Multilayered product structures are formed on substrates by a combination of patterning steps, physical processing steps and chemical processing steps. An inspection apparatus illuminates a plurality of target structures and captures pupil images representing the angular distribution of radiation scattered by each target structure. The target structures have the same design but are formed at different locations on a substrate and/or on different substrates. Based on a comparison of the images the inspection apparatus infers the presence of process-induced stack variations between the different locations. In one application, the inspection apparatus separately measures overlay performance of the manufacturing process based on dark-field images, combined with previously determined calibration information. The calibration is adjusted for each target, depending on the stack variations inferred from the pupil images.

Combined electron beam overlay and scatterometry overlay targets include first and second periodic structures with gratings. Gratings in the second periodic structure can be positioned under the gratings of the first periodic structure or can be positioned between the gratings of the first periodic structure. These overlay targets can be used in semiconductor manufacturing.

An acoustic scatterometer has an acoustic source operable to project acoustic radiation onto a periodic structure and formed on a substrate. An acoustic detector is operable to detect the −1st acoustic diffraction order diffracted by the periodic structure and while discriminating from specular reflection (0th order). Another acoustic detector is operable to detect the +1st acoustic diffraction order diffracted by the periodic structure, again while discriminating from the specular reflection (0th order). The acoustic source and acoustic detector may be piezo transducers. The angle of incidence of the projected acoustic radiation and location of the detectors and are arranged with respect to the periodic structure and such that the detection of the −1st and +1st acoustic diffraction orders and discriminates from the 0th order specular reflection.

Diffraction-based imaging systems are described. Aspects of the technology relate to imaging systems having one or more sensors inclined at angles with respect to a sample plane. In some cases, multiple sensors may be used that are, or are not, inclined at angles. The imaging systems may have no optical lenses and are capable of reconstructing microscopic images of large sample areas from diffraction patterns recorded by the one or more sensors. Some embodiments may reduce mechanical complexity of a diffraction-based imaging system. A diffractive imaging system comprises a light source, a sample support configured to hold a sample along a first plane, and a first sensor comprising a plurality of pixels disposed in a second plane that is tilted at an inclined angle relative to the first plane. The first sensor is arranged to record diffraction images of the light source from the sample.

There is provided detecting modification of optically active cellulose-based film. A method comprises split refracting or split reflecting light received by a surface pattern of an optically active cellulose-based film into a plurality of output light patterns, wherein an output light pattern is determined from the plurality of output light patterns on the basis of a modification applied to the optically active cellulose-based film.

The disclosure features systems and methods for measuring and diagnosing target constituents bound to labeling particles in a sample. The systems include a radiation source, a sample holder, a detector configured to obtain one or more diffraction patterns of the sample each including information corresponding to optical properties of sample constituents, and an electronic processor configured to, for each of the one or more diffraction patterns: (a) analyze the diffraction pattern to obtain amplitude information and phase information corresponding to the sample constituents; (b) identify one or more particle-bound target sample constituents based on at least one of the amplitude information and the phase information; and (c) determine an amount of at least one of the particle-bound target sample constituents in the sample based on at least one of the amplitude information and the phase information.

A system for simultaneously detecting audio-characteristics within a body over multiple body surface locations comprising a coherent light source directing at least one coherent light beam toward the body surface locations, an imager acquiring a plurality of defocused images, each is of reflections of the coherent light beam from the body surface locations. Each image includes at least one speckle pattern, each corresponding to a respective coherent light beam and further associated with a time-tag. A processor, coupled with the imager, determines in-image displacements over time of each of a plurality of regional speckle patterns according to said acquired images. Each one of the regional speckle patterns is at least a portion of a respective speckle pattern. Each regional speckle pattern is associated with a respective different body surface location. The processor determines the audio-characteristics according to the in-image displacements over time of the regional speckle patterns.

The present invention provides a sensing device for detecting an analyte containing a non-metallic element such as F. A working sensor has a 3D array of voids each having a void internal wall. The void internal walls have cavities each having a cavity internal wall made from a material containing the non-metallic element. A binding of the analytes to the cavities induces a detectable variation of the optical property of the 3D array of voids. The invention exhibits numerous technical merits such as high sensitivity, high specificity, fast detection, ease of operation, low power consumption, zero chemical release, and low operation cost, among others.

A system for detecting microbes is provided. In the system for detecting microbes, light is emitted to a sample through a light emission module, a sensor module detects speckles generated when the emitted light is scattered by motion of bacteria or microbes contained in the sample, and a controller stores and analyzes images detected by the sensor module to test microbial detection, wherein controller may include a light emission controller connected to the light emission module and configured to control an emission period and an emission intensity of light emitted by the light emission module; an imaging collector connected to the sensor module and configured to store a speckle image generated through multiple scattering by the bacteria or microbes contained in the sample; a corrector configured to correct a deviation caused by a difference in the amount of light when the light emission module emits the light; and an estimator configured to estimate, in real-time, presence or absences of the bacteria or microbes in the sample or a concentration of the bacteria or microbes.

A method of determining 3D crystallographic orientation on a crystalline surface of a sample. The method includes directing a beam of collimated light at a predetermined angle of incidence, wherein reflections from the crystalline surface are projected onto an image sensing unit positioned in a path of reflected light; obtaining a directional reflectance profile from an image of the reflectance pattern generated by the image sensing unit by pixelising the reflectance pattern into a pixelated-image with a center coinciding an intersection of a specularly reflected light beam and the image sensing unit; and processing the directional reflectance profile based on analyzing reflection intensity data in the pixelated-image of the directional reflectance profile to determine the crystallographic orientation of the crystalline surface. A further method including projecting the reflections onto a detector screen and capturing an image of the reflectance pattern on the detector screen.