A microscope, a method, and a system are provided. A system includes a first optical system, a second optical system, and one or more processors. The first optical system is configured to generate an optical phase signal associated with a first image of a sample in a first field of view. The second optical system is configured to generate a polarized signal associated with a second image of the sample in a second field of view. The one or more processors is configured to generate a co-registered phase and polarization information map based on the optical phase signal and the polarized signal. The first field of view is the same as the second field of view. The first image and the second image are captured sequentially.

In an aspect, a plurality of parameters characteristic of the patterned wafer are determined based on measurements of the intensity of electromagnetic radiation after the diffraction thereof at the patterned wafer. The intensity measurements are carried out for at least one used structure and at least one auxiliary structure. The parameters are determined based on intensity values measured during the intensity measurements for respectively different combinations of wavelength, polarization and/or order of diffraction, and also on the basis of correspondingly calculated intensity values, with a mathematical optimization method being applied.

The invention relates to a method and a device for optical in vitro detection of a movement in a biological sample with a spatial extent in the form of a three-dimensional cell and/or tissue culture or a cell cluster or a sample made of freely swimming microorganisms. The method comprises the following steps: (a) providing a receptacle for the sample (1), a light beam source (6), an optical unit (7, 8) and a detector (2), (a1) wherein the optical unit (7, 8) is embodied to illuminate the whole sample (1) in the receptacle with radiation emanating from the light beam source and to guide at least some of the radiation (11) of the light beam source (6), which is changed at any point within the sample (1) by an interaction with the sample (1) in terms of the beam direction thereof, the polarization state thereof and/or the diffraction pattern thereof, to a detection surface (2a) of the detector (2), and (a2) wherein the detector (2) is embodied to generate a measurement signal (9) in a manner dependent on the detected radiation, the time profile of which measurement signal specifies a time profile of an intensity of the detected radiation (11) and/or from which the time profile of the intensity of the detected radiation (11) is derivable; (b) illuminating the sample (1) with radiation from the light beam source; and (c) detecting a movement in the biological sample (1) in a manner dependent on a temporal change in the measurement signal (9).

Devices, systems and methods are described that enable formation of microscopic images with enhanced resolution and high specificity, which among other features and benefits can lead to increased diagnostic accuracy of skin diseases, and decrease the time needed for rendering a diagnosis and the time required for training medical personnel. One optical imaging device includes a condenser, a polarizing beam splitter, an objective lens, and an immersion medium that are arranged in a configuration that allows cross polarization imaging of a sample. The described devices can be implemented using inexpensive optoelectrical components, as well as using existing optical and processing components of commonly used mobile devices, which makes it possible to construct the microscopy devices and systems at low cost for use in a wide range of clinical settings.

An inspection apparatus or lithographic apparatus includes an optical system and a detector. The optical system includes a non-linear prismatic optic. The optical system is configured to receive zeroth and first diffraction order beams reflected from a diffraction target and separate first and second polarizations of each diffraction order beam. The detector is configured to simultaneously detect first and second polarizations of each of the zeroth and first diffraction order beams. Based on the detected first and second polarizations of one or more diffraction orders, an operational parameter of a lithographic apparatus can be adjusted to improve accuracy or precision in the lithographic apparatus. The optical system can include a plurality of non-linear prismatic optics. For example, the optical system can include a plurality of Wollaston prisms.

Disclosed herein is a novel system and method for the remote characterization of visible emissions, and more particularly, to compact, optical sensors which can remotely measure the opacity of a visible emission plume from a stationary source. Assessing visible emissions is important for compliance with environmental regulations and to support the regulatory reporting needs of Federal and State inspectors. By reducing the power consumption of the laser source and the signal processing, a compact, handheld or portable, battery-operable opacity measurement system can be realized while allowing eye-safe operation. The system and method may also be applied to non-stationary sources.

A cuvette carrier comprising: a plurality of walls defining a holding volume for a cuvette; a first and second transmissive region included in the plurality of walls; and a first optical polarizer arranged to polarize light passing through the first transmissive region.

The invention relates to a method and a device for the optical in vitro detection of a movement in a biological sample and/or for the optical in vitro detection of a movement of a component of the biological sample. The method has the following step: (a) providing an optical wide-field illumination device for illuminating the sample, said device being designed to illuminate the entire sample, and a detector (3) for detecting radiation (9; 9a, 9b) coming from the sample. The detector (3) has a detection surface (3a) which is divided into multiple detection regions (4a). The detector is additionally designed to derive (S1) detection signals (4c) of individual detection regions (4a) with respect to time, subsequently rectify (S2) the signals, preferably by generating an absolute value or squaring, and summing or averaging (S3) the derived and rectified detection signals of all of the detection regions and then providing same as an output signal (6c). The method further has the steps of illuminating the sample using the wide-field illumination device and detecting a movement in the biological sample on the basis of the output signal (6c) of the detector (3).

A method and system for high-speed 2? multi-point scatterometry is disclosed. The method includes directing a laser beam from a laser light source to a collimation optical system that collimates the laser beam to a collimated laser beam; adjusting a polarization of the collimated laser beam using a polarization control optics; directing the collimated laser beam that is polarized by a first optical system to illuminate a focal area on a sample surface; receiving reflected light from the focus of the laser light source at the sample surface by a second optical system; detecting the reflected light by a detector system to produce detection signals; and processing the detection signals to measure parameters of the sample surface.

Systems and methods are provided for measuring spectral hemispherical reflectance. One embodiment is a system that includes a laser that emits a beam of light, and an optical chopper disposed between the laser and a sample. The chopper blocks the beam while the chopper is at a first angle of rotation, redirects the beam along a reference path while the chopper is at a second angle of rotation, and permits the beam to follow a sample path through the chopper and strike the sample while the chopper is at a third angle of rotation. The system also includes a hollow sphere that defines a slot through which the sample path and reference path enter the sphere. The hollow sphere includes a spectral hemispherical reflectance detector, a mount that receives the sample at the sphere, and an actuator that rotates the sphere about an axis that intersects the sample.