The present disclosure is directed to a method of using a gallium-based alloy, such as a eutectic, gallium-based alloy, as pressure transfer liquid in a hydraulic pressure transfer means for determining a process pressure in a process, in which the process medium has a process temperature 400 C. and a process pressure <1 bar absolute, wherein the alloy contains, besides gallium, furthermore, at least one other component and the mixing ratio between gallium and the at least one other component is selected in such a manner that the alloy has a melting temperature less than 20 C.

A relative pressure measuring transducer includes a process adapter having a basic body, which includes a pressure sensitive process diaphragm, a first pressure transfer line and a pressure sensor. A pressure-sensitive reference pressure diaphragm is also provided. The basic body includes a second pressure transfer line, which leads the reference pressure from the reference pressure diaphragm to the pressure sensor and supplies a second area of the pressure sensor with the reference pressure. A housing adapter is embodied to surround the process adapter at the reference pressure diaphragm. The housing adapter is arranged in such a manner relative to the process adapter that in the region of the reference pressure diaphragm an intermediate space is formed between the housing adapter and the process adapter, and in the housing adapter there is a passageway, which connects the intermediate space with the environment of the relative pressure measuring transducer.

A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.

A coplanar process fluid pressure sensor module is provided. The module includes a coplanar base and a housing body. The coplanar base has a pair of process fluid pressure inlets, each having an isolator diaphragm. The housing body is coupled to the coplanar base at an interface between the coplanar base and the housing body. A differential pressure sensor is operably coupled to the pair of process fluid pressure inlets, and is disposed proximate the coplanar base within the housing body.

An apparatus and associated method, for controlling signal passage, includes a first passageway for a first fluid, a second passageway for a second fluid, and an interposed chamber. A first, movable diaphragm at a first chamber junction and a second, movable diaphragm at a second chamber junction, with a third fluid bound there between and interposed between the first and second passageways. A device varies a volume of the third fluid bound between the diaphragms and thus moves the diaphragms. A movable member and a reservoir of the device are configured such that the movable member is sufficiently movable to increase the volume of the reservoir to remove a sufficient portion of the third fluid bound between the first and second diaphragms from the chamber to cause the first and second diaphragms to be pressed against the first and second walls, respectively.

A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.

An apparatus, for controlling signal passage, includes a first passageway for a first fluid, a second passageway for a second fluid, and an interposed chamber. A first, movable diaphragm at a first chamber junction and a second, movable diaphragm at a second chamber junction, with a third fluid bound there between and interposed between the first and second passageways. A device varies a volume of the third fluid bound between the diaphragms and thus moves the diaphragms. The diaphragms each have at least one position that permits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the diaphragms. The diaphragms each have at least one position that prohibits passage of a pressure signal.

A pressure difference sensor, comprising a pressure difference measuring cell having a measuring membrane, two platforms, between which the measuring membrane is arranged, and a transducer, as well as an elastic clamping apparatus, which has two clamping areas, each of which acts on a respective rear side of the platform facing away from the measuring membrane. The clamping apparatus has at least one elastic element, via which the clamping areas are mechanically coupled, in order to clamp the pressure difference measuring cell with an axial clamping force. The clamping areas are rigid, wherein the clamping apparatus comprises a clamp with two clamping bodies, each of which has one of the clamping areas. At least one of the clamping bodies has an elastic element, the clamping bodies are connected with one another under stress, in order to exert a clamping force on the pressure difference measuring cell, wherein the two clamping bodies have a central, form retaining section, which includes the clamping areas. On the form retaining section of at least one clamping body, especially both clamping bodies, elastic sections adjoin, which form the elastic elements.

In a pressure and pressure difference transmitter that seals a sealing liquid for transmitting the pressure inside a pressure leading passage, the pressure and pressure difference transmitter forming a space between a diaphragm and a main body side wall surface, including the pressure leading passage connected to the main body side wall surface, and transmitting the pressure received by the diaphragm to a sensor through the sealing liquid sealed in the space and the pressure leading passage, a hydrogen occluding material for occluding hydrogen atoms of the sealing liquid is disposed at least in the sealing liquid, the main body side wall surface, or a part of a portion from the main body side wall surface to the sensor, with the hydrogen occluding material being formed with an uneven shape on the surface or being attached with a granular hydrogen occluding material.

A sensor device includes a housing frame defining a first opening and a second opening; a sensing element having first and second sides is disposed within the housing frame and defines therein a first cavity at its first site and a second cavity at its second site, wherein the sensing element determines a differential pressure between the first and second sides; a first corrugated diaphragm configured to close the first opening to seal the first cavity, and a second corrugated diaphragm configured to close the second opening to seal the second cavity; and an inert hydraulic fluid disposed within the first and second cavities that fluidly couples an external pressure acting on the respective corrugated diaphragm to the respective side of the sensing element, wherein the first corrugated diaphragm and the second corrugated diaphragm is built by a conformal coating process using a substrate with structured surface.