The piezoresistive or capacitive flat pressure sensor (130) comprises a flexible flat membrane (100) made of ceramic material and a relative rigid flat support (110) made of ceramic material, wherein the support (110) has a first main face (220) and a second main face (230), and the membrane (100) has a first main face (200) and a second main face (210), and wherein the first main face (200) of the membrane (100) faces the second main face (230) of the support (110), the first main face (200) of the membrane (100) comprising at least one first electrical circuit (501), the first main face (220) of the support (110) comprising at least one second electrical circuit (502), on the perimeter of the rigid support (110) of the pressure sensor (130) an electrical connection being further provided between the first electrical circuit (501) of the first main face (200) of the membrane (100) and the second electrical circuit (502) of the first main face (220) of the support (110).

Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

Aiming to more easily perform calibration of a sensor output from a pressure sensor, the calibration being necessitated due to the occurrence of sedimentation, a resonance point measurement unit (122) measures a resonance point of a diaphragm (112) on the basis of the result obtained by performing measurement of a constant pressure using the pressure sensor while a power supply frequency is changed, a characteristic calculation unit (123) calculates, on the basis of the measured resonance point, an elastic modulus of the diaphragm (112) at the time of the measurement of the resonance point, and a correction unit (124) calculates a corrected sensor sensitivity resulting from correcting a sensor sensitivity of a sensor chip (101) on the basis of the elastic modulus calculated by the characteristic calculation unit (123).

A variable capacitance type pressure transducer is constructed by electrically conductive diaphragm and electrode disposed on the surface of a dielectric disk. The gap between electrode and diaphragm is formed and solely decided by a spacer made of Super Invar or Invar, which has extra low thermal expansion coefficient. The gap between the electrode and the diaphragm is formed easily and almost no change when temperature of the transducer changes. The dielectric disk is centered with diaphragm radically by a mating between a pin made on the top lid of the pressure transducer and a center hole on the dielectric disk.

The present invention relates to a differential pressure sensor device, comprising a substrate, another layer formed on a main surface of the substrate and a first cavity and a second cavity separated from each other by a membrane. The first cavity is in fluid communication with a channel that is in fluid communication with a vent hole through which air can enter from an environment of the sensor device. The channel extends within the other layer or the substrate in a plane that is substantially parallel to the main surface.

An overload-resistant pressure measuring sensor includes a pressure sensor arranged in an interior of a sensor housing and can be exposed, through an opening in the sensor housing, to a medium under pressure of up to 1000 bar. The medium may be a hydrogen-containing medium and can be measured with high measurement accuracy. The pressure sensor is mounted on connection elements protruding into the interior and free-standing in the interior such that the pressure sensor is exposed to the pressure prevailing in the interior on all sides. The pressure sensor includes two ceramic measuring bodies connected to one another while enclosing a pressure chamber, and are each deformable by the pressure acting thereon, and further includes an electromechanical transducer which converts a mechanical variable that is dependent on a sum of the pressure-dependent deformations of both measuring bodies into a measurable electrical measurement variable.

An active brazing material for the energy-efficient production of active-brazed connections that consists of layer sequences arranged on top of one another, the layer sequences of which consist of layers arranged on top of on another, the layer sequences of which each comprise at least one layer of brazing material, wherein the layers of brazing material of each layer sequence each contain at least one component of a base active braze and, in conjunction with each other, contain all components of the base active braze, the layer sequences of which each comprise at least one first reaction layer consisting of a first reactant to which at least one second reaction layer is directly adjacent in the active brazing material and consists of a second reactant that exothermally reacts with the first reactant, wherein an enthalpy of formation of the exothermic reaction of the reactants is greater than or equal to 45 kJ/molin particular, greater than or equal to 50 kJ/mol.

A pressure sensor assembly for use in sensing a pressure of a process fluid in a high temperature environment includes an elongate sensor housing configured to be exposed to the process fluid and having a cavity formed therein. A pressure sensor is positioned in the cavity of the elongate sensor housing. The pressure sensor has at least one diaphragm that deflects in response to applied pressure and includes an electrical component having an electrical property which changes as a function of deflection of the at least one diaphragm which is indicative of applied pressure. A flexible membrane in contact with the at least one diaphragm is disposed to seal at least a portion of the cavity of the sensor housing from the process fluid and flexes in response to pressure applied by the process fluid to thereby cause deflection of the at least one diaphragm.

A high temperature capacitive pressure sensor includes a first sapphire wafer having a first exterior wafer surface and a first interior wafer surface, a recess extending into the first sapphire wafer, a second sapphire wafer having a second exterior wafer surface and a second interior wafer surface, a first hole extending through the first sapphire wafer, a second hole extending through the first sapphire wafer or the second sapphire wafer, a first via that solidly fills the first hole, the first via including a first interior via surface aligned with the first interior wafer surface, a second via that solidly fills the second hole, the second via including a second interior via surface aligned with the interior wafer surface of the sapphire wafer within which the second via extends, a first electrode deposited on the first interior wafer surface covering and contacting the first interior via surface.

A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.