuring capacitor and the reference capacitor. The measurement signal is an alternating square-wave signal supplied to an evaluation unit. The alternating square-wave signal is supplied to an amplifier unit where signal amplification is performed by amplitude adjustment for the internal excitation voltage and offset compensation is performed by a further square-wave signal and gain correction is performed by multiplicative influencing of the quotient of the capacitance values of the reference capacitor and the measuring capacitor, and the offset correction is performed by virtue of the square-wave signal being supplied to the amplifier unit and thus being added to the square-wave signal.

A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to be measured. The sensor mounting includes a titanium or titanium alloy mounting element including an opening through which the membrane region is contactable with the medium. The membrane edge is connected directly with the mounting element by a diffusion weld produced by a diffusion welding method.

A pressure measuring device includes a ceramic pressure sensor and a process connection, the pressure sensor including a measuring membrane. The pressure measuring device further includes a carrier made of titanium and having a free-standing tubular carrier region running parallel to the surface normal onto the measuring membrane and having an end region adjacent the process connection connected to the process connection and an end region opposite the process connection to which the pressure sensor is fastened by a jointing that connects an outer edge of a front face of the pressure sensor to the end region of the carrier opposite the process connection and carries the pressure sensor.