Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a base comprising non-conductive ceramic material, and some embodiments of the transducers include conductive ceramic materials with resistivities that vary as a function of temperature. Some embodiments of the sensors also include electrical conductors comprising electrically conductive ceramic material or electrical conductors comprising an electrically conductive refractory metal on the base. Other embodiments of the transducers include a capacitor constructed of materials that can withstand very high temperatures.

Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).

The disclosure relates to a pressure sensor for measuring a fluid pressure, in particular a vacuum pressure. The pressure sensor contains a first and a second diaphragm connected to one another such that they enclose and hermetically seal a fluid space. Fluid can enter and exit the fluid space through a fluid supply element, which is connected to an exterior opening of the sensor. Each of the diaphragms is proximal to a reference electrode and forms a variable capacitor, the capacitance of which depends on the position of the diaphragms, which in turn depends on the pressure in the fluid space.

A pressure-measuring cell having a ceramic measuring membrane and a ceramic counter body, wherein the measuring membrane is joined to the counter body in such a way that a pressure chamber is formed between the measuring membrane and the counter body. The pressure-measuring cell also has a capacitive transducer for detecting a pressure-dependent deformation of the measuring membrane, which capacitive transducer has at least one membrane electrode arranged on the measuring membrane and at least one electrode on the counter body side, wherein according to the invention at least one membrane electrode comprises a titanium oxide.

A versatilely usable pressure sensor is described, which has a ceramic pressure measuring cell (5) clamped in the pressure sensor with interpositioning of a seal (1) outwardly sealing an interior of the pressure sensor and loadable via an opening (3) of the pressure sensor with a pressure (p) to be measured, and whose seal (1) comprises a film (21) of a thermoplastic material, especially polytetrafluoroethylene (PTFE), clamped (in an axial direction and extending perpendicularly to planes of the sealing surfaces (25, 27)) between a form-retaining, planar sealing surface (25) of the pressure measuring cell (5) and a form-retaining sealing surface (27, 27) of a counterbody (19, 19) outwardly surrounding the opening (3), characterized in that the film (21) includes a first film segment (23), which is clamped between the sealing surface (25) of the pressure measuring cell (5) and the sealing surface (27, 27) of the counterbody (19), and the film (21) includes a second film segment (29), which extends over a lateral surface (31) of the counterbody (19, 19) different from the sealing surface (27, 27), and which is connected with the counterbody (19, 19) on the lateral surface (31) via a connecting layer (33) of a material serving as bonding agent for the material of the film (21), especially perfluoroalkoxy-polymer (PFA), arranged on the lateral surface (31).

In an embodiment, a pressure transducer includes a first portion, a second portion, and a third portion. The third portion is positioned in a cavity contained in the second portion. In addition, a seal is placed in the cavity. The first portion and second include provisions for applying a downward pressure on the third portion when the first portion and the second portion are joined. The downward pressure is applied by the third portion to the seal the cavity. The first portion also includes a stop and the second portion also includes a snap member. The snap member includes a prong that contains a first edge and a second edge. The snap member allows movement of the first portion after the first edge of the prong meets the stop and restricts movement of the first portion after the second edge of the prong meets the stop.

Method for soldering a connection element to a connection point on an electrically conductive coating that is suitable for soft-soldering on an insulating surface of a base body using a soft-soldering method; as well as sensors manufactured using this method for which a spatial limitation of the wetting of the coating with soft-solder material, during the process of soft-soldering, is effected by providing a groove in the base body which at least partly surrounds the connection point on the outside. At least a part of the area of the external insulating surface of the base body including the connection point is coated with the coating, and soft-solder material is locally applied to the connection point and the connection element is soldered onto the connection point using the applied soft-solder material in a soft-soldering process.

The invention relates to a capacitive pressure measuring cell for detecting the pressure of a medium adjacent to the pressure measuring cell, comprising a ceramic elastic measuring membrane, the first side of which at least partially contacts the medium and the second side of which facing away from the medium comprises a measuring electrode, and a ceramic cylindrical basic body disposed opposite to the second side of the measuring membrane and comprising at least one counter electrode which forms a measuring capacitance with the measuring electrode.

A measuring arrangement with a ceramic measuring cell and a metal process connection for connecting the measuring cell to a measuring environment, with the measuring cell being fastened in the process connection without gaskets and in a diffusion-resistant fashion, with the measuring cell being fastened at a ceramic ring, which is arranged at a metal ring for fastening in the process connection.

A pressure sensor, including a platform of ceramic, a measuring membrane arranged on the platform, a pressure measuring chamber enclosed in the platform under the measuring membrane, and at least one metal body connected with the platform via a pressure-tight, preferably elastomer free, mechanical connection. Thermomechanical stresses arising from the connection are reduced by features including that the pressure-tight, mechanical connection occurs via an adapting body arranged between the platform and the metal body. The adapting body has a thermal expansion coefficient, which rises in direction (z) extending from the platform to the metal body from a coefficient of expansion corresponding to a thermal coefficient of expansion of the ceramic of the platform to a coefficient of expansion corresponding to the thermal coefficient of expansion of the metal body, and the adapting body is connected by a first joint with the platform and by a second joint with the metal body.