G01N21/67

SPARK EMISSION SPECTROMETER WITH SEPARABLE SPARK CHAMBER
20210285820 · 2021-09-16 ·

The invention relates to an optical emission spectrometer with a spark chamber (10) which comprises a spark stand opening (14) and an oblong electrode (11) being arranged inside thereof for generating a spark and a beam of light originating therefrom. Furthermore, a coupling unit (20) is provided which comprises at least one window being arranged on a window holder and a channel. The spark chamber (10) and the coupling unit (20) are arranged with respect to each other such that the beam of light falls through the window (30) into the channel (21). In addition, the spark chamber (10) and the coupling unit (20) comprise means for purging with an inert gas.

The spark chamber (10) is directly connected with a window holder (31) and via the window holder (31) with the coupling unit (20), wherein between spark chamber (10) and window holder (31) a sealing element (33) is provided. The coupling unit (20) comprises at least one elastic means which is arranged such that it presses the window holder (31) against the spark chamber (10).

SPARK EMISSION SPECTROMETER WITH SEPARABLE SPARK CHAMBER
20210285820 · 2021-09-16 ·

The invention relates to an optical emission spectrometer with a spark chamber (10) which comprises a spark stand opening (14) and an oblong electrode (11) being arranged inside thereof for generating a spark and a beam of light originating therefrom. Furthermore, a coupling unit (20) is provided which comprises at least one window being arranged on a window holder and a channel. The spark chamber (10) and the coupling unit (20) are arranged with respect to each other such that the beam of light falls through the window (30) into the channel (21). In addition, the spark chamber (10) and the coupling unit (20) comprise means for purging with an inert gas.

The spark chamber (10) is directly connected with a window holder (31) and via the window holder (31) with the coupling unit (20), wherein between spark chamber (10) and window holder (31) a sealing element (33) is provided. The coupling unit (20) comprises at least one elastic means which is arranged such that it presses the window holder (31) against the spark chamber (10).

Device for recognizing an arcing fault, and electrical switchgear
11095109 · 2021-08-17 · ·

Disclosed is a device for recognizing an arcing fault in incident light that includes a sensor for detecting absorption lines of the incident light, and an evaluation unit which generates an evaluation signal when characteristic absorption lines are detected.

Device for recognizing an arcing fault, and electrical switchgear
11095109 · 2021-08-17 · ·

Disclosed is a device for recognizing an arcing fault in incident light that includes a sensor for detecting absorption lines of the incident light, and an evaluation unit which generates an evaluation signal when characteristic absorption lines are detected.

Apparatus and method for optically detecting the emissions of a plasma produced in a conductive liquid by means of electrodes with different areas in contact with the liquid

An apparatus comprises: a chamber (100) configured to be filled with electrically conductive liquid (102); a first electrode (104) and a second electrode (106) located within the chamber (100); an optical radiation receiver (126); and an electrically conductive contact area (108) of the first electrode (104) and an electrically conductive contact area (110) of the second electrode (106) are configured to be in contact with the liquid (102) of the chamber (100) wherein the electrically conductive contact area (108) of the first electrode (104) is configured to be smaller than the electrically conductive contact area (110) of the second electrode (106). The first electrode (104) and the second electrode (106) are configured to receive electric energy and output the electric energy to the liquid (102) in order to cause substance of the liquid (102) to emit optical radiation at the electrically conductive contact area (108) of the first electrode (104) on the basis of densification of the electric energy due to the smaller electrically conductive contact area (108) of the first electrode (104). The optical radiation receiver (126) is configured to receive the optical radiation for analysis of the liquid (102).

Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device

An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.

Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device

An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.

DETECTING METHOD AND DETECTING DEVICE OF GAS COMPONENTS AND PROCESSING APPARATUS USING DETECTING DEVICE OF GAS COMPONENTS
20210231571 · 2021-07-29 ·

Provided is a detecting device of gas components that includes a gas component detecting unit for detection of a light emission of plasma that is formed by re-excitation downstream of an arrangement position of an object to be processed. The gas component detecting unit includes an introduced gas supply portion that supplies an introduced gas, a nozzle portion that is provided with a hole through which the introduced gas that is supplied from the introduced gas supply portion passes through and an opening through which a part of a gas to be analyzed flowing through an exhaust pipe portion is introduced into an inside of the hole, the opening being provided in an intermediate portion of the hole, a discharge electrode portion that generates plasma inside the nozzle portion by causing the gas to be analyzed that is introduced from the opening into an inside of the nozzle portion and the introduced gas that is supplied into the inside of the hole to discharge, and a light emission detecting unit that detects a light emission of the plasma generated inside the nozzle portion by the discharge electrode portion.

LIQUID ELECTRODE TIP
20210223182 · 2021-07-22 ·

A liquid electrode tip has a housing with a top, a bottom and at least one peripheral side wall. The housing has a liquid inlet and a liquid outlet. The liquid outlet is located at the top of the housing. A solution reservoir is positioned within the housing. The solution reservoir has a solution inlet in fluid communication with the liquid inlet and a solution outlet in fluid communication with the liquid outlet. A conductor is positioned within the housing with at least a portion of the conductor being submerged by a liquid in the solution reservoir. A staging area at the top of the housing is provided into which the liquid from the solution reservoir flows from the liquid outlet.

LIQUID ELECTRODE TIP
20210223182 · 2021-07-22 ·

A liquid electrode tip has a housing with a top, a bottom and at least one peripheral side wall. The housing has a liquid inlet and a liquid outlet. The liquid outlet is located at the top of the housing. A solution reservoir is positioned within the housing. The solution reservoir has a solution inlet in fluid communication with the liquid inlet and a solution outlet in fluid communication with the liquid outlet. A conductor is positioned within the housing with at least a portion of the conductor being submerged by a liquid in the solution reservoir. A staging area at the top of the housing is provided into which the liquid from the solution reservoir flows from the liquid outlet.