A capacitive sensor for monitoring stresses acting in a construction structure and having a multi-layer structure provided with an upper conductive layer defining an upper outer surface of the sensor. A lower conductive layer defines a lower outer surface. At least a first structural layer of insulating material is in contact with the upper conductive layer and at least a second structural layer of insulating material is in contact with the lower conductive layer. At least a first plate layer of conductive material and at least a second plate layer, of conductive material, and at least one dielectric layer is interposed between the first plate layer and the second plate layer to define at least one detection capacitor inside the multi-layer structure of the sensor. The upper and lower conductive layers jointly defining an electromagnetic screen for screening the detection capacitor against electromagnetic interference originating from outside the capacitive sensor.

A pressure sensor comprising two parts connected with one another via an active braze joint manufactured by active hard soldering, or brazing, with an active hard solder, or braze, especially a pressure contactable, pressure-dependently elastically deformable, measuring membrane, especially a ceramic measuring membrane, and a platform, especially a ceramic platform, which are connected by an active braze joint connecting an outer edge of the measuring membrane (which covers a pressure chamber with an outer edge of an end of the platform facing the measuring membrane, whose measuring characteristics are improved in that the active braze joint has a coefficient of thermal expansion dependent on the dimensions of the active braze joint and on the materials of the parts and matched to a coefficient of thermal expansion of at least one of the parts, especially the measuring membrane.

An electrode pair that forms a pressure-sensitive capacitance Cx in the central portion of a diaphragm is called a first electrode pair (pressure-sensing electrode pair), and another electrode pair that forms a reference capacitance Cr in the circumferential portion of the diaphragm is called a second electrode pair (reference electrode pair). The ratio Cx/Cr of a change Cx in the pressure-sensitive capacitance Cx, which is obtained from the pressure-sensing electrode pair at the time of evacuation, to a change Cr in the reference capacitance Cr, which is obtained from the reference electrode pair at the time of evacuation, is calculated as an index for malfunction detection . Then, the index for malfunction detection thus calculated is compared with the reference value ref, which represents the index observed during normal operation, and whether deformation due to a cause other than pressure has been generated in the diaphragm is determined.

A shaped body, in particular for a pressure sensor, can have a membrane and having a supporting section supporting the membrane. The membrane can be produced at least in layers from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and having an outer circumferential shape with at least one corner.

A pressure-sensitive chip, a pressure sensor, and a pressure monitoring system. In an embodiment, a pressure-sensitive chip and a signal processing module are packaged to form a pressure sensor. The pressure sensor and a display instrument are connected to form a pressure monitoring system. A pressure-sensitive chip is a ceramic body made of eight green ceramic sheets by stacking and sintering, and includes two capacitors. In another embodiment, a pressure signal of a measurement area is obtained by a method including the following steps: sensing a pressure in a measurement area by the pressure-sensitive chip; generating a capacitance signal by the pressure-sensitive chip; converting the capacitance signal to a voltage signal by the signal processing module; and converting the voltage signal into the pressure signal by the display instrument.

A pressure measurement cell comprises: a ceramic counter body; a ceramic measuring diaphragm which is joined in a pressure-tight manner with the counter body, creating a measurement chamber between the counter body and the measuring diaphragm, by means of a circumferential joint. The measuring diaphragm can be deformed by a pressure to be measured; an electrical converter for converting a pressure-dependent deformation of the measuring diaphragm into an electrical signal; and a temperature transducer for providing at least one electrical signal dependent on a temperature or on a temperature gradient of the pressure measurement cell. The temperature transducer comprises at least one first thermocouple having a galvanic contact between a first conductor with an electrically conductive material and a second conductor with at least one second electrically conductive material.

Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a first pressure sensitive element and a second pressure sensitive element with respective first and second membranes positioned in juxtaposed relation to each other to form a capacitor. Some embodiments include a pusher that extends from the membrane toward a first electrode. Some embodiments have a housing comprising a ceramic substrate with a sensor element mounted on an inside surface of the substrate. Other embodiments have direction sensing capabilities including a heater positioned in a core material and at least three temperature sensors located at or near the peripheral surface of the core material and spaced apart angularly in relation to each other.

Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.