A method of measuring a concentration of NO.sub.2 in a gaseous mixture using a multimode laser beam that covers a tunable spectral range with a width of no more than 5 nm, wherein the multimode laser beam provides a high resolution transmittance spectrum at an absorption cross section of NO.sub.2 molecules, and a system for measuring the concentration of NO.sub.2 in the gaseous mixture. Various combinations of embodiments of the system and the method are provided.

A particle concentration measurement system includes a first window and a second window separated by a sensing volume. The system also includes one or more supports to provide structural support for the first window at a first end and for the second window at a second end, opposite the first end, of each of the one or more supports. The sensing volume is defined by the one or more supports and the first window and the second window is open to an environment of the particle concentration measurement system adjacent to the one or more supports such that particle-laden gas from the environment that includes particles mixed with other materials enters the sensing volume. A first compressed gas orifice directs compressed gas onto the first window to clean the first window and a second compressed gas orifice directs the compressed gas onto the second window to clean the second window.

A particle concentration measurement system includes a first window and a second window separated by a sensing volume. The system also includes one or more supports to provide structural support for the first window at a first end and for the second window at a second end, opposite the first end, of each of the one or more supports. The sensing volume is defined by the one or more supports and the first window and the second window is open to an environment of the particle concentration measurement system adjacent to the one or more supports such that particle-laden gas from the environment that includes particles mixed with other materials enters the sensing volume. A first compressed gas orifice directs compressed gas onto the first window to clean the first window and a second compressed gas orifice directs the compressed gas onto the second window to clean the second window.

A method of measuring a concentration of NO.sub.2 in a gaseous mixture using a multimode laser beam that covers a tunable spectral range with a width of no more than 5 nm, wherein the multimode laser beam provides a high resolution transmittance spectrum at an absorption cross section of NO.sub.2 molecules, and a system for measuring the concentration of NO.sub.2 in the gaseous mixture. Various combinations of embodiments of the system and the method are provided.

A method of measuring a concentration of NO.sub.2 in a gaseous mixture using a multimode laser beam that covers a tunable spectral range with a width of no more than 5 nm, wherein the multimode laser beam provides a high resolution transmittance spectrum at an absorption cross section of NO.sub.2 molecules, and a system for measuring the concentration of NO.sub.2 in the gaseous mixture. Various combinations of embodiments of the system and the method are provided.

A gas sensor has a light detector, a gas-tight support structure enclosing the light detector, a window positioned in said support structure, and a light source mounted to the support structure. A sample area is positioned in the support structure to receive a gas to be tested. The light source is aligned with the window, sample area, and the light detector to pass light from the light source through the gas in the sample area to the light detector. The sensor can be provided in a breadth sampling apparatus that has deflects gas to a bypass route so that only a portion of gas reaches the sensor.

A gas sensor has a light detector, a gas-tight support structure enclosing the light detector, a window positioned in said support structure, and a light source mounted to the support structure. A sample area is positioned in the support structure to receive a gas to be tested. The light source is aligned with the window, sample area, and the light detector to pass light from the light source through the gas in the sample area to the light detector. The sensor can be provided in a breadth sampling apparatus that has deflects gas to a bypass route so that only a portion of gas reaches the sensor.

A gas sensor (1) is described comprising a light source (2), and a detector (4), a first reflector (7), which is concave and arranged to reflect and concentrate light emitted from the light source (2) to a first light spot (31), and an interference filter (5). The gas sensor comprises a second reflector (8), a third reflector (9), which is concave, and a reflector base (37) with a dome shaped surface (17) with the first and third reflectors facing the light source (2) and the detector (4). During operation of the gas sensor (1), the detector (4) is illuminated by light from the light source (2), which in an optical path from the light source (2) has been reflected at least once in each one of the first reflector (7), the second reflector (8), and the third reflector (9). The gas sensor (1) is configured for detection of a first wavelength portion of the light.

Methods and apparatus for processing a substrate are provided herein. For example, a gas supply configured for use with a processing chamber includes an ampoule that stores a precursor and comprises an input to receive a carrier gas and an output to provide a mixture of the carrier gas and the precursor to the processing chamber and a sensor assembly comprising a detector and an infrared source operably connected to an outside of an enclosure, through which the mixture flows, and a gas measurement volume disposed within the enclosure and along an inner wall thereof so that a concentration of the precursor in the mixture can be measured by the detector and transmitted to a controller.

A gas sensor comprising: a substrate; a grating array disposed on top of the substrate and comprising grates; and voids defined by the grates and configured to confine gas molecules for absorption of light and analysis. A method of gas sensing comprising: generating first light; converting the first light into second light using grates of a grating array; resonating the second light within the grating array; confining gas molecules in voids defined by the grates; and causing the gas molecules to absorb the second light within the voids.