A method of monitoring a semiconductor fabrication facility and a semiconductor fabrication facility are provided. The method includes collecting an ambient air in a clean room through a plurality of gas lines with their gas inlets arranged at a plurality of sampling positions in the clean room. The method also includes measuring a parameter of the ambient air by a plurality of metrology devices which are connected to the gas lines. At least two of the sampling positions are measured simultaneously. The method further includes issuing a warning when the parameter detected by the metrology devices is outside a range of acceptable values.

A training simulation system and method for detection of hazardous materials simulates real-world hazardous environments to provide a trainee with hazardous material training. The system provides a hazardous material detection simulator that displays simulated readings to indicate presence thereof. The detection simulator automatically generates the simulated readings, based on its relative position to the hazard point, and based on preprogrammed hazard points in the area. A host trainer, through a trainer communication device, remotely generates and adjusts the simulated readings while tracking vehicle's position. A vehicle integrally contains the hazardous material detection simulator. A trainee controls the vehicle while also observing and reacting to the simulated readings. Once the hazard point is determined, based on simulated readings, the trainee can form a decision on the readings and react accordingly. The simulated readings can be adjusted based on the reaction of the trainee and position of vehicle relative to hazard point.

An air sampling device and method of sampling air. The device has a housing body and a retaining assembly for a sampling device. A plenum has a top end coupled to the housing body about an opening such that the plenum is in flow communication with the opening and receives air flow generally from the top end to the bottom end generally along the longitudinal length thereof. A flow connection is coupled to the bottom end of the plenum. A mass flow meter has an input coupled to the flow connection and is in flow communication with the plenum via the flow connection. A blower is configured to draw air past the sampling device, through the opening, and through the plenum, such that a measuring portion of the air flows through the flow connection and through the mass flow meter, which measured the flow rate of the measuring portion.

This invention relates generally to characterizing bioaerosols and, more particularly, to a system for recovering, quantifying, identifying, and assessing the metabolic activities of bioaerosols based on their major biopolymer profiles (lipids, carbohydrate and protein) and more specific their genetic materials (DNA/RNA), such as airborne viruses, bacteria, fungi and pollens.

An air sampling system is disclosed. The air sampling system includes: an air inflow channel having an air inlet portion at a top end, the air inflow channel being oriented substantially vertically; a fan configured to cause air in a sampling environment to flow into the air inflow channel via the inlet portion; a cooling unit for cooling air in the air inflow channel, the cooling unit disposed downstream of the inlet portion; a collection chamber for collecting liquid water condensed from air in the air inflow channel, the collection chamber being fluidly connected to the air inflow channel; and a sensing unit for determining a volume of liquid in the collection chamber, wherein the cooling unit is controlled in response to signals generated by the sensing unit.

This method comprises the following steps retrieving data about amounts of at least one gas, said data being measured in the atmosphere at a distance from the source along a plurality of lines parallel to a first direction; integrating the amounts read on each line in the first direction in order to obtain an integrated overall amount on each line; integrating the product of the integrated overall amounts on each line and a wind speed present on the line in a second direction perpendicular to the first direction, in order to obtain a raw flow of gas; determining the flow of gas emitted by the source based on the raw flow of gas.

Various implementations, systems and methods are disclosed for continuous, near real-time, hands-off sampling of airborne particulate matter, and qualification and/or quantification of biomolecules in the sample representative for biologic or microbial contamination. The systems and methods may utilize an electrostatic precipitator for sampling the matter; and a measurement assembly configured to illuminate, excite, or breakdown the sampled matter by electromagnetic radiation, and to detect a spectrum, or one or more wavelength bands of the scatter emitted by the sample. In an exemplary implementation, a sputter deposition process is employed to configure the sample for an enhanced plasmon resonance. The measurement data may be transferred via wireless communication means for cloud storage and signal processing.

A flow control device is including a tubular body including a tubular wall with an inner surface, an outer surface, and one or more openings extending from the outer surface to the inner surface through the tubular wall; a faired body encircling the tubular body, the faired body including a radially inner surface and a radially outer surface; and a flow shield encircling the faired body, the flow shield including a radially inward surface and a radially outward surface, the radially inward surface being in a facing spaced relationship with the radially outer surface of the faired body defining a passageway therebetween, wherein the passageway is fluidly connected to the one or more openings.

The following is an apparatus and a method that enables the automated collection and identification of airborne particulate matter comprising dust, pollen grains, mold spores, bacterial cells, and soot from a gaseous medium comprising the ambient air. Once ambient air is inducted into the apparatus, aerosol particulates are acquired and imaged under a novel lighting environment that is used to highlight diagnostic features of the acquired airborne particulate matter. Identity determinations of acquired airborne particulate matter are made based on captured images. Abundance quantifications can be made using identity classifications. Raw and summary information are communicated across a data network for review or further analysis by a user. Other than routine maintenance or subsequent analyses, the basic operations of the apparatus may use, but do not require the active participation of a human operator.

A cabin air state sensing system for a vehicle may include a divergence structure facilitating measurement of cabin air temperature and dust concentration in a cabin through suction of air using an air suction device and an operation method thereof.